A three-dimensional target capable of serving as a positioning reference, including, on a useful face, a first structure and a second structure. The first structure defines a planar reference face divided up between at least a first portion whose surface is reflective according to a diffuse reflection, and a second portion whose surface is reflective according to a specular reflection, the second portion being divided up according to a series of localized zones positioned in the first portion. The second structure has an inclined face relative to the planar reference face. Applicable to three-dimensional optical measurement of the relative position between a first object and a second object.
|
29. Three-dimensional target capable of serving as positioning reference, comprising, on a useful face:
a first structure defining a planar reference face divided up between at least:
a first portion whose surface is reflective according to a diffuse reflection, and
a second portion whose surface is reflective according to a specular reflection; and
a second structure defining an inclined surface that is essentially planar and inclined relative to said planar reference face, the inclined surface having relief elements or specular elements evenly distributed over the inclined surface.
1. Three-dimensional target capable of serving as positioning reference, comprising, on a useful face:
a first structure defining a planar reference face divided up between at least:
a first portion whose surface is reflective according to first reflection parameters, and
a second portion whose surface is reflective according to second reflection parameters different from the first reflection parameters, said second portion being divided up according to a series of localized zones positioned in the first portion; and
a second structure defining an inclined surface that is essentially planar and inclined relative to said planar reference face, the inclined surface having relief elements or specular elements evenly distributed over the inclined surface.
17. Three-dimensional optical measuring device for measuring the relative position between a first object and a second object, comprising:
a three-dimensional target configured to be mounted on said first object, said three-dimensional target being capable of serving as positioning reference, and comprising, on a useful face:
a first structure defining a planar reference face divided up between at least:
a first portion whose surface is reflective according to first reflection parameters, and
a second portion whose surface is reflective according to second reflection parameters different from the first reflection parameters, said second portion being divided up according to a series of localized zones positioned in the first portion; and
a second structure having a face that is inclined relative to said planar reference face, and
an optical system comprising a first exposure system and a second exposure system, said optical system being configured to be placed on said second object,
in which the difference between a focal distance of the second exposure system and a focal distance of the first exposure system, lies between the minimum distance and the maximum distance separating the reference face from the inclined face.
25. Method for three-dimensional optical measurement according to three orthogonal directions X, Y and Z for measuring a relative position between a first object and a second object that are aligned and remote from one another in the main direction Z, wherein:
a three-dimensional target is provided forming a positioning reference, and comprising, on a useful face:
a first structure defining a planar reference face divided up between at least:
a first portion whose surface is reflective according to first reflection parameters, and
a second portion whose surface is reflective according to second reflection parameters different from the first reflection parameters, said second portion being divided up according to a series of localized zones positioned in the first portion, and
a second structure having a face that is inclined relative to said planar reference face,
an optical system is provided comprising a first exposure system and a second exposure system, said optical system being arranged such that the difference between the focal distance of the second exposure system and the focal distance of the first exposure system lies between the minimum distance and the maximum distance separating the reference face from the inclined face,
said three-dimensional target is positioned on the first object,
said optical system is positioned on the second object such that, on the one hand, the focal distance of the first exposure system can place the image focus F1 of the first exposure system on the first structure of the target and that, on the other hand, the focal distance of the second exposure system can place the image focus F2 of the second exposure system on the second structure of the target,
at least one exposure is taken simultaneously with the first exposure system of the optical system and with the second exposure system of the optical system, whereby, for each exposure by the optical system, on the one hand, the first exposure system generates a first image of the target making it possible to identify the position of the localized zones on the reference face, which gives, firstly, a first piece of information on the relative position according to the direction X of the target relative to the first exposure system and, secondly, a second piece of information on the relative position between the target and the first exposure system according to the direction Y, and, on the other hand, the second exposure system generates a second image of the target comprising a sharp portion corresponding to a location of the inclined face of the second structure, which gives a third piece of information on the distance between said target and said second exposure system according to the direction Z.
2. Three-dimensional target according to
3. Three-dimensional target according to
4. Three-dimensional target according to
5. Three-dimensional target according to
6. Three-dimensional target according to
7. Three-dimensional target according to
8. Three-dimensional target according to
9. Three-dimensional target according to
10. Three-dimensional target according to
12. Three-dimensional target according to
13. Three-dimensional target according to
14. Three-dimensional target according to
15. Three-dimensional target according to
16. Three-dimensional target according to
18. Three-dimensional optical measuring device according to
19. Three-dimensional optical measuring device according to
20. Three-dimensional optical measuring device according to
21. Three-dimensional optical measuring device according to
22. Three-dimensional optical measuring device according to
23. Arrangement for the three-dimensional optical measurement of the relative position between a first object and a second object, comprising:
an installation comprising a first object and a second object,
an optical measuring device according to
the first exposure system is configured such that its image focal plane (F1) is capable of corresponding to the reference face of the first structure, and
the second exposure system is configured such that its image focal plane F2 is capable of being secant with the inclined face of the three-dimensional target.
24. Arrangement according to
26. Measurement method according to
27. Measurement method according to
the tool-holder and the work-holder are arranged aligned in the main direction Z such that the useful face of said three-dimensional target is located in the optical path of the optical system.
