An electrostatic discharge (ESD) protection circuit including a silicon controlled rectifier having a plurality of scr fingers. Each scr finger includes at least one interspersed high-doped first region formed within a first lightly doped region. At least one interspersed high-doped second region are formed within a second lightly doped region, where the first and second lightly doped regions are adjacent one another. At least one first trigger-tap is coupled to the second lightly doped region. Additionally, at least one first low-ohmic connection is respectively coupled between the at least one first trigger tap of each scr finger.

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Patent
   6621126
Priority
Oct 10 2000
Filed
Oct 10 2001
Issued
Sep 16 2003
Expiry
Oct 10 2021
Inventors
Russ, Chri…
Assg.orig
Sarnoff Co…
Assg.curr
Sofics BVBA
Entity
Large
Referenced by
34
References
2
Maint.:
all paid
CROSS REFERENCES
FIELD OF THE INVENTI…
BACKGROUND OF THE IN…
SUMMARY OF INVENTION
BRIEF DESCRIPTION OF…
DETAILED DESCRIPTION…
16. An electrostatic discharge (ESD) protection circuit, comprising:
a silicon controlled rectifier having a plurality of scr fingers, each scr finger including at least one trigger tap connected to each scr finger for supplying a trigger current to each scr finger; and
at least one low-ohmic connection electrically coupling the at least one trigger tap of each scr finger to a common triggering voltage potential.
1. An electrostatic discharge (ESD) protection circuit, comprising:
a silicon controlled rectifier having a plurality of scr fingers, where each scr finger comprises:
at least one interspersed high-doped first region formed within a first lightly doped region;
at least one interspersed high-doped second region formed within a second lightly doped region, where the first and second lightly doped regions are adjacent one another;
at least one first trigger-tap connected to the second lightly doped region for supplying a trigger current to said scr finger; and
at least one first low-ohmic connection respectively coupled between the at least one first trigger tap of each scr finger.
10. An electrostatic discharge (ESD) protection circuit, comprising:
a silicon controlled rectifier having a plurality of scr fingers, where each scr finger comprises:
at least one interspersed high-doped first region formed within a first lightly doped region;
at least one interspersed high-doped second region formed within a second lightly doped region, where the first and second lightly doped regions are adjacent one another;
at least one first trigger-tap connected to the second lightly doped region for supplying a trigger current to said scr finger; and
at least one first low-ohmic connection respectively coupled between the at least one first trigger tap of each scr finger.
22. An electrostatic discharge (ESD) protection circuit, comprising:
a plurality of scr fingers, wherein each scr finger comprises:
a N-well and adjacent P-well formed in a P-substrate and defining a junction therebetween;
S N+ doped regions interspersed in said P-well, where S is an integer greater than zero;
T P+ doped regions interspersed in said N-well, where T is an integer greater than zero;
U N+ doped trigger taps disposed proximate and between the S interspersed P+ doped regions in said N-well, where U is an integer greater than zero, for supplying trigger current to the scr finger;
at least one N-well low-ohmic connection electrically coupling the T N+ doped trigger taps of each scr finger to a common voltage potential.
17. An electrostatic discharge (ESD) protection circuit, comprising:
a plurality of scr fingers, wherein each scr finger comprises:
a N-well and adjacent P-well formed in a semiconductor substrate and defining a junction therebetween;
S Ni+ doped regions interspersed in said P-well, where S is an integer greater than zero;
T P+ doped regions interspersed in said N-well, where T is an integer greater than zero;
U P+ doped trigger taps disposed proximate and between the S interspersed N+ doped regions in said P-well, where U is an integer greater than zero, for supplying a trigger current to the scr finger;
at least one P-well low-ohmic connection electrically coupling the U P+ doped trigger taps of each scr finger to a common first triggering voltage potential.
2. The circuit of claim 1, further comprising a bond pad, coupled to the at least one high-doped first region of each scr finger and to protected circuitry.
3. The circuit of claim 1, further comprising:
at least one second trigger-tap coupled to the first lightly doped region of each scr finger, and
at least one second low-ohmic connection respectively coupled between the at least one second trigger tap of each scr finger.
4. The circuit of claim 1, wherein each high-doped first region of each scr finger is respectively electrically coupled together via a plurality of first region metallic connections, where a common voltage potential across each high-doped first region of each scr finger is provided.
5. The circuit of claim 1, wherein each high-doped second region of each scr finger is respectively electrically coupled together via a plurality of second region metallic connections, where a common ground potential across each high-doped second region of each scr finger is provided.
6. The circuit of claim 1, wherein each at least one first trigger-tap forms a first trigger gate G1 of each scr finger.
7. The circuit of claim 6, wherein each at least one second trigger-tap forms a second trigger gate G2 of each scr finger.
8. The circuit of claim 1, wherein:
the at least one interspersed high-doped first region comprises P doped semiconductor materials;
the at least one interspersed high-doped second region comprises N doped semiconductor materials;
the first lightly doped region comprises N doped semiconductor material;
the second lightly doped region comprises P doped semiconductor material; and
the at least one first trigger-tap comprises P doped semiconductor material.
9. The circuit of claim 8, wherein the at least one second trigger-tap comprises N doped semiconductor material.
11. The circuit of claim 10, further comprising a bond pad coupled to the at least one high-doped second region of each scr finger and to protected circuitry.
12. The circuit of claim 10, wherein each high-doped first region of each scr finger is respectively electrically coupled together via a plurality of first region metallic connections, where a common ground potential across each high-doped first region of each scr finger is provided.
13. The circuit of claim 10, wherein each high-doped second region of each scr finger is respectively electrically coupled together via a plurality of second region metallic connections, where a common voltage potential across each high-doped second region of each scr finger is provided.
14. The circuit of claim 10, wherein each at least one first trigger tap forms a first trigger gate G2 of each scr finger.
15. The circuit of claim 10, wherein:
the at least one interspersed high-doped first region comprises N doped semiconductor materials;
the at least one interspersed high-doped second region comprises P doped semiconductor materials;
the first lightly doped region comprises P doped semiconductor material;
the second lightly doped region comprises N doped semiconductor material; and
the at least one first trigger-tap comprises N doped semiconductor material.
18. The circuit of claim 17, further comprising:
W N+ doped trigger-taps disposed proximate to the T interspersed P+ doped regions in said N-well, where W is an integer; and
at least one N-well low-ohmic connection electrically coupling the W N+ doped trigger taps of each scr finger to a common second voltage potential.
19. The circuit of claim 17, wherein each interspersed P+ doped region of each scr finger is respectively electrically coupled together via a first plurality of metallic connections, where a common voltage potential across each interspersed P+ doped region of each scr finger is provided.
20. The circuit of claim 17, wherein each interspersed N+ doped region of each scr finger is respectively electrically coupled together via a second plurality of metallic connections, where a common ground potential across each interspersed N+ doped region of each scr finger is provided.
21. The circuit of claim 17, further comprising an N type isolation layer implanted in the P-substrate, beneath the N-wells and P-wells and adjacent to the P-wells, wherein the P-wells are isolated from the P-substrate.
23. The circuit of claim 22, wherein each interspersed N+ doped region of each scr finger is respectively electrically coupled together via a first plurality of metallic connections, where a common ground potential across each interspersed N+ doped region of each scr finger is provided.
24. The circuit of claim 23, wherein each interspersed P+ doped region of each scr finger is respectively electrically coupled together via a second plurality of metallic connections, where a common voltage potential across each interspersed P+ doped region of each scr finger is provided.
CROSS REFERENCES

