A method of making a dielectric, dk, electromagnetic, EM, structure, includes: providing a first mold portion comprising substantially identical ones of a first plurality of recesses arranged in an array; filling the first plurality of recesses with a curable first dk composition having a first average dielectric constant greater than that of air after full cure; placing a substrate on top of and across multiple ones of the first plurality of recesses filled with the first dk composition, and at least partially curing the curable first dk composition; and, removing the substrate with the at least partially cured first dk composition from the first mold portion, resulting in an assembly having the substrate and a plurality of dk forms including the at least partially cured first dk composition, each of the plurality of dk forms having a three dimensional, 3D, shape defined by corresponding ones of the first plurality of recesses.
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23. A method of making a dielectric, dk, electromagnetic, EM, structure having a plurality of a first dielectric portion, 1DP, and a plurality of a second dielectric portion, 2DP, the method comprising:
providing a substrate;
disposing a layer of photoresist on top of the substrate;
disposing a photomask on top of the photoresist, the photomask comprising a plurality of substantially identically configured opaque covers arranged in an array, thereby providing non-exposed photoresist in areas covered by the opaque covers, and exposed photoresist in areas not covered by the opaque covers;
exposing at least the exposed photoresist to EM radiation;
removing the non-exposed photoresist from the substrate, resulting in a plurality of substantially identically configured portions of remaining photoresist arranged in the array that form corresponding ones of the plurality of 1DPs having a first average dielectric constant;
optionally shaping via a stamping form each 1DP of the plurality of 1DPs into a dome structure having a convex distal end;
filling a flowable form of a curable dk composition into spaces between the plurality of 1DPs, wherein the filled spaces provide corresponding ones of the plurality of 2DPs having a second average dielectric constant that is less than the first average dielectric constant;
optionally removing any excess dk composition above an upper surface of the plurality of 1DPs, leaving the dk composition flush with the upper surface of the plurality of 1DPs;
at least partially curing the curable dk composition, resulting in at least one array of the plurality of 1DPs surrounded by the plurality of 2DPs.
30. A method of making a dielectric, dk, electromagnetic, EM, structure having a plurality of a first dielectric portion, 1DP, and a plurality of a second dielectric portion, 2DP, the method comprising:
providing a substrate;
disposing a layer of photoresist on top of the substrate;
disposing a grayscale photomask on top of the photoresist, the grayscale photomask comprising a plurality of substantially identically configured covers arranged in an array, the covers of the grayscale photomask comprising an opaque central region transitioning to a partially translucent outer region, thereby providing non-exposed photoresist in areas covered by the opaque region, partially exposed photoresist in areas covered by the partially translucent region, and fully exposed photoresist in areas not covered by the covers;
exposing the grayscale photomask and the fully exposed photoresist to EM radiation;
removing the partially and fully exposed photoresist subjected to the EM radiation exposure, resulting in a plurality of substantially identically shaped forms of remaining photoresist arranged in the array that form the plurality of 1DPs having a first average dielectric constant;
filling a flowable form of a curable dk composition into spaces between the plurality of 1DPs, wherein the filled spaces provide corresponding ones of the plurality of 2DPs having a second average dielectric constant that is less than the first average dielectric constant;
optionally removing any excess dk composition above an upper surface of the plurality of 1DPs, leaving the dk composition flush with the upper surface of the plurality of 1DPs;
at least partially curing the curable dk composition, resulting in an assembly comprising the substrate and the at least one array of the plurality of 1DPs having the substantially identically shaped forms surrounded by the plurality of 2DPs disposed on the substrate.
14. A method of making a dielectric, dk, electromagnetic, EM, structure having a plurality of a first dielectric portion, 1DP, and a plurality of a second dielectric portion, 2DP, each 1DP having a proximal end and a distal end, the method comprising:
providing a support form;
disposing a sheet of a polymer on the support form;
providing a stamping form and stamping, down then up, the sheet of polymer supported by the support form, the stamping form comprising a plurality of substantially identically configured projections arranged in an array, wherein the stamping results in displaced material of the sheet of polymer, a plurality of depressions having a blind end arranged in the array in the sheet of polymer, and a plurality of raised walls of the sheet of polymer surrounding each one of the plurality of depressions, the plurality of raised walls forming the plurality of 2DPs;
filling a flowable form of a curable dk composition into the plurality of depressions, wherein each depression of the plurality of depressions forms a corresponding one of the plurality of 1DPs having a first average dielectric constant, wherein the sheet of polymer has a second average dielectric constant that is less than the first average dielectric constant, wherein the distal end of each 1DP is proximate an upper surface of the plurality of raised walls of the sheet of polymer;
removing any excess dk composition above the upper surface of the plurality of raised walls of the sheet of polymer, leaving the dk composition flush with the upper surface of the plurality of raised walls;
at least partially curing the curable dk composition to form at least one array of the plurality of 1DPs;
removing from the support form a resulting assembly comprising the stamped sheet of polymer material with the plurality of raised walls, the plurality of depressions, and the at least one array of the plurality of 1DPs formed in the plurality of depressions.
1. A method of making a dielectric, dk, electromagnetic, EM, structure, comprising:
providing a first mold portion comprising substantially identical ones of a first plurality of recesses arranged in an array;
filling the first plurality of recesses with a curable first dk composition having a first average dielectric constant greater than that of air after full cure;
placing a substrate on top of and across multiple ones of the first plurality of recesses filled with the first dk composition and at least partially curing the curable first dk composition; and
further comprising:
prior to providing the first mold portion, providing a first pre-mold portion comprising substantially identical ones of a second plurality of recesses arranged in the array, each one of the second plurality of recesses being larger than a corresponding one of the first plurality of recesses;
filling the second plurality of recesses with a curable second dk composition having a second average dielectric constant that is less than the first average dielectric constant and greater than that of air after full cure;
placing a second pre-mold portion on top of the first pre-mold portion, the second pre-mold portion having a plurality of openings arranged in the array and in a one-to-one correspondence with each one of the second plurality of recesses;
placing a third pre-mold portion on top of the second pre-mold portion, the third pre-mold portion having a plurality of substantially identical ones of projections arranged in the array, the substantially identical ones of the projections being inserted into corresponding ones of the openings of the second pre-mold portion, and into corresponding ones of the second plurality of recesses, thereby displacing the second dk material in each one of the second plurality of recesses by a volume equal to at least a portion of the volume of a given projection;
pressing the third pre-mold portion toward the second pre-mold portion and at least partially curing the curable second dk composition;
separating the third pre-mold portion relative to the second pre-mold portion to yield a mold form having the at least partially cured second dk composition therein that serves to provide the first mold portion, and establishes the step of providing a first mold portion comprising substantially identical ones of a first plurality of recesses arranged in an array; and
removing the substrate with the at least partially cured first dk composition and the at least partially cured second dk composition from the first mold portion, resulting in an assembly comprising the substrate and the plurality of dk forms comprising the array of the at least partially cured first dk composition and the corresponding array of the at least partially cured second dk composition, each of the plurality of dk forms having a 3D shape defined by corresponding ones of the first plurality of recesses and the second plurality of recesses.
2. The method of
placing a second mold portion on top of the substrate;
pressing the second mold portion toward the first mold portion and at least partially curing the curable first dk composition; and
separating the second mold portion relative to the first mold portion.
3. The method of
the substrate comprises: a dk layer; a metal layer; a combination of a dk layer and a metal layer; a metal layer having a plurality of slots, each one of the plurality of slots disposed in a one-to-one correspondence with a filled recess of the plurality of filled recesses; a printed circuit board; a flexible circuit board; or, a substrate integrated waveguide, SIW; or, an EM signal feed network.
4. The method of
the plurality of dk forms comprise a plurality of dielectric resonator antennas, DRAs, disposed on the substrate.
5. The method of
the plurality of dk forms comprise a plurality of dielectric resonator antennas, DRAs, comprising the first dk composition disposed on the substrate, and a plurality of dielectric lenses or dielectric waveguides comprising the second dk composition disposed in one-to-one correspondence with the plurality of DRAs.
6. The method of
the second pre-mold portion comprises a plurality of relatively thin connecting channels that interconnect adjacent ones of the second plurality of recesses, which are filled during the step of displacing the second dk material in each one of the second plurality of recesses by the volume equal to at least a portion of the volume of a given projection, thereby resulting in the assembly comprising the substrate and the plurality of dk forms, along with a plurality of relatively thin connecting structures interconnecting adjacent ones of the plurality of dk forms, the relatively thin connecting structures comprising the at least partially cured second dk composition, the relatively thin connecting structures and the filled second plurality of recesses forming a single monolithic.
7. The method of
pouring and squeegeeing a flowable form of the respective curable dk composition into the corresponding recesses.
8. The method of
imprinting a flowable dielectric film of the respective curable dk composition into the corresponding recesses.
9. The method of
curing the respective curable dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
10. The method of
the first average dielectric constant is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
11. The method of
the curable first dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
12. The method of
the curable first dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
13. The method of
the 3D shape has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
15. The method of
providing a substrate and placing the assembly onto the substrate with the stamped polymer sheet disposed on the substrate.
16. The method of
providing a substrate and placing the assembly onto the substrate with at least the distal ends of the plurality of 1DPs disposed on the substrate.
17. The method of
the substrate comprises any one of: a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network.
18. The method of
the curable dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
19. The method of
the curable dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
20. The method of
each of the plurality of the 1DPs has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
21. The method of
each raised wall of a corresponding 2DP has an inner cross-section shape, as observed in an x-y plane cross-section, that is circular.
22. The method of
the at least partially curing comprises at least partially curing the curable dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
24. The method of
the step of optionally shaping comprises shaping via application of the stamping form to the plurality of 1DPs at a temperature that causes reflow but not curing of the photoresist, followed by at least partially curing the shaped plurality of 1DPs to maintain the dome shape.
25. The method of
the substrate comprises any one of: a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network;
the photoresist is a positive photoresist;
the EM radiation is X-ray or UV radiation;
the non-exposed photoresist is removed via etching;
the at least partially curing comprises curing the curable dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
26. The method of
the curable dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
27. The method of
the curable dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
28. The method of
each of the plurality of the 1DPs has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
29. The method of
each opaque cover has an outer shape, as observed in an x-y plane plan view, that is circular.
31. The method of
the substrate comprises any one of: a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network;
the photoresist is a positive photoresist;
the EM radiation is X-ray or UV radiation;
the partially and fully exposed photoresist is removed via etching;
the at least partially curing comprises curing the curable dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
32. The method of
the curable dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
33. The method of
the curable dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
34. The method of
each of the plurality of the 1DPs has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
35. The method of
each of the plurality of the 1DPs has any one of: a dome shape; a conical shape; a frustoconical shape; a cylindrical shape; a ring shape; or, a rectangular shape.
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This application claims the benefit of U.S. Provisional Application Ser. No. 62/775,069, filed Dec. 4, 2018, which is incorporated herein by reference in its entirety.
The present disclosure relates generally to dielectric, Dk, electromagnetic, EM, structures and methods of making the same, and particularly to cost efficient methods of making high performance Dk EM structures.
An example Dk EM structure and example method of making the same is disclosed in WO 2017/075177 A1, assigned to Applicant.
While existing Dk EM structures and methods of making the same may be suitable for their intended purpose, the art relating to the fabrication of Dk EM structures would be advanced by the application of cost efficient methods of making Dk EM structures.
An embodiment includes a method of making a dielectric, Dk, electromagnetic, EM, structure, comprising: providing a first mold portion comprising substantially identical ones of a first plurality of recesses arranged in an array; filling the first plurality of recesses with a curable first Dk composition having a first average dielectric constant greater than that of air after full cure; placing a substrate on top of and across multiple ones of the first plurality of recesses filled with the first Dk composition, and at least partially curing the curable first Dk composition; and, removing the substrate with the at least partially cured first Dk composition from the first mold portion, resulting in an assembly comprising the substrate and a plurality of Dk forms comprising the at least partially cured first Dk composition, each of the plurality of Dk forms having a three dimensional, 3D, shape defined by corresponding ones of the first plurality of recesses.
Another embodiment includes a method of making a dielectric, Dk, electromagnetic, EM, structure having one or more of a first dielectric portion, 1DP, the method comprising: providing a first mold portion comprising substantially identical ones of a first plurality of recesses arranged in an array and configured to form a plurality of the 1DP, the first mold portion further comprising a plurality of relatively thin connecting channels that interconnect adjacent ones of the plurality of recesses; filling the first plurality of recesses and the relatively thin connecting channels with a curable Dk composition having an average dielectric constant greater than that of air after full cure; placing a second mold portion on top of the first mold portion with the curable Dk composition disposed therebetween; pressing the second mold portion toward the first mold portion and at least partially curing the curable Dk composition; separating the second mold portion relative to the first mold portion; and removing the at least partially cured Dk composition from the first mold portion, resulting in at least one Dk form comprising the at least partially cured Dk composition, each of the at least one Dk form having a three dimensional, 3D, shape defined by the first plurality of recesses and the interconnecting plurality of relatively thin connecting channels, the 3D shape defined by the first plurality of recesses providing a plurality of the 1DP in the EM structure.
Another embodiment includes a method of making a dielectric, Dk, electromagnetic, EM, structure, comprising: providing a sheet of Dk material; forming in the sheet substantially identical ones of a plurality of recesses arranged in an array, with the non-recessed portions of the sheet forming a connecting structure between individual ones of the plurality of recesses; filling the plurality of recesses with a curable Dk composition having a first average dielectric constant greater than that of air after full cure, wherein the sheet of Dk material has a second average dielectric constant that is different from the first average dielectric constant; and at least partially curing the curable Dk composition.