28. Measurement method according to
30. Three-dimensional target according to
|
The present invention relates to the field of the optical measurement of the relative position between a first object and a second object.
More specifically, the present invention relates to a three-dimensional optical measurement of the relative position between a first object and a second object. This type of measurement is used in many fields applying dimensional metrology, including in particular, but not exclusively, the field of workpiece machining, particularly by machine tool or any other machining by material removal.
In the machine-tool field, there is a need to accurately know the relative position between the tool-holder and the work-holder, in order to ensure a machining range conforming to the machining plan developed during adjustment.
The production of workpieces by means of machining modules (machine-tools), in particular auto lathes, automatic turning machines, turning-milling centres, milling machines, machining centres and transfer machines, typically comprises three distinct phases.
In a first adjustment (or presetting) phase, the operator (for example an auto lathe operator) defines and tests, on a machining module, the machining plan, that is to say the succession of operations and of axis displacements necessary to obtain the desired workpiece to be machined. The operator is for example careful to obtain the most effective possible machining plan, that is to say the one which makes it possible to machine a given workpiece with a minimum of operations and avoiding collisions between tools or with the workpiece. He or she chooses the tools to be employed, and checks the quality of the workpieces obtained, for example the surface conditions, compliance with tolerances, etc.
In a second production phase, a series of workpieces are produced on the preset machining module, with the parameters defined during adjustment. This phase is the only productive phase; it is often performed 24 hours a day, the machining module being supplied with raw material by means of an automatic magazine feed or a loader of slugs (raw workpieces).
It may be that the production of a series of workpieces is interrupted, for example to replace the worn tools, to produce another type of workpiece on the same machining module, for machine maintenance etc., then subsequently restarted. In such a case, a makeready phase is necessary to apply the parameters defined previously during adjustment. This makeready phase is faster than adjustment.
During makeready, it is often necessary to replace the tools mounted on the machine with another set of tools suitable for the machining which is to be performed. The accuracy of the positioning of these tools determines the quality of the machining, but it is difficult to reproduce in successive makeready phases.
In addition, during the production phase it is not impossible to have, as the machining of new workpieces progresses, and in particular for long runs, drifts of position between the tool-holder and the work-holder, drifts which are due in particular to the thermal expansion of the machines.
Various solutions have therefore been proposed in the prior art in order to guarantee a correct relative positioning between the tool-holder and the work-holder during the production phase and during makeready, that is to say a relative positioning that conforms to the relative position between the tool-holder and the work-holder during adjustment.
Many in-situ measurement techniques used in machine-tools aim to measure the relative position between the workpiece or the work-holder and the tool itself. However, in this case, the measurement of the relative position between the workpiece or the work-holder and the tool is affected by the effects of the wear of the tool and of the thermal drift of the machine-tool during its operation.
Also, this type of relative position measurement is generally performed in two dimensions, that is to say in two directions, as in the document DE202016004237U.
Since this relative registration between the workpiece or the work-holder and the tool is limited to two dimensions (for example Y and X, respectively the lateral and vertical directions), it is not sufficiently comprehensive to ensure the correct relative position, such that another technique has to be used to measure the third dimension (for example Z, the direction of advance/of retraction of the work-holder, also called “material direction”). This situation increases not only the cost of the measurement technique, but also the implementation time thereof, and it also adds an error through the use of two series of measurement simultaneously.
The document US2014362387 AA discloses an optical measuring device placed on the tool-holder and that makes it possible to check that a target object does not interfere with the tool-holder. This optical measuring device uses a gauging element with several inclined parts to characterize the geometric parameters of the laser ray measuring device, in particular the position between the sensor of the reflected ray and the emitter of the incident ray. This gauging element is not involved in measuring the relative position between the tool-holder and the target object which can be a workpiece to be machined.
The document US2010111630 AA discloses a tool repositioning system for a machine-tool, comprising targets of irregular form situated on the tool and that allows for the optical measurement of the precise position of the tool by optical measuring elements whose position is not specified.
The document US2007253002 AA discloses a system for optically measuring the distance between two bodies that are to be aligned, comprising, respectively, an emitting element and a receiving element placed at the ends of the two bodies.
The document U.S. Pat. No. 5,831,734 describes a solution in which an optical sensor is secured to the tool-holder and performs the registration of the relative position of this tool-holder relative to a workpiece to be machined provided with a distinctive mark (groove).
The document US2014343890 proposes a hand-held device used as an aid in measuring the position of an object with a laser system. This hand-held device comprises a three-dimensional target which comprises a conical reference face with a single useful face comprising visual reference marks and, at its centre, a retroreflector.
Document US2004202364 presents a calibration object in the form of a prism, each face of which comprises visual reference marks, and possibly a referencing mark to identify the face concerned.
These solutions do not however make it possible to be able to determine, by a single exposure step, the relative position between the workpiece to be machined and the tool, this single exposure step giving the information that makes it possible to determine this relative position in the three dimensions of space.
Nor do these solutions make it possible to become independent of the parameters that are variable in real time during the machining, in particular the wear of the tool and the thermal variations of the tool and/or of the work space of the machine-tool which receives the workpiece to be machined.