This patent application claims the benefit of U.S. Provisional Application, Ser. No. 60/239,203, filed Oct. 10, 2000, the contents of which are incorporated by reference herein.

FIELD OF THE INVENTION

This invention generally relates to the field of electrostatic discharge (ESD) protection circuitry and, more specifically, improvements for silicon controlled rectifier (SCR) structures in the protection circuitry of an integrated circuit (IC).

BACKGROUND OF THE INVENTION

Integrated circuits (IC's) and other semiconductor devices are extremely sensitive to the high voltages that may be generated by contact with an electrostatic discharge (ESD) event. As such, ESD protection circuitry is essential for integrated circuits. An ESD event commonly results from the discharge of a high voltage potential (typically, several kilovolts) and leads to pulses of high current (a few amperes) of a short duration (typically, 100 nanoseconds). An ESD event is generated within an IC, illustratively, by human contact with the leads of the IC or by electrically charged machinery being discharged in other leads of an IC. During installation of integrated circuits into products, these electrostatic discharges may destroy the IC's and thus require expensive repairs on the products, which could have been avoided by providing a mechanism for dissipation of the electrostatic discharge to which the IC may have been subjected.

FIG. 1 depicts a schematic diagram of a prior art multi-fingered SCR ESD protection device 101, which serves as protection circuitry for an integrated circuit (IC) 100. As the distances between the pads (i.e., pad pitches) become smaller the ESD protection circuitry has been provided with multiple SCR fingers. An illustrative prior art integrated circuit 100 includes a SCR protection circuit 101 having multiple SCR fingers, and is illustratively depicted in FIG. 1 having two SCR "fingers" 1021 and 1022. Generally, prior to an ESD event, the SCR fingers are in a nonconductive state. Once the high voltage of an ESD event is encountered, the SCR fingers then change to a conductive state to shunt the current to ground. Each of the SCR fingers maintains this conductive state until the voltage is discharged to a safe level.