Another embodiment includes a dielectric, Dk, electromagnetic, EM, structure, comprising: at least one Dk component comprising a Dk material other than air having a first average dielectric constant; and a water impervious layer, a water barrier layer, or a water repellent layer, conformally disposed over at least a portion of the exposed surfaces of the at least one Dk component.
The above features and advantages and other features and advantages of the invention are readily apparent from the following detailed description of the invention when taken in connection with the accompanying drawings.
Referring to the exemplary non-limiting drawings wherein like elements are numbered alike, or wherein similar elements are numbered similarly but with a differing leading numeral, in the accompanying Figures:
Although the following detailed description contains many specifics for the purposes of illustration, anyone of ordinary skill in the art will appreciate that many variations and alterations to the following details are within the scope of the appended claims. Accordingly, the following example embodiments are set forth without any loss of generality to, and without imposing limitations upon, the claimed invention disclosed herein.
Example embodiments, as shown and described by the various figures and accompanying text, provide alternative Dk EM structures and methods of making the same, which include but are not limited to; molding, injection molding, compression molding, molding via a roll-to-roll mold drum, imprinting, stamping, embossing, stenciling, thermo-forming, photolithography, grayscale photolithography, or template filling. Such methods may be applied to fabricate single-layer or multi-layer Dk EM structures, where the Dk EM structures may be a single Dk EM structure, a plurality of Dk EM structures, a panel or array of Dk EM structures, or multiple panels or arrays of Dk EM structures. Embodiments of the Dk EM structures disclosed herein may be useful for applications involving, for example; an antenna; a dielectric resonator antenna, DRA; an array of antennas or DRAs; a dielectric lens; and/or a dielectric waveguide. While embodiments illustrated and described herein depict Dk EM structures having a particular cross-section profile (x-y, x-z, or y-z, cross-section profiles), it will be appreciated that such profiles may be modified without departing from a scope of the invention. As such, any profile that falls within the ambit of the disclosure herein, and is suitable for a purpose disclosed herein, is contemplated and considered to be complementary to the embodiments disclosed herein. While embodiments illustrated and described herein depict Dk EM array structures having or implied to have a specific array size, it will be appreciated that such sizes may be modified without departing from a scope of the invention. As such, any array size that falls within the ambit of the disclosure herein, and is suitable for a purpose disclosed herein, is contemplated and considered to be complementary to the embodiments disclosed herein.
While the following example embodiments are individually presented, it will be appreciated from a complete reading of all of the embodiments described herein below that similarities may exist among the individual embodiments that would enable some cross over of features and/or processes. As such, combinations of any of such individual features and/or processes may be employed in accordance with an embodiment, whether or not such combination is explicitly illustrated, while remaining consistent with the disclosure herein.
The several figures associated with one or more of the following example embodiments depict an orthogonal set of x-y-z axes that provide a frame of reference for the structural relationship of corresponding features with respect to each other, where an x-y plane coincides with a top-down plan view, and an x-z or y-z planes coincide with a side elevation view, of the corresponding embodiments.
While several of the figures provided herein depict side elevation views only of a Dk EM structure having a plurality of 1DPs and 2DPs, it will be appreciated from a reading of the entire disclosure provided herein that top-down plan views or rotated isometric views of other figures provided herein may be used as representative illustrations of an array configuration associated with the corresponding elevation views where the associated 1DPs and 2DPs of the corresponding elevation views are arranged in an array (see arrays depicted in
The following description of an example method 1100 for making a Dk EM structure 1500 is made with particular reference to
In an embodiment and with particular reference to
As used herein, the term substantially is intended to account for manufacturing tolerances. As such, substantially identical structures are identical if the manufacturing tolerances for producing the corresponding structures are zero.
In an embodiment, the substrate 1508 may include one or more of the following: a Dk layer; a metal layer; a combination of a Dk layer and a metal layer; a metal layer having a plurality of slots, each one of the plurality of slots disposed in a one-to-one correspondence with a filled recess of the plurality of filled recesses; a printed circuit board; a flexible circuit board; or, a substrate integrated waveguide, SIW; or, an EM signal feed network.
In an embodiment and with particular reference to
In an embodiment and with particular reference to
In an embodiment, the plurality of Dk forms 1514 provide a plurality of dielectric resonator antennas, DRAs, disposed on the substrate 1508, wherein each DRA is a single-layer DRA having a volume or layer of Dk material provided by the first Dk composition 1506.
In an embodiment, the plurality of Dk forms 1540 provide a plurality of dielectric resonator antennas, DRAs, disposed on the substrate 1508, wherein each DRA is a two-layer DRA having a first inner volume or layer of Dk material provided by the first Dk composition 1506, and a second outer volume or layer of Dk material provided by the second Dk composition 1526.
In an embodiment, the plurality of Dk forms 1540 provide a plurality of dielectric resonator antennas, DRAs, 1506 disposed on the substrate 1508, and a plurality of dielectric lenses or dielectric waveguides 1526 disposed in one-to-one correspondence with the plurality of DRAs, wherein each DRA is a single-volume or single-layer DRA having a volume or layer of Dk material provided by the first Dk composition 1506, and each corresponding lens or waveguide is a single-volume or single-layer structure having a volume or layer of Dk material provided by the second Dk composition 1526.
In an embodiment and with particular reference to
In an embodiment and with particular reference to
In an embodiment, the step of filling the first plurality of recesses 1104, filling the second plurality of recesses 1124, or filling of both the first and the second plurality of recesses further includes: pouring and squeegeeing a flowable form of the respective curable Dk composition into the corresponding recesses.
In an embodiment, the step of filling the first plurality of recesses 1104, filling the second plurality of recesses 1124, or filling of both the first and the second plurality of recesses further includes: imprinting a flowable dielectric film of the respective curable Dk composition into the corresponding recesses.
In an embodiment, the step of pressing and at least partially curing 1110 the curable first Dk composition 1506, pressing and at least partially curing 1130 the curable second Dk composition 1526, or pressing and at least partially curing of both the curable first Dk composition and the curable second Dk composition, includes: curing the respective curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
In an embodiment of the method 1100, the first average dielectric constant is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
In an embodiment of the method 1100, the curable first Dk composition 1506 includes a curable resin, preferably wherein the curable resin includes a Dk material.
In an embodiment of the method 1100, the curable first Dk composition 1506 further includes an inorganic particulate material, preferably wherein the inorganic particulate material includes titanium dioxide.
In an embodiment of the method 1100, the 3D shape of a given Dk form 1514, 1540 has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular (see
In any embodiment disclosed herein the substrate may be a wafer such as a silicon wafer for example, or any other electronic substrate suitable for a purpose disclosed herein.
The following description of an example method 2100 for making a Dk EM structure 2500 is made with particular reference to
In an embodiment and with particular reference to
In an embodiment and with particular reference still to
In an embodiment and with particular reference to
In an embodiment and with particular reference to
In an embodiment and with particular reference to
In an embodiment and with particular reference still to
In an embodiment and with particular reference still to
In an embodiment, the step 2110 that includes at least partially curing the curable first Dk composition 2506 includes: heating the curable Dk composition 2506 at a temperature equal to or greater than about 170 degree Celsius for a time duration of equal to or greater than about 1 hour.
In an embodiment, the method 2100 further includes subsequent to the step of removing 2114 the at least partially cured Dk composition 2506 from the first mold portion 2502: fully curing the at least one Dk form 2510, and applying an adhesive 2524 to the back of the at least one Dk form 2510.
In an embodiment, the average dielectric constant of the curable Dk composition 2506 is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
In an embodiment of the method 2100, the curable first Dk composition 2506 includes a curable resin, preferably wherein the curable resin includes a Dk material.
In an embodiment, the curable first Dk composition 2506 further includes an inorganic particulate material, preferably wherein the inorganic particulate material includes titanium dioxide.
In an embodiment of the method 2100, each 1DP of the plurality of the 1DP 2512 has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular (see
In an embodiment and with particular reference to
In an embodiment, the substrate 2526 may include one or more of the following: a Dk layer; a metal layer; a combination of a Dk layer and a metal layer; a metal layer having a plurality of slots, each one of the plurality of slots disposed in a one-to-one correspondence with a filled recess of the plurality of filled recesses; a printed circuit board; a flexible circuit board; or, a substrate integrated waveguide, SIW; or, an EM signal feed network.
In an embodiment, the process of placing the at least one Dk form 2510 onto the substrate 2526 further includes: aligning the alignment feature 2516 with a corresponding reception feature (depicted general by an opening in the dashed line of the illustrated substrate 2526) on the substrate 2526 and adhering via adhesive 2524 the at least one Dk form 2510 to the substrate 2526.
The following description of an example method 3100 for making a Dk EM structure 3500 is made with particular reference to
In an embodiment and with particular reference to
In an embodiment of the method 3100, the second average dielectric constant is less than the first average dielectric constant.
In an embodiment and with particular reference still to
In an embodiment, the step of forming 3104 includes: stamping or imprinting the plurality of recesses 3504 in a top-down manner.
In an embodiment, the step of forming 3104 includes: embossing the plurality of recesses 3504 in a bottom-up manner.
In an embodiment, the step of filling 3106 includes: pouring and squeegeeing a flowable form of the curable Dk composition 3506 into the plurality of recesses 3504.
In an embodiment, the step of forming 3104 further includes, from a first side of the sheet of Dk material 3502, forming in the sheet 3502 the substantially identical ones of the plurality of recesses 3504, each of the plurality of recesses 3504 having a depth, H5, and further including: from a second opposing side of the sheet 3502, a step of forming 3110 a plurality of depressions 3510 in a one-to-one correspondence with the plurality of recesses 3504, each of the plurality of depressions 3510 having a depth, H6, wherein H6 is equal to or less than H5.
In an embodiment, each of the plurality of recesses 3504 is a pocket recess, and each of the plurality of depressions 3510 forms a blind pocket with a surrounding side wall 3511 in each corresponding one of the plurality of recesses 3504, such that the Dk composition 3506 within each pocket recess 3504 surrounds a corresponding centrally disposed depression 3510.
In an embodiment, each of the plurality of depressions 3510 is centrally disposed with respect to a corresponding one of the plurality of recesses 3504.
In an embodiment, the step of at least partially curing 3107 the curable Dk composition 3506 includes: curing the Dk composition 3506 at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
In an embodiment, the step of providing 3102 includes providing the sheet of Dk material 3502 in a flat form; and the step of filling 3106 includes filling the plurality of recesses 3504 of the flat form sheet one or more than one recess 3504 at a time.
In an embodiment and with particular reference to
In an embodiment and with particular reference also to
In an embodiment and with particular reference still to
In an embodiment and with particular reference still to
In an embodiment and with particular reference still to
In an embodiment and with particular reference still to
In an embodiment and with particular reference still to
In an embodiment of method 3100, the first average dielectric constant of the curable Dk composition 3506 is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
In an embodiment of method 3100, the curable first Dk composition 3506 includes a curable resin, preferably wherein the curable resin includes a Dk material.
In an embodiment of method 3100, the curable first Dk composition 3506 further includes an inorganic particulate material, preferably wherein the inorganic particulate material includes titanium dioxide.
In an embodiment of method 3100, each recess 3504 of the plurality of recesses has an inner cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
The following description of an example Dk EM structure 4500 is made with particular reference to
In an embodiment and with particular reference to
As used herein, the phrase “having a Dk material other than air” necessarily includes a Dk material that is not air, but may also include air, which includes a foam. As used herein, the phrase “comprising air” necessarily includes air, but also does not preclude a Dk material that is not air, which includes a foam. Also, the term “air” may more generally be referred to and viewed as being a gas having a dielectric constant that is suitable for a purpose disclosed herein.
In an embodiment and with particular reference still to
In an embodiment and with particular reference still to
In an embodiment and with particular reference still to
In an embodiment and with particular reference still to
In an embodiment, each 2DP 4532 is integrally formed with an adjacent one of the 2DP 4532 via a relatively thin connecting structure 4538 forming a monolithic of 2DPs 4532 with the relatively thin connecting structure 4538.
In an embodiment, of the Dk EM structure 4500 the first average dielectric constant is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
In an embodiment of the Dk EM structure 4500, and with reference particularly to Dk EM structure 4500 of
In an alternative embodiment of the Dk EM structure 4500, and with reference particularly to Dk EM structure 4500 of
In an embodiment of the Dk EM structure 4500.1 and 4500.2, the impervious layer 4504 is conformally disposed over all exposed surfaces of the array.
In an embodiment of the Dk EM structure 4500, 4500.1, and 4500.2, the first average dielectric constant is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
In an embodiment of the Dk EM structure 4500, 4500.1, and 4500.2, the Dk material having the first average dielectric constant comprises an at least partially cured resin that includes a Dk particulate material. In an embodiment of the Dk structure 4500, 4500.1, and 4500.2, the Dk particulate material further includes an inorganic particulate material, preferably wherein the inorganic particulate material includes titanium dioxide.