One aim of the present invention is to propose a technology that makes it possible to perform a measurement of relative position between a tool-holder and a work-holder, and more generally between a first object and a second object, that is free of the limitations of the known measurement techniques.
Another aim of the invention is to propose a technology that makes it possible to perform a measurement of relative position between a tool-holder and a work-holder, and more generally between a first object and a second object, which provides the three-dimensional relative position between the first object and the second object from a single exposure step.
According to the invention, these aims are achieved in particular by means of a three-dimensional target capable of serving as positioning reference, comprising, on a useful face:
a first structure defining a planar reference face divided up between at least:
a second structure having a face that is inclined relative to said planar reference face. Such an arrangement makes it possible to register the target according to the three directions X, Y and Z of a reference frame of Cartesian coordinates, with the target having its first structure or reference face parallel to the plane X, Y and the second structure or its inclined face which extends over a certain extent along the main direction Z.
According to another alternative arrangement, said planar reference face is divided up between at least:
According to one embodiment, the surface of this inclined face has evenly distributed relief elements. According to another embodiment, the surface of this inclined face has evenly distributed specular elements. In both cases, the idea is to be able to register the inclined face, which is roughly planar, in a direction Z orthogonal to the reference face. To do this, in one case, the relief elements constitute surface irregularities or roughnesses of small size, the surface of the inclined face being rough and making it possible to form a diffuse reflection which allows an optical system which looks at the target to clearly see a portion of the inclined face: in particular, these relief elements have a size greater than 700 nanometres, in particular greater than 1 micrometre, namely of a size greater than the wavelength of the incident radiation, here natural light. In the other case, the specular elements of the inclined face, positioned according to a geometrical arrangement, for example in mutually parallel lines and positioned at different positions according to the direction Z, are visually distinguished from the rest of the surface of the inclined face (which is preferably reflective according to a diffuse reflection), hence the possibility for an optical system which looks at the target to clearly see a portion of the inclined face with one or more of these specular elements.
This three-dimensional target has, on its side forming the useful face, a dual structure, respectively defining a first planar reference face and a second reference face, defining a plane that is inclined relative to the first reference face. This three-dimensional geometry of the target, allied with specific and different optical characteristics of the surfaces that respectively make up the first reference face and the second reference face, allow for an optical registration in the three dimensions X, Y and Z of space of this target relative to the optical system used. In one embodiment, this optical system makes it possible to perform this optical registration, namely culminating in the measurement of relative position, by virtue of a single step of exposure both of the first planar reference face and of the second inclined reference face: it therefore involves a simultaneous exposure of the image of the first planar reference face and of the second reference face. This simultaneous exposure can be done in two, three or more iterations, even in bursts over n exposures (n being an integer greater than one, for example ranging from two to fifteen). In this way, it is possible to have several images (a series of images) both of the first planar reference face and of the second reference face, which makes it possible to perform a processing by computation algorithms, not of a single image of the first planar reference face and of the second reference face, but a processing of the series of images both of the first planar reference face and of the second reference face, and thus gain in accuracy.
In particular, according to one possible provision, this generation of image(s) of the first planar reference face and of the second reference face is performed by the optical system used without having to perform an adjustment, as will be explained later. In this case, there is no specific setting to be performed in the optical system, which allows for a significant time saving in the performance of the measurement of the relative position of the three-dimensional target. This solution notably offers the advantage over the prior art of not requiring either several measurement steps or even the modification of the settings and in particular the focal distance of the optical system which is looking at this target.
Also, when this target is used for measurement of relative position between a tool-holder and a work-holder, it is possible to become independent of the wear of the tool and of the thermal variations of the tool and/or of the work space of the machine-tool which receives the workpiece to be machined by placing this target on the tool-holder.
The present invention relates also to a three-dimensional optical measuring device for measuring the relative position between a first object and a second object, comprising a three-dimensional target as described in the present text and intended to be mounted on said first object, and an optical system comprising a first exposure system and a second exposure system, said optical system being intended to be placed on said second object, in which the difference between the focal distance of the second exposure system and the focal distance of the first exposure system lies between the minimum distance and the maximum distance separating the reference face from the inclined face.
Thus, the optical system can simultaneously identify its position relative, on the one hand, to the reference face (or first reference face) via the image generated by the first exposure system and, on the other hand, to at least one zone of the inclined face (or second reference face) which is identified via the image generated by the first exposure system, and whose location on the target is known relative to the reference face.
Such an optical system can be placed on one of the two objects concerned (the second object) and allows, through the two exposure systems, for a simultaneous exposure of two sharp images at two adjacent locations on the other one out of the two objects (first object), these two locations of the first object being situated at a slightly different distance from the second object. Such an optical system makes it possible, as will be described in detail herein below, by virtue of the two images, to three-dimensionally register the relative position between the first object and the second object which bears the optical system.
According to one possibility, the optical system is arranged such that the optical path from the object (first object) passes through at least a portion of one out of the first and the second exposure systems before reaching the other out of the first and the second exposure systems. In this way, it is possible to have a section of optical path as input/output of the optical system which is common or very close for the first and the second exposure systems. It is thus possible not only to combine the first and the second exposure systems on the same optical system but also to be able to register two adjacent locations on the first object, which are a few tens of millimetres, even a few millimetres, even less than one millimetre apart.