In an embodiment of the Dk structure 4500, 4500.1, and 4500.2, each Dk component 4520 of the at least one Dk component has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
The following description of an example method 5100 of making a Dk EM structure 5500 is made with particular reference to
In an embodiment and with particular reference to
In an embodiment of the method 5100, the support form 5502 includes a raised wall 5504 around a given one of the at least one array 5501 of the plurality of 2DPs 5520, and wherein the step of filling 5108 and squeegeeing 5110 further includes: a step of filling 5114 the flowable form of the curable Dk composition 5506 into the depressions 5526 of the plurality of 2DPs 5520 and up to an upper edge 5508 of the raised wall 5504 of the support form 5502, such that the depressions 5526 of the plurality of 2DPs 5520 are filled and the proximal ends 5522 of the associated plurality of 2DPs 5520 are covered with the Dk composition 5506 to a particular thickness, H6; and, a step of squeegeeing 5116 across the raised wall 5504 of the support form 5502 to remove any excess Dk composition 5506, leaving the Dk composition 5506 flush to the upper edge 5508 of the raised wall 5504, where the Dk composition 5506 of the H6 thickness provides a connecting structure 5516 (see
In an embodiment of the method 5100, the at least one array of the plurality of integrally formed 2DPs 5520 is one of a plurality of arrays of the integrally formed 2DPs 5528 that are placed onto the support form 5502, wherein the plurality of 2DPs 5520 include a thermoplastic polymer, the plurality of 1DPs 5510 include a thermoset Dk material 5506, and the step of at least partially curing 5112 includes curing the curable Dk composition 5506 at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour. In an embodiment of the method 5100, the thermoplastic polymer is a high temperature polymer, and the Dk material 5506 includes an inorganic particulate material, preferably wherein the inorganic particulate material includes titanium dioxide.
In an embodiment of the method of 5100, each of the plurality of the 1DPs 5510 and each of the plurality of the 2DPs 5520 have an outer cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
The following description of an example mold 6100 for making a Dk EM structure 6500 is made with particular reference to
In an embodiment and with particular reference to
In an embodiment of the mold 6100 and with particular reference to
From the foregoing, it will be appreciated that an embodiment of the Dk EM structure 6500 may be molded or otherwise formed via the mold/form 6100 in a single step onto a signal feed board, which is contemplated to greatly reduce processing time and cost with respect to existing fabrication methods of existing Dk EM structures useful for a purpose disclosed herein.
The following description of an example method 7100 of making a Dk EM structure 7500 is made with particular reference to
In an embodiment and with particular reference to
In an embodiment and with particular reference to
In an embodiment and with particular reference to
In an embodiment, the first stenciling mask 7152 may have vertical, slanted, or curved, sidewalls to provide any desired shape to the 1DPs 7510 produced from the first Dk composition 7506.
In an embodiment of the method 7100, the curable first Dk composition 7506 includes a curable resin, preferably wherein the curable resin includes a Dk material. In an embodiment of the method 7100, the curable first Dk composition 7506 further includes an inorganic particulate material, preferably wherein the inorganic particulate material includes titanium dioxide.
In an embodiment of the method 7100, each of the plurality of the 1DPs 7510 has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
In an embodiment of the method 7100, the curable composition 7508 includes any one of: a polymer having metal particles; a polymer having copper particles; a polymer having aluminum particles; a polymer having silver particles; an electrically conductive ink; a carbon ink; or, a combination of the foregoing curable compositions.
In an embodiment of the method 7100, the electrically conductive structure 7516 has an inner cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
In an embodiment of the method 7100, the substrate 7530 includes any one of a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network.
The following description of an example method 8100 of making a Dk EM structure 8500 is made with particular reference to
In an embodiment, the example method 8100 is with respect to any of the foregoing methods, where the Dk EM structure 8500 comprises the at least one array 8501 (see also 1501, 2501, 5501, 7501, which may be substituted for array 8501) of 1DPs (any of the aforementioned 1DPs), which is formed by a process of panel-level processing where multiple arrays 8501 of the at least one array of 1DPs are formed on a single Dk EM structure 8500 in the form of a panel, also herein referred to by reference numeral 8500.
In an embodiment of the method 8100, the panel 8500 further includes a substrate 8508 (see any of the herein disclosed substrates, for example), or any one of a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network.
The following description of an example method 9100 of making a Dk EM structure 9500 is made with particular reference to
In an embodiment and with particular reference to
In an embodiment and with particular reference to
In an embodiment and with particular reference to
In an embodiment of the method 9100, the substrate 9530 includes any one of: a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network.
In an embodiment of the method 9100, the curable Dk composition 9506 includes a curable resin, preferably wherein the curable resin includes a Dk material.
In an embodiment of the method 9100, the curable Dk composition 9506 further includes an inorganic particulate material, preferably wherein the inorganic particulate material includes titanium dioxide.
In an embodiment of the method 9100, each of the plurality of the 1DPs 9510 has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
In an embodiment of the method 9100, each raised wall 9526 of a corresponding 2DP 9520 has an inner cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
In an embodiment of the method 9100, the step of at least partially curing 9112 includes at least partially curing the curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
The following description of an example method 10100 of making a stamping form 10500 is made with particular reference to
In an embodiment and with particular reference to
In an embodiment of the method 10100, the substrate 10150 includes any one of a metal; an electrical insulating material; a wafer; a silicon substrate or wafer; a silicon dioxide substrate or wafer; an aluminum oxide substrate or wafer; a sapphire substrate or wafer; a germanium substrate or wafer; a gallium arsenide substrate or wafer; an alloy of silicon and germanium substrate or wafer; or, an indium phosphide substrate or wafer; wherein the photoresist 10154 is a positive photoresist; wherein the EM radiation 10109 is X-ray or UV radiation; wherein the metal coating 10510 is applied via metal deposition, such as for example metal evaporation or sputtering at multiple tilt angles to achieve coverage on all sides; wherein the stamp-suitable metal 10512 includes nickel or a nickel alloy; wherein the substrate 10150 is removed 10116 via etching or grinding; wherein the metal layer 10152 is removed 10118 via polishing, etching, or a combination of polishing and etching; and, wherein the exposed photoresist 10160 and the remaining photoresist 10164 are removed 10120 via etching.
In an embodiment, the photoresist layer may also be a low-water-absorption resist layer (e.g., less than 1% water absorption by volume).
The following description of an example method 11100 of making a Dk EM structure 11500 is made with particular reference to
In an embodiment and with particular reference to
In an embodiment, the method 11100 further includes the following steps: a step of providing 11120 a substrate 11530 and adhering 11122 the resulting assembly 11500 to the substrate 11530; wherein the substrate 11530 includes any one of: a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network; wherein the photoresist 11522 is a positive photoresist; wherein the EM radiation 11109 is X-ray or UV radiation; wherein the exposed photoresist 11524 and the remaining photoresist 11528 are removed 11110 via etching; wherein the step of at least partially curing 11116 includes curing the curable Dk composition 11506 at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
In an embodiment of the method 11100, the curable Dk composition 11506 includes a curable resin, preferably wherein the curable resin includes a Dk material.
In an embodiment of the method 11100, the curable Dk composition 11506 further includes an inorganic particulate material, preferably wherein the inorganic particulate material includes titanium dioxide.
In an embodiment of the method 11100, each of the plurality of the 1DPs 11510 has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
In an embodiment of the method 11100, each opening 11526 of a corresponding one of the plurality of 2DPs 11520 has an inner cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
The following description of an example method 12100 of making a Dk EM structure 12500 is made with particular reference to
In an embodiment and with particular reference to
In an embodiment of the method 12100, the step of optionally shaping 12112 includes shaping via application of the stamping form (see
In an embodiment of the method 12100, the substrate 12530 includes any one of a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network; wherein the photoresist 12512 is a positive photoresist; wherein the EM radiation 12109 is X-ray or UV radiation; wherein the non-exposed photoresist 12514 is removed 12110 via etching; and, wherein the step of at least partially curing 12118 includes curing the curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
In an embodiment of the method 12100, the curable Dk composition 12507 includes a curable resin, preferably wherein the curable resin includes a Dk material.
In an embodiment of the method 12100, the curable Dk composition further includes an inorganic particulate material, preferably wherein the inorganic particulate material includes titanium dioxide.
In an embodiment of the method 12100, each of the plurality of the 1DPs 12510 has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
In an embodiment of the method 12100, each opaque cover 12152 has an outer shape, as observed in an x-y plane plan view, that is circular. (see
The following description of an example method 13100 of making a stamping form 13500 is made with particular reference to
In an embodiment, the example method 13100 is useful for making the stamping form 13500 for use in accordance with making Dk EM structure 12500, and more particularly in making the plurality of 1DPs 12510 into a dome structure having a convex distal end 12519, the method 13100 including the following steps: a step of providing 13102 a substrate 13150 having a metal layer 13152 on top thereof, the metal layer 13152 covering the substrate 13150; a step of disposing 13104 a layer of photoresist 13154 on top of and covering the metal layer 13152; a step of disposing 13106 a photomask 13156 on top of the photoresist 13154, the photomask 13156 having a plurality of substantially identically configured opaque covers 13158 arranged in an array, thereby providing non-exposed photoresist 13160 in areas covered by the opaque covers 13158, and exposed photoresist 13162 in areas not covered by the opaque covers 13158; a step of exposing 13108 at least the exposed photoresist 13162 to EM radiation 13109; a step of removing 13110 the exposed photoresist 13162 subjected to the EM radiation 13109 exposure 13108 from the metal layer 13152, resulting in a plurality of substantially identically configured portions of remaining photoresist 13164 arranged in the array; a step of shaping 13112 via application of shaping form (see stamping form 15500 in
In an embodiment of the method 13100, the substrate 13150 includes any one of a metal; an electrical insulating material; a wafer; a silicon substrate or wafer; a silicon dioxide substrate or wafer; an aluminum oxide substrate or wafer; a sapphire substrate or wafer; a germanium substrate or wafer; a gallium arsenide substrate or wafer; an alloy of silicon and germanium substrate or wafer; or, an indium phosphide substrate or wafer; wherein the photoresist 13154 is a positive photoresist; wherein the EM radiation 13108 is X-ray or UV radiation; wherein the metal coating 13168 is applied via metal deposition; wherein the stamp-suitable metal 13172 includes nickel; wherein the substrate 13150 is removed 13120 via etching or grinding; wherein the metal layer 13152 is removed 13122 via polishing, etching, or a combination of polishing and etching; and, wherein the exposed photoresist 13162 and the remaining photoresist 13166 are removed via etching.
The following description of an example method 14100 of making a Dk EM structure 14500 is made with particular reference to
In an embodiment, the example method 14100 of making the Dk EM structure 14500 having a plurality of a first dielectric portion 14510, 1DP, and a plurality of a second dielectric portion 14520, 2DP, includes the following steps: a step of providing 14102 a substrate 14530; a step of disposing 14104 a layer of photoresist 14512 on top of the substrate 14530; a step of disposing 14106 a grayscale photomask 14150 on top of the photoresist 14512, the grayscale photomask 14150 having a plurality of substantially identically configured covers 14152 arranged in an array, the covers 14152 of the grayscale photomask 14150 having an opaque axially central region 14154 transitioning radially outward to a partially translucent outer region 14156, thereby providing substantially non-exposed photoresist 14513 in areas covered by the opaque central region 14154, partially exposed photoresist 14514 in areas covered by the partially translucent region 14156, and fully exposed photoresist 14515 in areas not covered by the covers 14152 at all; a step of exposing 14108 the grayscale photomask 14150 and the fully exposed photoresist 14515 to EM radiation 14109; a step of removing 14110 the partially exposed photoresist 14514 and the fully exposed photoresist 14515 subjected to the EM radiation 14109 exposure 14108, resulting in a plurality of substantially identically shaped forms of remaining photoresist 14516 arranged in the array that forms the plurality of 1DPs 14510 having a first average dielectric constant, in an embodiment the shaped forms 14516 are a dome structure having a convex distal end; a step of filling 14112 a flowable form of a curable Dk composition 14507 into spaces 14522 between the plurality of 1DPs 14510, wherein the filled spaces provide corresponding ones of the plurality of 2DPs 14520 having a second average dielectric constant that is less than the first average dielectric constant; optionally a step of removing 14114 any excess Dk composition 14507 above an upper surface of the plurality of 1DPs 14510, leaving the Dk composition 14507 flush with the upper surface of the plurality of 1DPs 14510; a step of at least partially curing 14116 the curable Dk composition 14507, resulting in an assembly 14500 having the substrate 14530 and the at least one array of the plurality of 1DPs 14510 having the substantially identically shaped forms 14516 surrounded by the plurality of 2DPs 14520 disposed on the substrate 14530. In an embodiment, the photoresist 14512 is a relatively high Dk material (first average dielectric constant) that may be unfilled, or filled with a ceramic filler for example.
In an embodiment of the method 14100, the substrate 14530 includes any one of a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network; wherein the photoresist 14512 is a positive photoresist; wherein the EM radiation 14109 is X-ray or UV radiation; wherein the partially 14514 and fully 14515 exposed photoresist is removed 14110 via etching; wherein the step of at least partially curing 14116 includes curing the curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
In an embodiment of the method 14100, the curable Dk composition 14507 includes a curable resin, preferably wherein the curable resin includes a Dk material.
In an embodiment of the method 14100, the curable Dk composition 14507 further includes an inorganic particulate material, preferably wherein the inorganic particulate material includes titanium dioxide.
In an embodiment of the method 14100, each of the plurality of the 1DPs 14510 has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
In an embodiment of the method 14100, each of the plurality of the 1DPs 14510 has any one of a dome shape; a conical shape; a frustoconical shape; a cylindrical shape; a ring shape; or, a rectangular shape. (see
The following description of an example method 15100 of making a stamping form 15500 is made with particular reference to
In an embodiment, the example method 15100 is useful for making the stamping form 15500 for use in accordance with making Dk EM structure 12500, the method 15100 including the following steps: a step of providing 15102 a substrate 15150 having a metal layer 15152 on top thereof, the metal layer 15152 covering the substrate 15150; a step of disposing 15104 a layer of photoresist 15154 on top of and covering the metal layer 15152; a step of disposing 15106 a grayscale photomask 15156 on top of the photoresist 15154, the grayscale photomask 15156 having a plurality of substantially identically configured covers 15158 arranged in an array, the covers 15158 of the grayscale photomask 15156 having an opaque axially central region 15160 transitioning radially outward to a partially translucent outer region 15162, thereby providing non-exposed photoresist 15164 in areas covered by the opaque region 15160, partially exposed photoresist 15166 in areas covered by the partially translucent region 15162, and fully exposed photoresist 15168 in areas not covered by the covers 15158; a step of exposing 15108 the grayscale photomask 15156 and the fully exposed photoresist 15168 to EM radiation 15109; a step of removing 15110 the partially 15166 and fully 15168 exposed photoresist subjected to the EM radiation 15109 exposure 15108, resulting in a plurality of substantially identically shaped forms 15170 of remaining photoresist 15172 arranged in the array, in an embodiment the shaped forms 15170 are a dome structure having a convex distal end; applying 15112 a metal coating 15502 to all exposed surfaces of the remaining photoresist 15172 having the substantially identically shaped forms 15170; a step of filling 15114 the spaces 15174 between the metal coated substantially identically shaped forms 15504 and covering the metal coated substantially identically shaped forms 15504 with a stamp-suitable metal 15506 to a particular thickness, H7, relative to atop surface of the metal layer 15152; a step of removing 15116 the substrate 15150 from the bottom of the metal layer 15152; a step of removing 15118 the metal layer 15152; and, a step of removing 15120 the remaining photoresist 15170, resulting in the stamping form 15500.
In an embodiment of the method 15100, the substrate 15150 includes any one of: a metal; an electrical insulating material; a wafer; a silicon substrate or wafer; a silicon dioxide substrate or wafer; an aluminum oxide substrate or wafer; a sapphire substrate or wafer; a germanium substrate or wafer; a gallium arsenide substrate or wafer; an alloy of silicon and germanium substrate or wafer; or, an indium phosphide substrate or wafer; the photoresist 15154 is a positive photoresist; the EM radiation 15109 is X-ray or UV radiation; the metal coating 15502 is applied via metal deposition; the stamp-suitable metal 15504 includes nickel; the substrate 15150 is removed via etching or grinding; the metal layer 15152 is removed via polishing, etching, or a combination of polishing and etching; and the exposed photoresist 15168 and the remaining photoresist 15170 are removed via etching.
In an embodiment of the method 15100, each of the plurality of substantially identically shaped forms 15170, 15504 has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular. (see
In an embodiment of the method 15100, each of the plurality of substantially identically shaped forms 15170, 15504 has any one of: a dome shape; a conical shape; a frustoconical shape; a cylindrical shape; a ring shape; or, a rectangular shape. (see
Dk EM Structures Generally
From the foregoing descriptions of method steps for making the example Dk EM structures disclosed herein, it will be appreciated that injection or compression molding methods, in addition to any other method disclosed herein or considered suitable for a purpose disclosed herein, may be employed where first and second mold portions are disclosed herein.
Reference is now made to
In addition to all of the foregoing descriptions of Dk EM structures disclosed herein, and in the interest of completeness of disclosure, it will be appreciated that any of the foregoing substrates 1508, 2526, 6508, 7530, 8508, 9530, 11530, 12530, and 14530, that may be useful as a signal feed for a purpose disclosed herein, may be in the form of any one of the following (also herein represented by a corresponding one of the aforementioned reference numerals): a Dk layer or dielectric panel; a metal layer or metal panel; a combination of a Dk layer and a metal layer; a combination of a dielectric panel and a metal panel; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of a plurality of 1DPs or DRAs; a metal layer having a plurality of slots, each one of the plurality of slots disposed in a one-to-one correspondence with a filled recess of a corresponding plurality of filled recesses; a printed circuit board; a flexible circuit board; or, a substrate integrated waveguide, SIW; or, an EM signal feed network. In particular reference to substrate 6508 depicted in
Dk EM Structure Materials Generally
Any curable composition disclosed herein generally includes a curable polymer component and optionally a dielectric filler, each selected to provide a fully cured material having a dielectric constant consistent for a purpose disclosed herein and a dielectric loss (also referred to as a dissipation factor) of less than 0.01, or less than or equal to 0.008 as measured at 10 gigahertz (GHz), 23° C. In some aspects the dielectric constant is greater than 10, or greater than 15, for example 10 to 25 or 15 to 25; and the dissipation factor is less than or equal to 0.007, or less than or equal to 0.006, or 0.0001 to 0.007 at a frequency of 10 GHz at 23° C. The dissipation factor can be measured by the IPC-TM-650 X-band strip line method or by the Split Resonator method.
The curable composition can be radiation-curable or heat-curable. In some aspects the components of the curable compositions are selected to have at least two different cure mechanisms, (e.g., irradiation and thermal curing) or at least two different cure conditions (e.g., a lower temperature cure and a higher temperature cure). The components of the curable composition can include co-reactive components such as monomers, prepolymers, crosslinking agents, or the like, as well as a curing agent (including catalysts, cure accelerators, cure promoters, or the like). The co-reactive components can include co-reactive groups such as epoxy groups, isocyanate groups, active hydrogen-containing groups (such as hydroxy or primary amino groups), ethylenically unsaturated groups (e.g., vinyl, allyl, (meth)acryl), and the like. Examples of specific co-reactive components include 1,2-polybutadiene (PBD), olybutadiene-polyisoprene copolymers, allylated polyphenylene ethers (such as OPE-2ST 1200 or OPE-2ST 2200 (commercially available from Mitsubishi Gas Chemical Co.) or NORYL SA9000 (commercially available from Sabic Innovative Plastics)), cyanate esters, triallyl cyanurate, triallyl isocyanurate, 1,2,4-trivinyl cyclohexane, trimethylolpropane triacrylate, or trimethylolpropane trimethacrylate, and the like.
In an aspect the co-reactive component includes butadiene, isoprene, or a combination thereof, optionally together with other co-reactive monomers, for example substituted or unsubstituted vinylaromatic monomers (such as styrene, 3-methylstyrene, 3,5-diethylstyrene, 4-n-propylstyrene, alpha-methylstyrene, alpha-methyl vinyltoluene, para-hydroxystyrene, para-methoxystyrene, alpha-chlorostyrene, alpha-bromostyrene, dichlorostyrene, dibromostyrene, tetra-chlorostyrene, or the like), or substituted or unsubstituted divinylaromatic monomers (such as divinylbenzene, divinyltoluene, and the like). A combination of co-reactive mononmers can also be used. The fully cured composition derived from polymerization of these monomers are a “thermoset polybutadiene or polyisoprene”, which as used herein includes butadiene homopolymers, isoprene homopolymers, and copolymers comprising units derived from butadiene, isoprene, or a combination thereof and optionally a co-rective monomer, such as butadiene-styrene, copolymers such as isoprene-styrene copolymers, or the like. A combination can also be used, for example, a combination of a polybutadiene homopolymer and a poly(butadiene-isoprene) copolymer. A combination comprising a syndiotactic polybutadiene can also be used. The co-reactive components can include post-reacted pre-polymers or polymers such as epoxy-, maleic anhydride-, or urethane-modified polymers or copolymers of butadiene or isoprene.
Other co-reactive components can be present for specific property or processing modifications. For example, to improve stability of dielectric strength and mechanical properties of the fully cured dielectric, a lower molecular weight ethylene-propylene elastomer can be present, i.e., a copolymer, terpolymer, or other polymer comprising primarily ethylene and propylene. Ethylene-propylene elastomers include EPM copolymers (copolymers of ethylene and propylene monomers) and EPDM terpolymers (terpolymers of ethylene, propylene, and diene monomers). The molecular weights of the ethylene-propylene elastomers can be less than 10,000 gram per mole (g/mol) viscosity average molecular weight (Mv), for example 5,000 to 8,000 g/mol Mv. The ethylene-propylene elastomer can be present in the curable composition in an amount such as up to 20 wt % with respect to the total weight of curable composition, for example 4 to 20 wt %, or 6 to 12 wt %, each based on the total weight of the curable composition.
Another type of co-curable component is an unsaturated polybutadiene- or polyisoprene-containing elastomer. This component can be a random or block copolymer of primarily 1,3-addition butadiene or isoprene with an ethylenically unsaturated monomer, for example a vinylaromatic compound such as styrene or alpha-methyl styrene, a (meth) acrylate such methyl methacrylate, or acrylonitrile. The elastomer can be a solid, thermoplastic elastomer comprising a linear or graft-type block copolymer having a polybutadiene or polyisoprene block and a thermoplastic block that can be derived from a monovinylaromatic monomer such as styrene or alpha-methyl styrene. Block copolymers of this type include styrene-butadiene-styrene triblock copolymers, for example, those available from Dexco Polymers, Houston, Tex. under the trade name VECTOR 8508M™, from Enichem Elastomers America, Houston, Tex. under the trade name SOL-T-6302™, and those from Dynasol Elastomers under the trade name CALPRENE™ 401; and styrene-butadiene diblock copolymers and mixed triblock and diblock copolymers containing styrene and butadiene, for example, those available from Kraton Polymers (Houston, Tex.) under the trade name KRATON D 1118. KRATON D 1118 is a mixed diblock/triblock styrene and butadiene containing copolymer that contains 33 wt % styrene.
The optional polybutadiene- or polyisoprene-containing elastomer can further comprise a second block copolymer similar to that described above, except that the polybutadiene or polyisoprene block is hydrogenated, thereby forming a polyethylene block (in the case of polybutadiene) or an ethylene-propylene copolymer block (in the case of polyisoprene). When used in conjunction with the above-described copolymer, materials with greater toughness can be produced. An exemplary second block copolymer of this type is KRATON GX1855 (commercially available from Kraton Polymers, which is believed to be a combination of a styrene-high 1,2-butadiene-styrene block copolymer and a styrene-(ethylene-propylene)-styrene block copolymer. The unsaturated polybutadiene- or polyisoprene-containing elastomer component can be present in the curable composition in an amount of 2 to 60 wt % with respect to the total weight of the dielectric material, specifically, 5 to 50 wt %, or 10 to 40 or 50 wt %. Still other co-curable polymers that can be added for specific property or processing modifications include, but are not limited to, homopolymers or copolymers of ethylene such as polyethylene and ethylene oxide copolymers, natural rubber; norbornene polymers such as polydicyclopentadiene; hydrogenated styrene-isoprene-styrene copolymers and butadiene-acrylonitrile copolymers; unsaturated polyesters; and the like. Levels of these copolymers are generally less than 50 wt % of the total organic components in curable compositions.
Free radical-curable monomers can also be added for specific property or processing modifications, for example, to increase the crosslink density of the system after cure. Exemplary monomers that can be suitable crosslinking agents include, for example, at least one of di, tri-, or higher ethylenically unsaturated monomers such as divinyl benzene, triallyl cyanurate, diallyl phthalate, or multifunctional acrylate monomers (e.g., SARTOMER™ polymers from Sartomer USA, Newtown Square, Pa.), all of which are commercially available. The crosslinking agent, when used, can be present in the curable component in an amount of up to 20 wt %, or 1 to 15 wt %, based on the total weight of the dielectric composition.
A curing agent can be added to the dielectric composition to accelerate the curing reaction of polyenes having olefinic reactive sites. Curing agents can comprise organic peroxides, for example, dicumyl peroxide, t-butyl perbenzoate, 2,5-dimethyl-2,5-di(t-butyl peroxy)hexane, α,α-di-bis(t-butyl peroxy)diisopropylbenzene, 2,5-dimethyl-2,5-di(t-butyl peroxy) hexyne-3, or a combination comprising at least one of the foregoing. Carbon-carbon initiators, for example, 2,3-dimethyl-2,3 diphenylbutane can be used. Curing agents or initiators can be used alone or in combination. The amount of curing agent can be 1.5 to 10 wt % based on the total weight of the polymer in the dielectric composition.
In some aspects, the polybutadiene or polyisoprene polymer is carboxy-functionalized. Functionalization can be accomplished using a polyfunctional compound having in the molecule both (i) a carbon-carbon double bond or a carbon-carbon triple bond, and (ii) at least one of a carboxy group, including a carboxylic acid, anhydride, amide, ester, or acid halide. A specific carboxy group is a carboxylic acid or ester. Examples of polyfunctional compounds that can provide a carboxylic acid functional group include at least one of maleic acid, maleic anhydride, fumaric acid, or citric acid. In particular, polybutadienes adducted with maleic anhydride can be used in the thermosetting composition. Suitable maleinized polybutadiene polymers are commercially available, for example, from Cray Valley or Sartomer under the trade name RICON.
The curable composition can comprise a particulate dielectric material (a filler composition) that can be selected to adjust at least one of the dielectric constant, dissipation factor, or coefficient of thermal expansion. The filler composition can comprise at least one dielectric filler, for example, at least one of titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic glass or ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, or magnesium hydroxide. The dielectric filler can be at least one of particulate, fibers, or whiskers.
The filler composition can have a multimodal particle size distribution, wherein a peak of a first mode of the multimodal particle size distribution is at least seven times that of a peak of a second mode of the multimodal particle size distribution. The multimodal particle size distribution can be, for example, bimodal, trimodal, or quadramodal. When present, the fully cured dielectric material can comprise 1 to 80 volume percent (vol %), or 10 to 70 vol %, or 20 to 60 vol %, or 40 to 60 vol % of the dielectric filler based on the total volume of the curable composition.
Optionally, the dielectric filler can be surface treated with a coupling agent, for example an organofunctional alkoxy silane coupling agent, a zirconate coupling agent, or a titanate coupling agent. Such coupling agents can improve the dispersion of the dielectric filler in the curable composition or can reduce water absorption of the fully cured composition.
The curable composition can further include a flame retardant compound or particulate filler, for example flame retardant phosphorus-containing compounds), flame retardant bromine-containing compounds), alumina, magnesia, magnesium hydroxide, antimony-containing compounds, and the like.