The present invention also relates to an arrangement for the three-dimensional optical measurement of the relative position between a first object and a second object, comprising:
an installation comprising a first object and a second object,
an optical measuring device as described in the present text.
According to a first possibility, the optical measuring device is such that:
the first exposure system is configured such that its image focal plane can correspond to the reference face of the first structure, and
the second exposure system is configured such that its image focal plane can be secant with the inclined face of the three-dimensional target.
According to a second possibility, compatible with the first possibility mentioned above or taken alone, the optical measuring device is such that:
the focal distance of the first exposure system is capable of making it possible to place the image focus on the first structure,
the focal distance of the second exposure system is capable of making it possible to place the image focus on the second structure.
Such an installation is for example a piece of equipment, a machine, a module, in particular scientific or technical, having a first object and a second object that can be moved relative to one another and for which it is necessary to perform a relative position registration in the three-dimensional space. For example, this installation is a machine-tool or a machining module with, as first object, the tool-holder or one of the tool-holders and, as second object, the work-holder bearing the workpiece to be machined (bar, blank, etc.). According to another example, this installation is a unit for mounting electronic components on a PCB (or printed circuit board), with, as first object, the support of the printed circuit board and, as second object, the clamp or other tool for mounting an electronic component. According to yet another example, this installation is a cell culture module for performing the seeding of series of wells housed on microplates, the first object being the support of the microplate and the second object being the support of the device for injecting the cells to be cultivated.
The present invention relates also to a method for three-dimensional optical measurement according to three orthogonal directions X, Y and Z for measuring a relative position between a first object and a second object that are aligned and remote from one another in the main direction Z, in which:
a three-dimensional target is provided forming a positioning reference, and comprising, on a useful face:
a first structure defining a planar reference face divided up between at least:
a first portion whose surface is reflective according to a diffuse reflection, and
a second portion whose surface is reflective according to a specular reflection, said second portion being divided up according to a series of localized zones positioned in the first portion, and
a second structure having a face that is inclined relative to said planar reference face,
an optical system is provided comprising a first exposure system and a second exposure system,
said three-dimensional target is positioned on the first object,
said optical system is positioned on the second object such that, on the one hand, the focal distance of the first exposure system can place the image focus of the first exposure system on the first structure of the target and that, on the other hand, the focal distance of the second exposure system can place the image focus of the second exposure system on the second structure of the target,
at least one exposure is taken simultaneously with the first exposure system of the optical system and with the second exposure system of the optical system, whereby, for each exposure by the optical system, on the one hand, the first exposure system generates a first image of the target making it possible to identify the position of the second portion relative to the first portion (in particular the position of the localized zones) on the reference face, which gives, firstly, a first piece of information on the relative position according to the direction X of the target relative to the first exposure system and, secondly, a second piece of information on the relative position between the target and the first exposure system according to the direction Y, and, on the other hand, the second exposure system generates a second image of the target comprising a sharp portion corresponding to a location of the inclined face of the second structure, which gives a third piece of information on the distance between said target and said second exposure system according to the direction Z. According to one possibility, said optical system is arranged such that the difference between the focal distance of the second exposure system and the focal distance of the first exposure system lies between the minimum distance and the maximum distance separating the reference face from the inclined face. According to another possibility, taken alone or in combination with the preceding one, said optical system is arranged such that the optical path of the first exposure system and the optical path of the second exposure system have a common section including the image focal plane of the first exposure system and image focal plane of the second exposure system. According to yet another possibility, taken alone or in combination with one or both of the preceding two possibilities, the depth of field (DOF1) of the first exposure system is at least ten times greater than the depth of field (DOF2) of the second exposure system.
By this method, it is possible to have spatial geometrical information linked to the (first) reference face and to the inclined face or second reference face of the three-dimensional target, making it possible to deduce therefrom the relative position in the three spatial directions X, Y and Z between the first object and the second object. First, the referencing of the three-dimensional relative position between the target and the first object and the referencing of the three-dimensional relative position between the optical system and the second object will have been performed.
It is important to note that, in one embodiment, the exposure or image generation by each exposure system of the optical system is performed without performing focusing of the corresponding exposure system. Indeed, it is the relative position in the three directions X, Y and Z of the exposure system relative to the object that it is looking at (and therefore both the relative position of the first exposure system relative to the reference face of the target and the relative position of the second exposure system relative to the inclined face of the target) and the optical properties, and in particular the very different depth of field of each exposure system of the optical system, which makes it possible to simultaneously generate two images, respectively of the reference face and of the inclined face. The analysis of these two images (even of two series of images) makes it possible to deduce therefrom information on the relative position in terms of X (this direction X corresponding for example to the height) and in terms of Y (this direction Y corresponding for example to the horizontal lateral offset) and in terms of Z (this direction Z corresponding for example to the main horizontal distance) between the target and the optical system, and therefore the three-dimensional relative position between the first object which bears the three-dimensional target and the second object which bears the optical system.
In one embodiment, after the positioning of the three-dimensional target on the first object and the positioning of the optical system on the second object, an additional step is performed of spatial referencing of the position in terms of X, Y and Z of the target relative to the first object by the optical system.
According to one possible provision, the second portion of the planar reference face is divided up into a series of localized zones positioned in the first portion and the first image generated by the first exposure system makes it possible to identify the position of the localized zones of the second portion on the reference face, which gives information on the relative position between said localized zones and the first exposure system making it possible to deduce the relative measurement in the direction Y and in the direction X.
In one implementation, the measurement method is a method for measuring, in the three-dimensional space of a machine-tool, the relative position between a tool-holder and a work-holder, in which said first object is said tool-holder and said second object is said work-holder, in which an additional step is performed, before said step of simultaneous exposure with said optical system, according to which:
According to another possible provision, the optical device also comprises a third exposure system arranged on the tool-holder and configured to register the orientation of the useful face of the target and/or the angular orientation of the tool-holder.
Examples of implementation of the invention are indicated in the description illustrated by the attached figures in which:
The target 200 is now described in relation to
The surface of the useful face 202 of the target 200 is divided up between a first structure 210 and a second structure 220. The first structure 210 comprises a planar reference face 212 whose surface is smooth and is divided up between a first portion 214 whose surface is reflective according to a diffuse reflection and a second portion 216 whose surface is reflective according to a specular reflection. In one embodiment, the first portion 214 is coated with a diffusing reflective layer, for example of barium sulfate BaSO4, and the second portion 216 is formed by a layer that is reflective according to a specular reflection, for example of chromium. In the embodiment illustrated, the second portion 216 is made up of several localized zones 217 in the form of circles forming islands positioned within the first portion 214 which is continuous. These localized zones 217 can take other forms, such as segments or islands of a form other than a circle. These localized zones 217 define, between them, a geometrical figure belonging to the following list: quadrilateral, parallelogram, rectangle, square, rhombus, regular polygon and circle. This geometrical figure can be a geometrical figure with central symmetry. In
The second structure 220 comprises a face which is inclined 222 relative to the reference face 212: this inclined face 222 is essentially planar, the median plane of this inclined face forming, relative to the reference face 212, an acute angle α lying between 10 degrees and 80 degrees, for example between 20 and 30 degrees, and preferably of the order of 25 degrees (see
In one embodiment, the surface of this inclined face 222 is not smooth but has relief elements 224 forming surface irregularities, which are either random or else according to a predetermined geometry, for example defining between them a form of grid or a network of lines, thus constituting a structured grid (not represented) or structured network of lines (see
Such relief elements 224 can be protruding or hollowed out, that is to say set back, relative to the median plane of the inclined face 222, particularly in the form of small roughnesses, or any other surface irregularity. Such relief elements 224 can be present over all the surface of the inclined face 222. Such relief elements can be evenly distributed over all the surface of the inclined face 222. For example, these relief elements 224 can form a set delimiting a grid or network pattern, or more generally a structured surface or a rough surface which makes it possible to have the light reflected on this inclined face 222 well diffused. The surface of the inclined face 222 of the second structure 222 is for example covered by one of the following elements: etched network or structured grid, with a pitch between the patterns of the grid or of the network lying between 5 and 100 micrometres, in particular between 5 and 50 micrometres, and in particular between 8 and 15 micrometres, for example of the order of 10 micrometres.
For example, this inclined face 222 is made of non-polished silicon or else of ceramic, or of non-polished metal or of glass, or any other structurable material, and the relief elements 224 have been obtained by photolithography, machining by chip removal, direct writing, etc., or any other structuring method. These relief elements 224 form, for example, depressions and/or protuberances respectively set back from/extending beyond the median plane by a few micrometres or by a few tens of micrometres, in particular between 0.5 and 50 micrometres.