The high-temperature polymer disclosed herein is generally a material having a thermal decomposition temperature of 200° C. or higher, preferably 220° C. or higher, more preferably 250° C. or higher. There is no particular upper limit, although 400° C. may be a practical upper limit. Such polymers generally have aromatic groups, for example a liquid crystal polymer (LCP), polyphthalamide (PPA), aromatic polyimide, aromatic polyetherimide, polyphenylene sulfide (PPS), polyaryletherketone (PAEK), polyetherether ketone (PEEK), polyetherketoneketone (PEKK), polyethersulfone (PES), polyphenylenesulfone (PPSU), polyphenylenesulfone urea, self-reinforced polyphenylene (SRP), or the like. A combination of different polymers can be used. In an aspect the high temperature polymer is an LCP. LCPs can be thermoplastic, although they can also be used as thermosets by functionalization or by compounding with a thermoset, for example, an epoxy. Examples of commercial LCPs include those commercially available under the trade names VECTRA (from Ticona, Florence, Ky.), XYDAR (from Amoco Polymers), ZENITE (from Dow DuPont, Wilmington, Del.), and those available from RTP Co., for example, the RTP-3400 series LCPs.
For any adhesive, adhering, or adhesive layer, disclosed or noted herein, the adhesive layer can be selected based on the desired properties, and can be, for example, a thermoset polymer having a low melting temperature or other composition for bonding two dielectric layers or a conductive layer to a dielectric layer. The adhesion layer can comprise a poly(arylene ether), a carboxy-functionalized polybutadiene or polyisoprene polymer comprising butadiene, isoprene, or butadiene and isoprene units, and zero to less than or equal to 50 wt % of co-curable monomer units. The adhesive composition of the adhesive layer can be different from the dielectric composition. The adhesive layer can be present in an amount of 2 to 15 grams per square meter. The poly(arylene ether) can comprise a carboxy-functionalized poly(arylene ether). The poly(arylene ether) can be the reaction product of a poly(arylene ether) and a cyclic anhydride or the reaction product of a poly(arylene ether) and maleic anhydride. The carboxy-functionalized polybutadiene or polyisoprene polymer can be a carboxy-functionalized butadiene-styrene copolymer. The carboxy-functionalized polybutadiene or polyisoprene polymer can be the reaction product of a polybutadiene or polyisoprene polymer and a cyclic anhydride. The carboxy-functionalized polybutadiene or polyisoprene polymer can be a maleinized polybutadiene-styrene or maleinized polyisoprene-styrene copolymer.
The adhesive layer can comprise a dielectric filler (e.g., ceramic particles) to adjust the dielectric constant thereof. For example, the dielectric constant of the adhesive layer can be adjusted to improve or otherwise modify the performance of the electromagnetic device (e.g., DRA devices).
While certain combinations of individual features and/or processes have been described and illustrated herein, it will be appreciated that these certain combinations of features and/or processes are for illustration purposes only and that any combination of any of such individual features and/or processes may be employed in accordance with an embodiment, whether or not such combination is explicitly illustrated, and consistent with the disclosure herein. Any and all such combinations of features and/or processes as disclosed herein are contemplated herein, are considered to be within the understanding of one skilled in the art when considering the application as a whole, and are considered to be within the scope of the appended claims in a manner that would be understood by one skilled in the art.
While an invention has been described herein with reference to example embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the claims. Many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is intended that the invention not be limited to the particular embodiment or embodiments disclosed herein as the best or only mode contemplated for carrying out this invention, but that the invention will include all embodiments falling within the scope of the appended claims. In the drawings and the description, there have been disclosed example embodiments and, although specific terms and/or dimensions may have been employed, they are unless otherwise stated used in a generic, exemplary and/or descriptive sense only and not for purposes of limitation, the scope of the claims therefore not being so limited. When an element is referred to as being “on” another element, it can be directly on the other element, or intervening elements may also be present. In contrast, when an element is referred to as being “directly on” another element, there are no intervening elements present. The use of the terms first, second, etc. do not denote any order or importance, but rather the terms first, second, etc. are used to distinguish one element from another. The use of the terms a, an, etc. do not denote a limitation of quantity, but rather denote the presence of at least one of the referenced item. The term “comprising” as used herein does not exclude the possible inclusion of one or more additional features. And, any background information provided herein is provided to reveal information believed by the applicant to be of possible relevance to the invention disclosed herein. No admission is necessarily intended, nor should be construed, that any of such background information constitutes prior art against an embodiment of the invention disclosed herein.
In view of all of the foregoing, it will be appreciated that various aspects of a structure are disclosed herein, which are in accordance with, but not limited to, at least the following aspects and combinations of aspects.
Aspect 1: A method of making a dielectric, Dk, electromagnetic, EM, structure, comprising: providing a first mold portion comprising substantially identical ones of a first plurality of recesses arranged in an array; filling the first plurality of recesses with a curable first Dk composition having a first average dielectric constant greater than that of air after full cure; placing a substrate on top of and across multiple ones of the first plurality of recesses filled with the first Dk composition, and at least partially curing the curable first Dk composition; and removing the substrate with the at least partially cured first Dk composition from the first mold portion, resulting in an assembly comprising the substrate and a plurality of Dk forms comprising the at least partially cured first Dk composition, each of the plurality of Dk forms having a three dimensional, 3D, shape defined by corresponding ones of the first plurality of recesses.
Aspect 2: The method of Aspect 1, subsequent to placing the substrate on top of and across multiple ones of the first plurality of recesses filled with the first Dk composition, and prior to removing the substrate with the at least partially cured first Dk composition from the first mold portion, further comprising: placing a second mold portion on top of the substrate; pressing the second mold portion toward the first mold portion and at least partially curing the curable first Dk composition; and separating the second mold portion relative to the first mold portion.
Aspect 3: The method of any of Aspects 1 to 2, wherein: the substrate comprises: a Dk layer; a metal layer; a combination of a Dk layer and a metal layer; a metal layer having a plurality of slots, each one of the plurality of slots disposed in a one-to-one correspondence with a filled recess of the plurality of filled recesses; a printed circuit board; a flexible circuit board; or, a substrate integrated waveguide, SIW; or, an EM signal feed network.
Aspect 4: The method of any of Aspects 1 to 2, further comprising: prior to providing the first mold portion, providing a first pre-mold portion comprising substantially identical ones of a second plurality of recesses arranged in the array, each one of the second plurality of recesses being larger than a corresponding one of the first plurality of recesses; filling the second plurality of recesses with a curable second Dk composition having a second average dielectric constant that is less than the first average dielectric constant and greater than that of air after full cure; placing a second pre-mold portion on top of the first pre-mold portion, the second pre-mold portion having a plurality of openings arranged in the array and in a one-to-one correspondence with each one of the second plurality of recesses; placing a third pre-mold portion on top of the second pre-mold portion, the third pre-mold portion having a plurality of substantially identical ones of projections arranged in the array, the substantially identical ones of the projections being inserted into corresponding ones of the openings of the second pre-mold portion, and into corresponding ones of the second plurality of recesses, thereby displacing the second Dk material in each one of the second plurality of recesses by a volume equal to the volume of a given projection; pressing the third pre-mold portion toward the second pre-mold portion and at least partially curing the curable second Dk composition; and separating the third pre-mold portion relative to the second pre-mold portion to yield a mold form having the at least partially cured second Dk composition therein that serves to provide the first mold portion, and establishes the step of providing a first mold portion comprising substantially identical ones of a first plurality of recesses arranged in an array; wherein the step of removing comprises removing the substrate with the at least partially cured first Dk composition and the at least partially cured second Dk composition from the first mold portion, resulting in the assembly comprising the substrate and the plurality of Dk forms comprising the array of the at least partially cured first Dk composition and the corresponding array of the at least partially cured second Dk composition, each of the plurality of Dk forms having a 3D shape defined by corresponding ones of the first plurality of recesses and the second plurality of recesses.
Aspect 5: The method of any of Aspects 1 to 2, wherein: the plurality of Dk forms comprise a plurality of dielectric resonator antennas, DRAs, disposed on the substrate.
Aspect 6: The method of Aspect 4, wherein: the plurality of Dk forms comprise a plurality of dielectric resonator antennas, DRAs, comprising the first Dk composition disposed on the substrate, and a plurality of dielectric lenses or dielectric waveguides comprising the second Dk composition disposed in one-to-one correspondence with the plurality of DRAs.
Aspect 7: The method of Aspect 1, wherein: the first mold portion comprises a plurality of relatively thin connecting channels that interconnect adjacent ones of the first plurality of recesses, which are filled during the step of filling the first plurality of recesses with the curable first Dk composition having the first average dielectric constant, thereby resulting in the assembly comprising the substrate and the plurality of Dk forms, along with a plurality of relatively thin connecting structures interconnecting adjacent ones of the plurality of Dk forms, the relatively thin connecting structures comprising the at least partially cured first Dk composition, the relatively thin connecting structures and the filled first plurality of recesses forming a single monolithic.
Aspect 8: The method of Aspect 4, wherein: the second pre-mold portion comprises a plurality of relatively thin connecting channels that interconnect adjacent ones of the second plurality of recesses, which are filled during the step of displacing the second Dk material in each one of the second plurality of recesses by a volume equal to the volume of a given projection, thereby resulting in the assembly comprising the substrate and the plurality of Dk forms, along with a plurality of relatively thin connecting structures interconnecting adjacent ones of the plurality of Dk forms, the relatively thin connecting structures comprising the at least partially cured second Dk composition, the relatively thin connecting structures and the filled second plurality of recesses forming a single monolithic.
Aspect 9: The method of any of Aspects 1 to 8, wherein the step of filling the first plurality of recesses, filling the second plurality of recesses, or filling of both the first and the second plurality of recesses further comprises: pouring and squeegeeing a flowable form of the respective curable Dk composition into the corresponding recesses.
Aspect 10: The method of any of Aspects 1 to 8, wherein the step of filling the first plurality of recesses, filling the second plurality of recesses, or filling of both the first and the second plurality of recesses further comprises: imprinting a flowable dielectric film of the respective curable Dk composition into the corresponding recesses.
Aspect 11: The method of any of Aspects 1 to 10, wherein the step of at least partially curing the curable first Dk composition, at least partially curing the curable second Dk composition, or at least partially curing of both the curable first Dk composition and the curable second Dk composition, comprises: curing the respective curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
Aspect 12: The method of any of Aspects 1 to 11, wherein: the first average dielectric constant is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
Aspect 13: The method of any of Aspects 1 to 12, wherein: the curable first Dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
Aspect 14: The method of Aspect 13, wherein: the curable first Dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
Aspect 15: The method of any of Aspects 1 to 14, wherein: the 3D shape has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 16: The method of any of Aspects 1 to 2, further comprising: prior to providing the first mold portion, providing a first pre-mold portion comprising substantially identical ones of a second plurality of recesses arranged in the array, each one of the second plurality of recesses being larger than a corresponding one of the first plurality of recesses; filling the second plurality of recesses with a curable second Dk composition having a second average dielectric constant that is less than the first average dielectric constant and greater than that of air after full cure; placing a second pre-mold portion on top of the first pre-mold portion, the second pre-mold portion having a plurality of openings arranged in the array and in a one-to-one correspondence with each one of the second plurality of recesses; placing an assembly comprising a substrate and a plurality of Dk forms comprising at least partially cured first Dk composition on top of the second pre-mold portion, the assembly having the plurality of Dk forms that are inserted into corresponding ones of the openings of the second pre-mold portion, and into corresponding ones of the second plurality of recesses, thereby displacing the second Dk material in each one of the second plurality of recesses by a volume equal to the volume of a given Dk form; pressing the assembly toward the second pre-mold portion and at least partially curing the curable second Dk composition; separating and removing the substrate with the at least partially cured first Dk composition and the at least partially cured second Dk composition from the first mold portion resulting in an assembly comprising the substrate and the plurality of Dk forms that includes the array of the at least partially cured first Dk composition and the corresponding array of the at least partially cured second Dk composition, each of the plurality of Dk forms having a 3D shape defined by corresponding ones of the first plurality of recesses and the second plurality of recesses.
Aspect 17: The method of Aspect 16, wherein: the substrate comprises: a Dk layer; a metal layer; a combination of a Dk layer and a metal layer; a metal layer having a plurality of slots, each one of the plurality of slots disposed in a one-to-one correspondence with a filled recess of the plurality of filled recesses; a printed circuit board; a flexible circuit board; or, a substrate integrated waveguide, SIW; or, an EM signal feed network.
Aspect 18: The method of any of Aspects 16 to 17, wherein: the plurality of Dk forms comprise a plurality of dielectric resonator antennas, DRAs, disposed on the substrate.
Aspect 19: The method of any of Aspects 16 to 17, wherein: the plurality of Dk forms comprise a plurality of dielectric resonator antennas, DRAs, comprising the first Dk composition disposed on the substrate, and a plurality of dielectric lenses or dielectric waveguides comprising the second Dk composition disposed in one-to-one correspondence with the plurality of DRAs.
Aspect 20: The method of any of Aspects 16 to 19, wherein: the second pre-mold portion comprises a plurality of relatively thin connecting channels that interconnect adjacent ones of the second plurality of recesses, which are filled during the step of displacing the second Dk material in each one of the second plurality of recesses by a volume equal to the volume of a given Dk form, thereby resulting in the assembly comprising the substrate and the plurality of Dk forms, along with a plurality of relatively thin connecting structures interconnecting adjacent ones of the plurality of Dk forms, the relatively thin connecting structures comprising the at least partially cured second Dk composition, the relatively thin connecting structures and the filled second plurality of recesses forming a single monolithic.
Aspect 101: A method of making a dielectric, Dk, electromagnetic, EM, structure having one or more of a first dielectric portion, 1DP, the method comprising: providing a first mold portion comprising substantially identical ones of a first plurality of recesses arranged in an array and configured to form a plurality of the 1DP, the first mold portion further comprising a plurality of relatively thin connecting channels that interconnect adjacent ones of the plurality of recesses; filling the first plurality of recesses and the relatively thin connecting channels with a curable Dk composition having an average dielectric constant greater than that of air after full cure; placing a second mold portion on top of the first mold portion with the curable Dk composition disposed therebetween; pressing the second mold portion toward the first mold portion and at least partially curing the curable Dk composition; separating the second mold portion relative to the first mold portion; and removing the at least partially cured Dk composition from the first mold portion, resulting in at least one Dk form comprising the at least partially cured Dk composition, each of the at least one Dk form having a three dimensional, 3D, shape defined by the first plurality of recesses and the interconnecting plurality of relatively thin connecting channels, the 3D shape defined by the first plurality of recesses providing a plurality of the 1DP in the EM structure.
Aspect 102: The method of Aspect 101, wherein the second mold portion comprises at least one recess disposed for providing an alignment feature to the at least one Dk form, wherein the step of pressing the second mold portion toward the first mold portion further comprises: displacing a portion of the curable Dk composition into the at least one recess.
Aspect 103: The method of Aspect 101, wherein the first mold portion further comprises at least one first projection disposed for providing an alignment feature to the at least one Dk form, wherein the step of pressing the second mold portion toward the first mold portion further comprises: displacing a portion of the curable Dk composition around the at least one first projection.
Aspect 104: The method of any of Aspects 101 to 103, wherein at least one of the first mold portion and the second mold portion includes a segmenting projection around a subset of the plurality of recess for providing segmented sets of panels in a form of the array, wherein the step of pressing the second mold portion toward the first mold portion further comprises: displacing a portion of the curable Dk composition away from a face to face contact between the first mold portion and the second mold portion proximate the segmenting projection.
Aspect 105: The method of any of Aspects 101 to 104, wherein: the first mold portion further comprises a second plurality of recesses, each one of the second plurality of recesses being disposed in a one-to-one correspondence with one of the first plurality of recesses and substantially surrounding the corresponding one of the first plurality of recesses for providing a Dk isolator for a given 1DP in the at least one Dk form.
Aspect 106: The method of Aspect 105, wherein: the first mold portion further comprises a plurality of second projections disposed in a one-to-one correspondence with one of the second plurality of recesses, each second projection being centrally disposed within the corresponding one of the second plurality of recesses and substantially surrounding the corresponding one of the first plurality of recesses for providing an enhanced Dk isolator for a given 1DP in the at least one Dk form.
Aspect 107: The method of Aspect 105, wherein: the second mold portion further comprises a plurality of third projections disposed in a one-to-one correspondence with one of the second plurality of recesses of the first mold portion, each third projection being centrally disposed within the corresponding one of the second plurality of recesses of the first mold portion and substantially surrounding the corresponding one of the first plurality of recesses of the first mold portion for providing an enhanced Dk isolator for a given 1DP in the at least one Dk form.
Aspect 108: The method of any of Aspects 101 to 107, wherein the step of at least partially curing the curable first Dk composition comprises: heating the curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration of equal to or greater than about 1 hour.
Aspect 109: The method of any one of Aspects 101 to 108, further comprising: fully curing the at least one Dk form, and applying an adhesive to the back of the at least one Dk form.
Aspect 110: The method of any of Aspects 101 to 109, wherein: the average dielectric constant is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
Aspect 111: The method of any of Aspects 101 to 110, wherein: the curable first Dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
Aspect 112: The method of Aspect 111, wherein: the curable first Dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
Aspect 113: The method of any of Aspects 101 to 112, wherein: each 1DP of the plurality of the 1DP has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 114: The method of any of Aspects 102 to 113, further comprising: providing a substrate and placing the at least one Dk form onto the substrate.
Aspect 115. The method of Aspect 114, wherein: the substrate comprises: a Dk layer; a metal layer; a combination of a Dk layer and a metal layer; a metal layer having a plurality of slots, each one of the plurality of slots disposed in a one-to-one correspondence with a filled recess of the plurality of filled recesses; a printed circuit board; a flexible circuit board; or, a substrate integrated waveguide, SIW; or, an EM signal feed network.
Aspect 116: The method of any of Aspects 114 to 115, wherein the placing the at least one Dk form onto the substrate further comprises: aligning the alignment feature with a corresponding reception feature on the substrate and adhering the at least one Dk form to the substrate.
Aspect 201: A method of making a dielectric, Dk, electromagnetic, EM, structure, comprising: providing a sheet of Dk material; forming in the sheet substantially identical ones of a plurality of recesses arranged in an array, with the non-recessed portions of the sheet forming a connecting structure between individual ones of the plurality of recesses; filling the plurality of recesses with a curable Dk composition having a first average dielectric constant greater than that of air after full cure, wherein the sheet of Dk material has a second average dielectric constant that is different from the first average dielectric constant; and at least partially curing the curable Dk composition.
Aspect 202: The method of Aspect 201, wherein: the second average dielectric constant is less than the first average dielectric constant.
Aspect 203: The method of any of Aspects 201 to 202, further comprising: subsequent to the step of at least partially curing the curable Dk composition, cutting the sheet into individual tiles, each tile comprising an array of a subset of the plurality of recesses having the at least partially cured Dk composition, with a portion of the connecting structure disposed therebetween.
Aspect 204: The method of any of Aspects 201 to 203, wherein the step of forming comprises: stamping or imprinting the plurality of recesses in a top-down manner.
Aspect 205: The method of any of Aspects 201 to 203, wherein the step of forming comprises: embossing the plurality of recesses in a bottom-up manner.
Aspect 206: The method of any of Aspects 201 to 205, wherein the step of filling comprises: pouring and squeegeeing a flowable form of the curable Dk composition into the plurality of recesses.
Aspect 207: The method of any of Aspects 201 to 206, wherein: the step of forming further comprises, from a first side of the sheet, forming in the sheet the substantially identical ones of the plurality of recesses, each of the plurality of recesses having a depth, H5, and further comprising: from a second opposing side of the sheet, forming a plurality of depressions in a one-to-one correspondence with the plurality of recesses, each of the plurality of depressions having a depth, H6, wherein H6 is equal to or less than H5.
Aspect 208: The method of Aspects 207, wherein: each of the plurality of depressions forms a blind pocket with a surrounding side wall in each corresponding one of the plurality of recesses.
Aspect 209: The method of any of Aspects 207 to 2087, wherein: each of the plurality of depressions is centrally disposed with respect to a corresponding one of the plurality of recesses.
Aspect 210: The method of any of Aspects 201 to 209, wherein the step of at least partially curing the curable Dk composition comprises: curing the Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
Aspect 211: The method of any of Aspects 201 to 210, wherein: the step of providing comprises providing the sheet of Dk material in a flat form; and the step of filling comprises filling the plurality of recesses of the flat form sheet one or more than one recess at a time.
Aspect 212: The method of any of Aspects 201 to 210, wherein: the step of providing comprises providing the sheet of Dk material on a roll and unrolling the sheet of Dk material for the subsequent step of forming.
Aspect 213: The method of Aspect 212, further comprising: providing a pattern roller and an opposing compression roller downstream of the roll of Dk material; providing a dispenser unit of the Dk composition downstream of the pattern roll; providing a curing unit downstream of the dispenser unit; and providing a finish roller downstream of the curing unit.
Aspect 214: The method of Aspect 213, further comprising: providing a first tensioning roller downstream of the pattern roller and upstream of the dispenser unit; and providing a second tensioning roller downstream of the first tensioning roller and upstream of the curing unit.
Aspect 215: The method of Aspect 214, further comprising: providing a squeegee unit disposed to cooperate with and opposing the second tensioning roller.
Aspect 216: The method of any of Aspect 213 to 215, further comprising: unrolling the sheet of Dk material from the roll of Dk material; passing the unrolled sheet of Dk material between the pattern roller and the opposing compression roller, whereat the step of forming in the sheet substantially identical ones of the plurality of recesses arranged in the array occurs, resulting in a patterned sheet; passing the patterned sheet proximate the dispenser unit, whereat the step of filling of the plurality of recesses with the curable Dk composition occurs, resulting a filled patterned sheet; passing the filled patterned sheet proximate the curing unit, whereat the step of at least partially curing the curable Dk composition occurs, resulting in an at least partially cured sheet; and passing the at least partially cured sheet to the finish roller for subsequent processing.
Aspect 217: The method of Aspect 216, further comprising: prior to passing the patterned sheet proximate the dispenser unit, engaging the patterned sheet with the first tensioning roller; and prior to passing the filled patterned sheet proximate the curing unit, engaging the filled patterned sheet with the second tensioning roller.
Aspect 218: The method of Aspect 217, further comprising: prior to passing the filled patterned sheet proximate the curing unit, engaging the filled patterned sheet with the squeegee unit and the opposing second tensioning roller, resulting in a filled and squeegeed patterned sheet.
Aspect 219: The method of any of Aspects 201 to 218, wherein: the first average dielectric constant is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
Aspect 220: The method of any of Aspects 201 to 219, wherein: the curable first Dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
Aspect 221: The method of Aspect 220, wherein: the curable first Dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
Aspect 222: The method of any of Aspects 201 to 221, wherein: each recess of the plurality of recesses has an inner cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 301: A dielectric, Dk, electromagnetic, EM, structure, comprising: at least one Dk component comprising a Dk material other than air having a first average dielectric constant; and a water impervious layer, a water barrier layer, or a water repellent layer, conformally disposed over at least a portion of the exposed surfaces of the at least one Dk component.
Aspect 302: The Dk EM structure of Aspect 301, wherein: the water impervious layer, water barrier layer, or water repellent layer, is conformally disposed over at least the exposed upper and side surfaces of the at least one Dk component.
Aspect 303: The Dk EM structure of any of Aspects 301 to 302, wherein: the water impervious layer, water barrier layer, or water repellent layer, is conformally disposed over all exposed surfaces of the at least one Dk component.
Aspect 304: The Dk EM structure of any of Aspects 301 to 303, wherein: the water impervious layer, water barrier layer, or water repellent layer, is equal to or less than 30 microns, alternatively equal to or less than 10 microns, alternatively equal to or less than 3 microns, alternatively equal to or less than 1 micron.
Aspect 305: The Dk EM structure of any of Aspects 301 to 304, wherein: the at least one Dk component comprises a plurality of the Dk components arranged in an x-by-y arrangement forming an array of the Dk components.
Aspect 306: The Dk EM structure of Aspect 305, wherein: each of the plurality of Dk components is physically connected to at least one other of the plurality of Dk components via a relatively thin connecting structure, each connecting structure being relatively thin as compared to an overall outside dimension of one of the plurality of Dk components, each connecting structure having a cross sectional overall height that is less than an overall height of a respective connected Dk component and being formed from the Dk material of the Dk component, each relatively thin connecting structure and the plurality of Dk components forming a single monolithic.
Aspect 307: The Dk EM structure of Aspect 306, wherein: the relatively thin connecting structure comprises at least one alignment feature integrally formed with the monolithic.
Aspect 308: The Dk EM structure of Aspect 307, wherein: the at least one alignment feature comprises a projection, a recess, a hole, or any combination of the foregoing alignment features.
Aspect 309: The Dk EM structure of any of Aspects 305 to 308, wherein: the array of Dk components comprises a plurality of Dk isolators arranged in a one-to-one correspondence with each one of the plurality of Dk components; each Dk isolator being disposed substantially surrounding a corresponding one of the plurality of Dk components.
Aspect 310: The Dk EM structure of Aspect 309, wherein: each of the plurality of Dk isolators has a height, H2, equal to or less than a height, H1, of the plurality of Dk components.
Aspect 311: The Dk EM structure of any of Aspects 309 to 310, wherein: each of the Dk isolators comprises a hollow interior portion.
Aspect 312: The Dk EM structure of Aspect 311, wherein: the hollow interior is open at the top, or is open at the bottom.
Aspect 313. The Dk EM structure of any of Aspects 309 to 312, wherein: the plurality of Dk isolators are integrally formed with the plurality of Dk components forming a monolithic.
Aspect 314: The Dk EM structure of any of Aspects 305 to 313, wherein each one of the at least one Dk component comprises a first dielectric portion, 1DP, and further comprising; a plurality of second dielectric portions, 2DPs, each 2DP of the plurality of 2DPs comprising a Dk material other than air having a second average dielectric constant; wherein each 1DP has a proximal end and a distal end; wherein each 2DP has a proximal end and a distal end, the proximal end of a given 2DP being disposed proximate the distal end of a corresponding 1DP, the distal end of the given 2DP being disposed a defined distance away from the distal end of the corresponding 1DP; and wherein the second average dielectric constant is less than the first average dielectric constant.
Aspect 315: The Dk EM structure of Aspect 314, wherein: each 2DP is integrally formed with an adjacent one of the 2DP forming a monolithic of 2DPs.
Aspect 316: The Dk EM structure of any of Aspects 301 to 315, wherein: the first average dielectric constant is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
Aspect 317: The Dk EM structure of Aspect 305, wherein each of the at least one Dk component comprises a first dielectric portion, 1DP, having a height, H1, and further comprising: a second dielectric portion, 2DP, having a height, H3, comprising a Dk material other than air having a second average dielectric constant; wherein the 2DP comprises a plurality of recesses, each recess of the plurality of recesses being filled with a corresponding one of the 1DP; wherein the 2DP substantially surrounds each of the 1DP; and wherein the second average dielectric constant is less than the first average dielectric constant.