In another embodiment, as illustrated in
According to an embodiment that is not illustrated, the inclined face 222 of the second structure 220 bears spot, protruding relief elements 224, in the form of small mounds or spikes, which are distributed in mutually parallel rows, the relief elements 224 being mutually offset from one row to another, to form a staggered pattern. According to another embodiment that is not illustrated, the inclined face 222 of the second structure 220 bears protruding relief elements 224 in the form of segments that are parallel to one another and equidistant according to two series intersecting at 90° to one another. This set of relief elements 224 constitutes a grid pattern. It should be noted that this grid can be formed by two series of mutually parallel segments, with series of segments intersecting according to an angle other than 90° to one another. In
In the embodiment of
Thus, in some of the abovementioned cases, and in particular those of
According to the embodiments represented for the target 200, the pellet delimiting the target 200 comprises, on its useful face 202, the first structure 210 which occupies most of the surface of the useful face 202, and, within the first structure 210, a zone reserved for the second structure 220. In this situation, the first structure 210 surrounds the second structure 220. More specifically, the localized zones 217 of the second portion 216 of the first structure 210 define a square which surrounds the second structure 220. According to one possible provision, and in the case of the embodiments of the target 200 as represented, the first structure 210 and the second structure 220 are positioned on the useful face 202 concentrically to one another. Moreover, as in the cases represented, the first structure 210 delimits an aperture 218 for a housing 219 housing said second structure 220, which is for example positioned on a wafer having the inclined face 222. When the wafer is housed in the housing 219 of the first structure 210, its inclined face 222 is turned towards the outside of the housing 219, towards the aperture 218. In this particular case, the second structure 220 is positioned in said housing 219 with the inclined face 222 which is set back relative to the reference face of said first structure 210: this means that the inclined face 22, therefore the second structure 220, is positioned to the rear, behind the plane delimited by the reference face 212 (relative to the main direction Z, see
In order to protect the first structure 210 and the second structure 220 from the environment (dust, oil, impacts, etc.), as can be seen in
Moreover, the target 200 can be equipped with a chip of RFID (radio frequency identification) type, not represented, in order to allow the storage and reading of a unique identifier and of data related to the target 200 and related to a first object on which the target 200 is intended to be mounted, in particular a tool-holder 310 (see
Reference is now made to
This optical system 100 comprises a first exposure system 110 and a second exposure system 120. According to one provision, said optical system 100 is arranged such that the difference between the focal distance of the second exposure system 120 and the focal distance of the first exposure system 110 lies between the minimum distance and the maximum distance separating the reference face 212 from the inclined face 202. According to another provision, the depth of field DOF1 of the first exposure system 110 is much greater and in particular at least ten times greater than the depth of field DOF2 of the second exposure system 120. For example the depth of field DOF1 of the first exposure system 110 is between 10 and 10,000, or even between 100 and 5000 times greater than the depth of field DOF2 of the second exposure system 120. Among different possibilities, the depth of field DOF1 of the first exposure system 110 is greater than or equal to 0.8 millimetres, or else it lies between 0.5 and 5 millimetres, or else it lies between 0.8 and 3 millimetres, or else it lies between 1 and 2 millimetres. Also, according to different possibilities, the depth of field DOF2 of the second exposure system 120 is less than or equal to 0.1 millimetres, or else it lies between 5 and 50 micrometres, or else it lies between 8 and 30 micrometres, or else it lies between 10 and 20 micrometres.
This allows the first exposure system 110 to naturally and without other setting, focus on all the reference face 212 of the first structure 210 within a range of distance between the target 200 and the first exposure system 110 that can vary over a few millimetres. In parallel, the second exposure system 120 is capable of naturally and without other setting focusing on the portion of the inclined face 222 of the second structure 210 which is at a distance from the second exposure system 120 corresponding to the focal distance of the second exposure system 120. According to one possibility, the enlargement of the first exposure system 210 is less than or equal to the enlargement of the second exposure system 220.
Each exposure system within the meaning of the present invention (first exposure system 210 and second exposure system 220) corresponds to an optical system, in particular a centred optical system, comprising a set of optical components and an image acquisition system. Such an image acquisition system makes it possible to take photographs and/or videos, and is for example a camera or a photographic appliance, in particular a digital photographic appliance. According to one possible provision, the first image acquisition system 112 of the first exposure system 110 and the second image acquisition system 122 of the second exposure system 120 are synchronized in order to simultaneously take a first image by the first exposure system 110 and a second image by the second exposure system 120.
To allow the simultaneous access to the vision of the target 200 by the first exposure system 210 and by the second exposure system 220, the latter have a common portion of optical path which is directed towards and originates from the object watched by the optical system 100, in this case the target 200 (see
In particular, as illustrated in
In the common portion of the optical paths 116 and 126, the optical rays are at least partly merged with or else simply parallel to one another. The second exposure system 120 which is off centre has a portion of optical path 126 internal to this second exposure system 120 which is preferably parallel to the optical axis O. This internal portion of optical path 126 is linked to, or more specifically meets, the optical path 116 of the first exposure system 110 aligned by a dedicated optical module 128, comprising a catoptric optical system such as a mirror 129. In this way, the input of the off-centre exposure system (here the second exposure system 120) is linked to the trajectory or optical path of the aligned exposure system (here the first exposure system 110).
More generally, it is understood that one out of the first exposure system 110 and the second exposure system 120 is turned towards the useful face 202 of the target 200 and forms an exposure system aligned with the target 200, and the other exposure system out of the first exposure system 110 and the second exposure system 120 has an optical path 126 which meets the optical path 116 of the exposure system 110 aligned with the target 200 and forms an off-centre exposure system. This means that the other exposure system has an optical axis which passes through the inclined face 222, that is to say the second structure 220 of the target 200. Also, the first exposure system 110 and the second exposure system 120 are positioned in parallel to one another. Furthermore, the optical system also comprises an optical module 128 (for example with a catoptric optical system such as a mirror) positioned between the first exposure system 110 and the second exposure system 120 and configured to deflect a portion of the light rays passing through at least a part of one out of the first and the second exposure systems to the other of the first and the second exposure systems. Conversely, the optical system 100 is arranged such that the optical path from the object watched (the target 200 in
In one embodiment, the focal distance of the second exposure system 120 is greater than the focal distance of the first exposure system 110. For example, the difference between the focal distance of the second exposure system 120 and the focal distance of the first exposure system 110 lies between 0.5 and 5 millimetres.