Aspect 318: The Dk EM structure of Aspect 317, wherein: H1 is equal to H3.
Aspect 319: The Dk EM structure of Aspect 317, further wherein: the 2DP comprises a relatively thin connecting structure that is subordinate to each of the 1DP, wherein the 2DP and the relatively thin connecting structure forms a monolithic, and wherein H1 is less than H3.
Aspect 320: The Dk EM structure of any of Aspects 305 to 319, wherein: the water impervious layer, water barrier layer, or water repellent layer, is conformally disposed over all exposed surfaces of the array.
Aspect 321: The Dk EM structure of any of Aspects 301 to 320, wherein: the first average dielectric constant is equal to or greater than 5, alternatively equal to or greater than 9, further alternatively equal to or greater than 18, and equal to or less than 100.
Aspect 322: The method of any of Aspects 301 to 321, wherein: the curable first Dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
Aspect 323: The method of Aspect 322, wherein: the curable first Dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
Aspect 324: The Dk structure of any of Aspects 301 to 323, wherein: each Dk component of the at least one Dk component has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 325: The Dk structure of any of Aspects 301 to 324, wherein: each Dk component of the at least one Dk component is a dielectric resonator antenna, DRA.
Aspect 326: The Dk structure of any of Aspects 314 to 325, wherein: each 2DP of the plurality of 2DPs is a dielectric lens or waveguide.
Aspect 401: A method of making a dielectric, Dk, electromagnetic, EM, structure having a plurality of a first dielectric portion, 1DP, and a plurality of a second dielectric portion, 2DP, disposed in a one-to-one correspondence with a given one of the plurality of the 1DP, each 1DP of the plurality of 1DPs having a proximal end and a distal end, the distal end of a given 1DP having a cross-section that is smaller than a cross-section of the proximal end of the given 1DP as observed in an x-y plane cross-section, the method comprising: providing a support form; providing a plurality of integrally formed ones of the 2DP arranged in at least one array, the plurality of 2DPs being at least partially cured, each 2DP of the plurality of 2DPs comprising a proximal end and a distal end, each proximal end of a given 2DP comprising a centrally disposed depression having a blind end, and placing the plurality of the 2DPs onto the support form, wherein each depression of the plurality of 2DPs is configured to form a corresponding one of the plurality of the 1DPs; filling a flowable form of a curable Dk composition into the depressions of the plurality of 2DPs, the Dk composition having a first average dielectric constant when fully cured that is greater than a second average dielectric constant of the plurality of 2DPs when fully cured; squeegeeing across the support form and the proximal end of the plurality of 2DPs to remove any excess curable Dk composition, leaving the Dk composition at least flush with the proximal end of each 2DP of the plurality of 2DPs; at least partially curing the curable Dk composition to form at least one array of the plurality of 1DPs; removing from the support form a resulting assembly comprising the at least one array of the 2DPs with the at least one array of the 1DPs formed therein.
Aspect 402: The method of Aspect 401, wherein the support form comprises a raised wall around a given one of the at least one array of the plurality of 2DPs, and wherein the filling and squeegeeing further comprises: filling the flowable form of the curable Dk composition into the depressions of the plurality of 2DPs and up to an edge of the raised wall of the support form, such that the depressions of the plurality of 2DPs are filled and the proximal ends of the associated plurality of 2DPs are covered with the Dk composition to a particular thickness, H6; and squeegeeing across the raised wall of the support form to remove any excess Dk composition, leaving the Dk composition flush to the edge of the raised wall, where the Dk composition of the H6 thickness provides a connecting structure that is integrally formed with the plurality of 1DPs.
Aspect 403: The method of any of Aspects 401 to 402, wherein: the at least one array of the plurality of integrally formed 2DPs is one of a plurality of arrays of the integrally formed 2DPs that are placed onto the support form; the plurality of 2DPs comprise a thermoplastic polymer; the plurality of 1DPs comprise a thermoset Dk material; the at least partially curing comprises curing the curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
Aspect 404: The method of Aspect 403, wherein: the thermoplastic polymer is a high temperature polymer; the Dk material comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide.
Aspect 405: The method of any of Aspects 402 to 404, wherein: H6 is about 0.002 inches.
Aspect 406: The method of any of Aspects 401 to 405, wherein: each of the plurality of the 1DPs and each of the plurality of the 2DPs have an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 501: A mold for making a dielectric, Dk, electromagnetic, EM, structure comprising a first region having a first average dielectric constant, a second region outboard of the first region having a second average dielectric constant, a third region outboard of the second region having a third average dielectric constant, and a fourth region outboard of the third region having the second average dielectric constant, the mold comprising: a plurality of unit cells that are integrally formed with or joined with each other, each unit cell comprising: a first portion configured to form the first region of the EM structure; a second portion configured to form the second region of the EM structure; a third portion configured to form the third region of the EM structure; a fourth portion configured to form the fourth region of the EM structure; a fifth portion configured to form and define an outer boundary of the unit cell; wherein the first portion, the second portion, the third portion, the fourth portion, and the fifth portion, are all integrally formed with each other from a single material to provide a monolithic unit cell; wherein the first and fifth portions include the single material of the monolithic unit cell, the second and fourth portions are absent the single material of the monolithic unit cell, and the third portion has a combination of an absence of and a presence of the single material of the monolithic unit cell; and wherein the second and fourth portions, and only a fraction of the third portion, are configured to receive a flowable form of a curable Dk composition.
Aspect 502: The mold of Aspect 501, wherein a single Dk EM structure made from the unit cell of the mold comprises: a three dimensional, 3D, body made from an at least a partially cured form of the Dk composition having a proximal end and a distal end; the 3D body comprising the first region disposed at the center of the 3D body, the first region extending to the distal end of the 3D body and comprising air; the 3D body comprising the second region made from the at least partially cured form of the Dk composition where the second average dielectric constant is greater than the first average dielectric constant, the second region extending from the proximal end to the distal end of the 3D body; the 3D body comprising the third region made partially from the at least partially cured form of the Dk composition, and partially from air, where the third average dielectric constant that is less than the second average dielectric constant, the third region extending from the proximal end to the distal end of the 3D body; wherein the third region comprises projections made from the at least partially cured form of the Dk composition that extend radially, relative to the z-axis, outward from and are integral and monolithic with the second region; wherein each one of the projections has a cross-section overall length, L1, and a cross-section overall width, W1, as observed in an x-y plane cross-section, where L1 and W1 are each less than X, where X is an operating wavelength of the Dk EM structure when the Dk EM structure is electromagnetically excited; and wherein all exposed surfaces of at least the second region of the 3D body draft inward, via drafted side walls of the mold, from the proximal end to the distal end of the 3D body.
Aspect 503: The mold of Aspect 502, wherein the single Dk EM structure made from the unit cell of the mold further comprises: the first region and the second region of the 3D body each having an outer cross-section shape, as observed in an x-y plane cross-section, that is circular, and an inner cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 601: A method of making a dielectric, Dk, electromagnetic, EM, structure having a plurality of a first dielectric portion, 1DP, each 1DP of the plurality of 1DPs having a proximal end and a distal end, the distal end having a cross-section area that is smaller than a cross-section area of the proximal end as observed in an x-y plane cross-section, the method comprising: providing a carrier; placing a substrate on the carrier; placing a first stenciling mask on the substrate, the first stenciling mask comprising a plurality of openings arranged in at least one array, each opening comprising a shape for forming a corresponding one of the 1DP; filling a first flowable form of a curable first Dk composition into the openings of the first stenciling mask, the first Dk composition having a first average dielectric constant after cure; squeegeeing across an upper surface of the first stenciling mask to remove any excess first Dk composition, leaving the first Dk composition flush with the upper surface of the first stenciling mask; at least partially curing the curable first Dk composition, forming at least one array of the 1DPs; removing the first stenciling mask; and removing from the carrier a resulting assembly comprising the substrate with the at least one array of the 1DPs attached thereto.
Aspect 602: The method of Aspect 601, further comprising: subsequent to removing the first stenciling mask and prior to removing the substrate with the at least one array of the 1DPs attached thereto, placing a second stenciling mask on the substrate, the second stenciling mask comprising openings surrounded by partitioning walls configured and disposed to surround a subset of the plurality of 1DPs for forming a plurality of arrays of the 1DPs, where each array of the 1DPs is to be encased in a second dielectric portion, 2DP; filling a second flowable form of a curable second Dk composition into the openings of the second stenciling mask, the second Dk composition having a second average dielectric constant after cure that is less than the first average dielectric constant; squeegeeing across an upper surface of the second stenciling mask to remove any excess second Dk composition, leaving the second Dk composition flush with the upper surface of the second stenciling mask; at least partially curing the curable second Dk composition, forming the plurality of arrays of the 1DPs encased in the 2DP; removing the second stenciling mask; and removing from the carrier the resulting assembly comprising the substrate with the plurality of arrays of the 1DPs encased in a corresponding 2DP attached thereto.
Aspect 603: The method of Aspect 601, further comprising: subsequent to removing the first stenciling mask and prior to removing the substrate with the at least one array of the 1DPs attached thereto, placing a second stenciling mask on the substrate, the second stenciling mask comprising covers that cover individual ones of the plurality of 1DPs, openings that surround individual ones of the plurality of 1DPs, and partitioning walls that surround a subset of the plurality of 1DPs for forming a plurality of arrays of the 1DPs where each one of the plurality of 1DPs is to be surrounded by an electrically conductive structure; filling a flowable form of a curable composition into the openings of the second stenciling mask, the curable composition being electrically conductive when fully cured; squeegeeing across the upper surface of the second stenciling mask to remove any excess of the curable composition, leaving the curable composition flush with the upper surface of the second stenciling mask; at least partially curing the curable composition, forming the plurality of arrays of the 1DPs where each 1DP is surrounded by the electrically conductive structure; removing the second stenciling mask; and removing from the carrier the resulting assembly comprising the substrate with the plurality of arrays of the 1DPs, where each 1DP is surrounded by the electrically conductive structure, attached thereto.
Aspect 604: The method of any of Aspects 601 to 603, wherein: the curable first Dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
Aspect 605: The method of Aspect 604, wherein: the curable first Dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
Aspect 606: The method of any of Aspects 601 to 605, wherein: each of the plurality of the 1DPs has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 607: The method of any of Aspects 603 to 606, wherein: wherein the curable composition comprises any one of: a polymer comprising metal particles; a polymer comprising copper particles; a polymer comprising aluminum particles; a polymer comprising silver particles; an electrically conductive ink; a carbon ink; or, a combination of the foregoing curable compositions.
Aspect 608: The method of any of Aspects 603 to 607, wherein: the electrically conductive structure has an inner cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 609: The method of any of Aspects 601 to 608, wherein: the substrate comprises any one of: a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network.
Aspect 701: The method of any of the foregoing method Aspects, wherein: the Dk EM structure comprising the at least one array of 1DPs is formed by a process of panel-level processing where multiple arrays of the at least one array of 1DPs are formed on a single panel.
Aspect 702: The method of Aspect 701, wherein: the single panel comprises a substrate or any one of a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network.
Aspect 801: A method of making a dielectric, Dk, electromagnetic, EM, structure having a plurality of a first dielectric portion, 1DP, and a plurality of a second dielectric portion, 2DP, each 1DP having a proximal end and a distal end, the method comprising: providing a support form; disposing a sheet of a polymer on the support form; providing a stamping form and stamping, down then up, the sheet of polymer supported by the support form, the stamping form comprising a plurality of substantially identically configured projections arranged in an array, wherein the stamping results in displaced material of the sheet of polymer, a plurality of depressions having a blind end arranged in the array in the sheet of polymer, and a plurality of raised walls of the sheet of polymer surrounding each one of the plurality of depressions, the plurality of raised walls forming the plurality of 2DPs; filling a flowable form of a curable Dk composition into the plurality of depressions, wherein each depression of the plurality of depressions forms a corresponding one of the plurality of 1DPs having a first average dielectric constant, wherein the sheet of polymer has a second average dielectric constant that is less than the first average dielectric constant, wherein the distal end of each 1DP is proximate an upper surface of the plurality of raised walls of the sheet of polymer; optionally removing any excess Dk composition above the upper surface of the plurality of raised walls of the sheet of polymer, leaving the Dk composition flush with the upper surface of the plurality of raised walls; at least partially curing the curable Dk composition to form at least one array of the plurality of 1DPs; removing from the support form a resulting assembly comprising the stamped sheet of polymer material with the plurality of raised walls, the plurality of depressions, and the at least one array of the plurality of 1DPs formed in the plurality of depressions.
Aspect 802: The method of Aspect 801, further comprising: providing a substrate and placing the assembly onto the substrate with the stamped polymer sheet disposed on the substrate.
Aspect 803: The method of Aspect 801, further comprising: providing a substrate and placing the assembly onto the substrate with at least the distal ends of the plurality of 1DPs disposed on the substrate.
Aspect 804: The method of any of Aspects 802 to 803, wherein: the substrate comprises any one of: a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network.