In one embodiment, the enlargement of the first exposure system 110 is less than or equal to the enlargement of the second exposure system 120. For example, the enlargement of the first exposure system 110 lies between 0.2 and 1 times the enlargement of the second exposure system 120. For example, the enlargement of the first exposure system 110 lies between 0.3 and 0.8, or else between 0.4 and 0.6, preferably around 0.5 times the enlargement of the second exposure system 120.
In the embodiment of
According to one embodiment, the first exposure system 210 used and the second exposure system 220 used are telecentric. As a reminder, telecentricity is a characteristic of an optical system in which all the main rays (the central ray of each beam of rays) which pass through the system are practically collimated and parallel to the optical axis. In the case of telecentric optics, the notion of depth of field is replaced by that of working distance. According to another embodiment, the first exposure system 210 used and the second exposure system 220 used are not, or are not both, telecentric. In the case where they are both telecentric, they can be used also to measure the geometrical characteristics of the tools positioned on the tool-holder 310.
Reference is now made to
As in the case represented in
the tool-holder 310 and the work-holder 320 are positioned such that the useful face 202 of the three-dimensional target 200 is in the optical path O of the optical system 100. In particular, the third exposure system 130 can be used to register the angular orientation of the target 200 relative to the rotary part of the tool-holder 310, therefore relative to the axis X, which makes it possible to modify, if necessary, the angular orientation of the rotary part of the tool-holder 310 (see the arrow R in
In the first use of the optical device 10, namely of the optical system 100 and of an associated target 200, respectively mounted on a work-holder 320 (or more generally a second object) and on a tool-holder 310 (or more generally a first object), a preliminary additional step has to be performed, of spatial referencing of the position of the target 200 relative to the tool-holder 310 (or more generally a first object) which bears the target 200 in the three directions X, Y and Z. It should be noted that, obviously, the parameters of the optical system 100, namely of the first exposure system 110 and of the second exposure system, are known, including their focal distance. At this stage, it can be mentioned that when the work space of the machining module 300 is confined and maintained at constant temperature, this thermal stability generates a dimensional stability in the optical device 10 and therefore in its parameters.
It is recalled that the measurement of the three-dimensional relative position between the target 200 and the optical system 100 is used in the case of a machine-tool to ultimately know the three-dimensional relative position in terms of X, Y and Z between the tool-holder 310 (or more generally a first object) and the work-holder 320 (or more generally a second object).
In the present text, the three directions X, Y and Z are, for example, the axes of the machining module 300 of the machine-tool. Thus, Z can be defined as being the main axis, namely the main horizontal direction separating the first object (the tool-holder 310) from the second object (from the work-holder 320). X can be defined as the vertical direction or, more generally, a first transverse axis, and Y can be defined as a lateral horizontal direction or, more generally, a second transverse axis. In one embodiment, the tool-holder 310 rotates about an axis parallel to this direction X.
In this step of spatial referencing of the position in the three directions X, Y and Z of the target 200 (calibration of the optical device 10), for example with the arrangement of
In parallel, the processing of the second image, an example of which is visible in
By performing this operation multiple times, each time modifying the distance in terms of Z of the work-holder 310 relative to the tool-holder 320 (for example by retracting or advancing the work-holder 310), it is thus possible to reconstruct the three-dimensional image of the inclined face 222 of the target 200, and have a reference base forming a mapping for the three-dimensional coordinates of the inclined face 222 of the target 200 relative to the tool-holder 310. Ultimately, it is all of the useful face 202 of the target 200 (reference face 212 and inclined face 222) which is spatially referenced in the three directions X, Y and Z relative to the tool-holder 310.
Next, the actual measurement can be performed whenever necessary during operations of use of the machining module 300 equipped with this target 200 and with this optical system 100, not dismantled between times to conserve the accuracy of the measurement of the spatial referencing explained previously. To this end, there is used for example the arrangement of
It will be understood from the above that, in this way, solely through the analysis of the two images generated by the optical system 100, without a loss of time that a setting or an adjustment of this optical system 100 would entail, the position in terms of X, Y and Z of the target 200 relative to the optical system 100 and starting from the tool-holder 310 relative to the work-holder 320, is very rapidly measured. This is possible because the position in terms of X, Y and Z of the optical system 100 relative to the work-holder 320 is known.