Aspect 805: The method of any of Aspects 801 to 804, wherein: the curable Dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
Aspect 806: The method of Aspect 805, wherein: the curable Dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
Aspect 807: The method of any of Aspects 801 to 806, wherein: each of the plurality of the 1DPs has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 808: The method of any of Aspects 801 to 807, wherein: each raised wall of a corresponding 2DP has an inner cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 809: The method of any of Aspects 801 to 808, wherein: the at least partially curing comprises at least partially curing the curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
Aspect 901: A method of making the stamping form of any of Aspects 801-809 for use in accordance therewith, the method comprising: providing a substrate having a metal layer on top thereof, the metal layer covering the substrate; disposing a photoresist on top of and covering the metal layer; disposing a photomask on top of the photoresist, the photomask comprising a plurality of substantially identically configured openings arranged in an array thereby providing exposed photoresist; exposing at least the exposed photoresist to EM radiation; removing the exposed photoresist subjected to the EM radiation exposure from the metal layer, resulting in a plurality of substantially identically configured pockets in the remaining photoresist arranged in the array; applying a metal coating to all exposed surfaces of the remaining photoresist having the plurality of pockets therein; filling the plurality of pockets and covering the remaining metal coated photoresist with a stamp-suitable metal to a particular thickness, H7, relative to a top surface of the metal layer; removing the substrate from the bottom of the metal layer; removing the metal layer; and removing the remaining photoresist, resulting in the stamping form.
Aspect 902: The method of Aspect 901, wherein: the substrate comprises any one of: a metal; an electrical insulating material; a wafer; a silicon substrate or wafer; a silicon dioxide substrate or wafer; an aluminum oxide substrate or wafer; a sapphire substrate or wafer; a germanium substrate or wafer; a gallium arsenide substrate or wafer; an alloy of silicon and germanium substrate or wafer; or, an indium phosphide substrate or wafer; the photoresist is a positive photoresist; the EM radiation is X-ray or UV radiation; the metal coating is applied via metal deposition; the stamp-suitable metal comprises nickel; the substrate is removed via etching or grinding; the metal layer is removed via polishing, etching, or a combination of polishing and etching; and the exposed photoresist and the remaining photoresist are removed via etching.
Aspect 1001: A method of making a dielectric, Dk, electromagnetic, EM, structure having a plurality of a first dielectric portion, 1DP, and a plurality of a second dielectric portion, 2DP, the method comprising: providing a support form; disposing a layer of photoresist on top of the support form; disposing a photomask on top of the photoresist, the photomask comprising a plurality of substantially identically configured openings arranged in an array thereby providing exposed photoresist; exposing at least the exposed photoresist to EM radiation; removing the exposed photoresist subjected to the EM radiation exposure from the support form, resulting in a plurality of the substantially identically configured openings in the remaining photoresist arranged in the array; filling a flowable form of a curable Dk composition into the plurality of openings in the remaining photoresist, wherein the plurality of filled openings provide corresponding ones of the plurality of 1DPs having a first average dielectric constant, wherein the remaining photoresist provides the plurality of 2DPs having a second average dielectric constant that is less than the first average dielectric constant; optionally removing any excess Dk composition above an upper surface of the plurality of 2DPs, leaving the Dk composition flush with the upper surface of the plurality of 2DPs; at least partially curing the curable Dk composition to form at least one array of the plurality of 1DPs; removing from the support form a resulting assembly comprising the plurality of 2DPs and the at least one array of the plurality of 1DPs formed therein.
Aspect 1002: The method of Aspect 1001, further comprising: providing a substrate and adhering the resulting assembly to the substrate; wherein the substrate comprises any one of: a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network; wherein the photoresist is a positive photoresist; wherein the EM radiation is X-ray or UV radiation; wherein the exposed photoresist and the remaining photoresist are removed via etching; wherein the at least partially curing comprises curing the curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
Aspect 1003: The method of any of Aspects 1001 to 1002, wherein: the curable Dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
Aspect 1004: The method of Aspect 1003, wherein: the curable Dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
Aspect 1005: The method of any of Aspects 1001 to 1004, wherein: each of the plurality of the 1DPs has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 1006: The method of any of Aspects 1001 to 1005, wherein: each opening of a corresponding one of the plurality of 2DPs has an inner cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 1101: A method of making a dielectric, Dk, electromagnetic, EM, structure having a plurality of a first dielectric portion, 1DP, and a plurality of a second dielectric portion, 2DP, the method comprising: providing a substrate; disposing a layer of photoresist on top of the substrate; disposing a photomask on top of the photoresist, the photomask comprising a plurality of substantially identically configured opaque covers arranged in an array, thereby providing non-exposed photoresist in areas covered by the opaque covers, and exposed photoresist in areas not covered by the opaque covers; exposing at least the exposed photoresist to EM radiation; removing the non-exposed photoresist from the substrate, resulting in a plurality of substantially identically configured portions of remaining photoresist arranged in the array that form corresponding ones of the plurality of 1DPs having a first average dielectric constant; optionally shaping via a stamping form each 1DP of the plurality of 1DPs into a dome structure having a convex distal end; filling a flowable form of a curable Dk composition into spaces between the plurality of 1DPs, wherein the filled spaces provide corresponding ones of the plurality of 2DPs having a second average dielectric constant that is less than the first average dielectric constant; optionally removing any excess Dk composition above an upper surface of the plurality of 1DPs, leaving the Dk composition flush with the upper surface of the plurality of 1DPs; at least partially curing the curable Dk composition, resulting in at least one array of the plurality of 1DPs surrounded by the plurality of 2DPs.
Aspect 1102: The method of Aspect 1101, wherein: the step of optionally shaping comprises shaping via application of the stamping form to the plurality of 1DPs at a temperature that causes reflow but not curing of the photoresist, followed by at least partially curing the shaped plurality of 1DPs to maintain the dome shape.
Aspect 1103: The method of any of Aspects 1101 to 1102, wherein: the substrate comprises any one of: a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network; the photoresist is a positive photoresist; the EM radiation is X-ray or UV radiation; the non-exposed photoresist is removed via etching; the at least partially curing comprises curing the curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
Aspect 1104: The method of any of Aspects 1101 to 1103, wherein: the curable Dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
Aspect 1105: The method of Aspect 1104, wherein: the curable Dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
Aspect 1106: The method of any of Aspects 1101 to 1105, wherein: each of the plurality of the 1DPs has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 1107: The method of any of Aspects 1101 to 1106, wherein: each opaque cover has an outer shape, as observed in an x-y plane plan view, that is circular.
Aspect 1201: A method of making the stamping form of any one of Aspects 1101 to 1107 for use in accordance therewith, the method comprising: providing a substrate having a metal layer on top thereof, the metal layer covering the substrate; disposing a layer of photoresist on top of and covering the metal layer; disposing a photomask on top of the photoresist, the photomask comprising a plurality of substantially identically configured opaque covers arranged in an array, thereby providing non-exposed photoresist in areas covered by the opaque covers, and exposed photoresist in areas not covered by the opaque covers; exposing at least the exposed photoresist to EM radiation; removing the exposed photoresist subjected to the EM radiation exposure from the metal layer, resulting in a plurality of substantially identically configured portions of remaining photoresist arranged in the array; shaping via application of a shaping form to each of the plurality of substantially identically configured portions of remaining photoresist to form shaped photoresist at a temperature that causes reflow but not curing of the photoresist, followed by at least partially curing the shaped plurality of substantially identically configured portions of remaining photoresist to maintain the plurality of substantially identically formed shapes; applying a metal coating to all exposed surfaces of the remaining photoresist having the substantially identically formed shapes; filling the spaces between the substantially identically formed shapes and covering the remaining metal coated photoresist with a stamp-suitable metal to a particular thickness, H7, relative to a top surface of the metal layer; removing the substrate from the bottom of the metal layer; removing the metal layer; and removing the remaining photoresist, resulting in the stamping form.
Aspect 1202: The method of Aspect 1201, wherein: the substrate comprises any one of a metal; an electrical insulating material; a wafer; a silicon substrate or wafer; a silicon dioxide substrate or wafer; an aluminum oxide substrate or wafer; a sapphire substrate or wafer; a germanium substrate or wafer; a gallium arsenide substrate or wafer; an alloy of silicon and germanium substrate or wafer; or, an indium phosphide substrate or wafer; the photoresist is a positive photoresist; the EM radiation is X-ray or UV radiation; the metal coating is applied via metal deposition; the stamp-suitable metal comprises nickel; the substrate is removed via etching or grinding; the metal layer is removed via polishing, etching, or a combination of polishing and etching; and the exposed photoresist and the remaining photoresist are removed via etching.
Aspect 1301: A method of making a dielectric, Dk, electromagnetic, EM, structure having a plurality of a first dielectric portion, 1DP, and a plurality of a second dielectric portion, 2DP, the method comprising: providing a substrate; disposing a layer of photoresist on top of the substrate; disposing a grayscale photomask on top of the photoresist, the grayscale photomask comprising a plurality of substantially identically configured covers arranged in an array, the covers of the grayscale photomask comprising an opaque central region transitioning to a partially translucent outer region, thereby providing non-exposed photoresist in areas covered by the opaque region, partially exposed photoresist in areas covered by the partially translucent region, and fully exposed photoresist in areas not covered by the covers; exposing the grayscale photomask and the fully exposed photoresist to EM radiation; removing the partially and fully exposed photoresist subjected to the EM radiation exposure, resulting in a plurality of substantially identically shaped forms of remaining photoresist arranged in the array that form the plurality of 1DPs having a first average dielectric constant; filling a flowable form of a curable Dk composition into spaces between the plurality of 1DPs, wherein the filled spaces provide corresponding ones of the plurality of 2DPs having a second average dielectric constant that is less than the first average dielectric constant; optionally removing any excess Dk composition above an upper surface of the plurality of 1DPs, leaving the Dk composition flush with the upper surface of the plurality of 1DPs; at least partially curing the curable Dk composition, resulting in an assembly comprising the substrate and the at least one array of the plurality of 1DPs having the substantially identically shaped forms surrounded by the plurality of 2DPs disposed on the substrate.
Aspect 1302: The method of Aspect 1301, wherein: the substrate comprises any one of: a dielectric panel; a metal panel; a combination of a dielectric panel and a metal panel; a printed circuit board; a flexible circuit board; a substrate integrated waveguide, SIW; a metal panel comprising a plurality of slotted apertures disposed in a one-to-one correspondence with a given one of the plurality of 1DPs; or, an EM signal feed network; the photoresist is a positive photoresist; the EM radiation is X-ray or UV radiation; the partially and fully exposed photoresist is removed via etching; the at least partially curing comprises curing the curable Dk composition at a temperature equal to or greater than about 170 degree Celsius for a time duration equal to or greater than about 1 hour.
Aspect 1303: The method of any of Aspects 1301 to 1302, wherein: the curable Dk composition comprises 1,2-butadiene, 2,3-butadiene, isoprene, or a homopolymer or copolymer thereof, an epoxy, an allylated polyphenylene ether, a cyanate ester, optionally a co-curable crosslinking agent, and optionally a curing agent.
Aspect 1304: The method of Aspect 1303, wherein: the curable Dk composition further comprises an inorganic particulate material, preferably wherein the inorganic particulate material comprises titanium dioxide (rutile and anatase), barium titanate, strontium titanate, silica (including fused amorphous silica), corundum, wollastonite, Ba2Ti9O20, solid glass spheres, synthetic hollow glass spheres, ceramic hollow spheres, quartz, boron nitride, aluminum nitride, silicon carbide, beryllia, alumina, alumina trihydrate, magnesia, mica, talcs, nanoclays, magnesium hydroxide, or a combination thereof.
Aspect 1305; The method of any of Aspects 1301 to 1304, wherein: each of the plurality of the 1DPs has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 1306: The method of any of Aspects 1301 to 1305, wherein: each of the plurality of the 1DPs has any one of: a dome shape; a conical shape; a frustoconical shape; a cylindrical shape; a ring shape; or, a rectangular shape.
Aspect 1401: A method of making the stamping form of any of Aspects 1101 to 1107 for use in accordance therewith, the method comprising: providing a substrate having a metal layer on top thereof, the metal layer covering the substrate; disposing a layer of photoresist on top of and covering the metal layer; disposing a grayscale photomask on top of the photoresist, the grayscale photomask comprising a plurality of substantially identically configured covers arranged in an array, the covers of the grayscale photomask comprising an opaque central region transitioning to a partially translucent outer region, thereby providing non-exposed photoresist in areas covered by the opaque region, partially exposed photoresist in areas covered by the partially translucent region, and fully exposed photoresist in areas not covered by the covers; exposing the grayscale photomask and the fully exposed photoresist to EM radiation; removing the partially and fully exposed photoresist subjected to the EM radiation exposure, resulting in a plurality of substantially identically shaped forms of remaining photoresist arranged in the array; applying a metal coating to all exposed surfaces of the remaining photoresist having the substantially identically shaped forms; filling the spaces between the metal coated substantially identically shaped forms and covering the metal coated substantially identically shaped forms with a stamp-suitable metal to a particular thickness, H7, relative to a top surface of the metal layer; removing the substrate from the bottom of the metal layer; removing the metal layer; and removing the remaining photoresist, resulting in the stamping form.
Aspect 1402: The method of Aspect 1401, wherein: the photoresist is a positive photoresist; the EM radiation is X-ray or UV radiation; the metal coating is applied via metal deposition; the stamp-suitable metal comprises nickel; the substrate is removed via etching or grinding; the metal layer is removed via polishing, etching, or a combination of polishing and etching; and the exposed photoresist and the remaining photoresist are removed via etching.
Aspect 1403: The method of any of Aspects 1401 to 1402, wherein: each of the plurality of substantially identically shaped forms has an outer cross-section shape, as observed in an x-y plane cross-section, that is circular.
Aspect 1404: The method of any of Aspects 1401 to 1403, wherein: each of the plurality of substantially identically shaped forms has any one of: a dome shape; a conical shape; a frustoconical shape; a cylindrical shape; a ring shape; or, a rectangular shape.
O'Connor, Stephen, Brown, Christopher, Taraschi, Gianni, Pance, Kristi, Polidore, Trevor, Horn, III, Allen F., Baars, Dirk, George, Roshin Rose, Duperre, Jared, Pandey, Shailesh, Sprentall, Karl E., Williams, Shawn P., Blasius, William
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