The present text relates also to an optical system for the three-dimensional measurement of the relative position between a first object and a second object on which said optical system is intended to be mounted, said optical system comprising a first exposure system and a second exposure system, in which:
The present text relates also to a method for three-dimensional optical measurement according to three orthogonal directions X, Y and Z, between a first object and a second object that are aligned and remote from one another in the main direction Z, in which:
a three-dimensional target is provided comprising, on a useful face forming a positioning reference:
a first structure defining a planar reference face divided up between at least:
a first portion whose surface is reflective according to first reflection parameters, and
a second portion whose surface is reflective according to second reflection parameters different from the first reflection parameters, and
a second structure having a face that is inclined relative to said planar reference face
an optical system is provided comprising a first exposure system and a second exposure system, in which:
the depth of field of the first exposure system is at least 10 times greater than the depth of field of the second exposure system, and
said optical system is arranged, on the one hand, such that the optical path of the first exposure system and the optical path of the second exposure system have a common section comprising the image focal plane of the first exposure system and the image focal plane of the second exposure system, and, on the other hand, such that the difference between the focal distance of the second exposure system and the focal distance of the first exposure system lies between the minimum distance and the maximum distance separating the reference face from the inclined face,
said three-dimensional target is positioned on the first object such that, on the one hand, the focal distance of the first exposure system can place the image focus of the first exposure system on the first structure of the target and, on the other hand, the focal distance of the second exposure system can place the image focus of the second exposure system on the second structure of the target,
said optical system is positioned on the second object,
at least one exposure is performed simultaneously with the first exposure system of the optical system and with the second exposure system of the optical system, whereby, for each exposure by the optical system, on the one hand, the first exposure system generates a first image of the target that makes it possible to identify, on the reference face, the position of the second portion relative to the first portion (or else the position of the localized zones on the reference face), which gives, firstly, a first piece of information on the relative position according to the direction X of the target relative to the first exposure system and, secondly, a second piece of information on the relative position between the target and the first exposure system according to the direction Y, and, on the other hand, the second exposure system generates a second image of the target comprising a sharp portion corresponding to a location of the inclined face of the second structure, which gives a third piece of information on the distance between said target and said second exposure system according to the direction Z.
As already explained previously, the optical system 100 therefore generates the first image and the second image synchronously. Furthermore, the optical system 100 generates the first image and the second image without performing adjustment, which makes it possible to perform the exposure immediately and without loss of time.
The present text relates also to a machine-tool comprising an optical target as defined previously, and a machine-tool comprising an optical system as defined previously. The present text relates also to a machine-tool comprising a machining module equipped with a tool-holder and a work-holder, and an optical measuring device for the three-dimensional measurement of the relative position between said tool-holder and said work-holder, said optical measuring device comprising an optical system mounted on the work-holder and a target mounted on the tool-holder and comprising a useful face forming a positioning reference that can be placed in the optical axis of the optical system. For example, the optical measuring device is configured to make it possible, through a single step of exposure of the target by the optical system, to determine the three-dimensional relative position between the holder of the workpiece to be machined and the tool-holder. Also, according to one possible provision, the target is positioned such that the image focal plane of the optical system can be merged with the useful face of the target.
Jacot, Philippe, Laporte, Sebastien, Perret, Frederic
Patent | Priority | Assignee | Title |
Patent | Priority | Assignee | Title |
4952815, | Apr 14 1988 | Nikon Corporation | Focusing device for projection exposure apparatus |
5831734, | Oct 31 1994 | U S PHILIPS CORPORATION | Method of measuring a reference position of a tool relative to a workpiece, and machine tool for carrying out said method |
20040202364, | |||
20060268285, | |||
20070153297, | |||
20070253002, | |||
20080030710, | |||
20100111630, | |||
20140343890, | |||
20140362387, | |||
CN101750012, | |||
CN104142122, | |||
DE202016004237, | |||
JP1038573, | |||
JP2010217017, | |||
JP7246547, | |||
WO2006011386, | |||
WO2010069160, |
Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Nov 29 2018 | LDI FINANCES | (assignment on the face of the patent) | / | |||
Aug 24 2020 | LAPORTE, SÉBASTIEN | WATCH OUT SA | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 053774 | /0813 | |
Sep 07 2020 | JACOT, PHILIPPE | WATCH OUT SA | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 053774 | /0813 | |
Apr 28 2021 | PERRET, FREDERIC | WATCH OUT SA | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 056252 | /0131 | |
Mar 01 2022 | LDI FINANCES | WATCHOUTCORP SA | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 065104 | /0829 | |
Sep 05 2022 | WATCH OUT SA | LDI FINANCES | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 061133 | /0173 |
Date | Maintenance Fee Events |
Jun 19 2020 | BIG: Entity status set to Undiscounted (note the period is included in the code). |
Jun 19 2020 | BIG: Entity status set to Undiscounted (note the period is included in the code). |
Jun 25 2020 | SMAL: Entity status set to Small. |
Jun 25 2020 | SMAL: Entity status set to Small. |
Jan 19 2024 | BIG: Entity status set to Undiscounted (note the period is included in the code). |
Date | Maintenance Schedule |
Jan 10 2026 | 4 years fee payment window open |
Jul 10 2026 | 6 months grace period start (w surcharge) |
Jan 10 2027 | patent expiry (for year 4) |
Jan 10 2029 | 2 years to revive unintentionally abandoned end. (for year 4) |
Jan 10 2030 | 8 years fee payment window open |
Jul 10 2030 | 6 months grace period start (w surcharge) |
Jan 10 2031 | patent expiry (for year 8) |
Jan 10 2033 | 2 years to revive unintentionally abandoned end. (for year 8) |
Jan 10 2034 | 12 years fee payment window open |
Jul 10 2034 | 6 months grace period start (w surcharge) |
Jan 10 2035 | patent expiry (for year 12) |
Jan 10 2037 | 2 years to revive unintentionally abandoned end. (for year 12) |