In particular, the SCR protection circuit 101 is connected from a pad 132 to ground 124. The pad 132 is also connected to the protected circuitry of the IC, optionally through a current limiting resistor RL (not shown). The SCR protection circuit 101 comprises a trigger device 105 (discussed further below), a first SCR 1021 (i.e., "first finger"), and a second SCR 1022 (i.e., "second finger"). The first SCR 1021 further comprises a NPN transistor QN11311 and a PNP transistor QP11321. In particular, the SCR protection device 101 includes an anode 122, which is connected to the pad 132 and to one side of a resistor Rn1 142. The resistor Rn1 142 represents the resistance of the N-well, which is seen at the base of the PNP transistor QP11321 of the SCR 1021, which is discussed in further detail below. Additionally, the anode 122 is coupled to an emitter 1081 of the PNP transistor QP11321, which is parallel to the N-well resistance Rn1 1421.

A first node 1341 includes the base of the PNP transistor QP11321, the other side of the resistor Rn1 1421, and the collector 1041 of the NPN transistor QN11311. A second node 1361 includes the collector 1061 of the PNP transistor QP11321, the base of the NPN transistor QN11311, and connects to one side of a resistor Rp1 1411. The resistor Rp1 141 represents the resistance of the P-well, which is seen at the base of the NPN transistor QN1 of the SCR 1021 and is discussed in further detail below. The other side of resistor Rp1 1411 is connected to a third node 124, which is grounded and serves as the cathode of the SCR 1021. Furthermore, the emitter 1121 of the NPN transistor QN11311 is also connected to the grounded third node 124.

A second SCR 1022 is formed exactly in the same manner as described with regard to the first SCR 1021. In particular, an emitter 1082 of a second PNP transistor QP21322 is coupled to the anode 122, which is common to all of the multi-finger SCR's 102 and the pad 132. Furthermore, an emitter 1122 of a second NPN transistor QN21312 is coupled to the cathode 124, which is common to all of the multi-finger SCR's 102 and ground. In addition, the two fingers 1021 and 1022 of the multi-finger SCR protection circuit 101 are coupled together by a common P-substrate and shared N-well regions therein. That is, the bases of the first and second NPN transistors QN11311 and QN21312 are coupled via a P-well coupling resistance Rpc 103p. Similarly, the bases of the first and second PNP transistors QP11321 and QP21322 are coupled via a N-well coupling resistance Rnc 103n. The coupling resistances Rpc and Rnc typically have high resistance values in the range of 100 to 2000 Ohms.

A single triggering device providing a positive trigger current to the trigger gate 105 has been used to turn on all of the SCR fingers 102. Alternatively, a single trigger device providing a negative trigger current to the trigger gate 107 may be used. It has been observed however, that providing the trigger current to the trigger gate 105 (or 107) has not been sufficient to trigger all of the SCR fingers 102 as is discussed below.

In operation, each protective multi-finger SCR circuit 102, which illustratively comprise the NPN and PNP transistors QN11311 and QP11321, will not conduct current between the anode 122 and the grounded cathode 124. That is, the SCR fingers 102 are turned off, since there is no high voltage (e.g., ESD voltage) applied to the SCR 102, but only the regular signal voltage of the functional parts of the IC. Once an ESD event occurs at the pad 132, a high voltage potential appears on the anode 122. A triggering device senses the high voltage potential and provides a trigger current to the trigger gate 105 and causes the base potential of the NPN transistor QN11311 to rise, which subsequently turns on the NPN transistor QN11311. Furthermore, the collector of the NPN transistor QN11311 is coupled to the base of the PNP transistor QP11321, which turns on the PNP transistor QP11321.

As such, once the NPN transistor QN11311 is turned on, the collector 1041 provides the base current to the PNP transistor QP11321. Therefore, the base current of the PNP transistor QN21321 is greater than the base current of the NPN transistor QN11311. Moreover, the current gain of the PNP transistor QP11321 is realized as the QP11321 collector current, which is then fed back to the base of the NPN transistor QN11311, thereby amplifying the base current of the NPN transistor QN11311. Amplification of the base currents in the SCR 102 progressively continues to increase in a feedback loop between both transistors QN11311 and QP11321. Therefore, the conduction in a turned on SCR is also called a "regenerative process".

The SCR 1021 becomes highly conductive and sustains (i.e., holds) the current flow with a very small voltage drop (i.e., holding voltage) between the anode and cathode (typically, 1-2 V). Accordingly, once the SCR 1021 is turned on, the current from the ESD event passes from anode 122 to the grounded cathode 124. Once the ESD event has been discharged from the anode 122 to the cathode 124, the SCR 102 turns off because it cannot sustain its regenerative conduction mode.

There is usually a large voltage difference between the triggering point and holding point. One problem that has been observed is that the multiple SCR fingers 102 do not always trigger. That is, even though the first SCR finger 1021 may trigger, the other SCR fingers (e.g., SCR 1022) may not trigger because almost the entire triggering voltage quickly collapses, which fails to enable the other SCR fingers (e.g., SCR 1022) to reach their trigger voltages. Also the coupling through the relatively high-ohmic resistors Rnc and Rpc is too weak to turn on the other finger(s). In particular, a typical triggering voltage (depending on a trigger device connected to the trigger gate) is in a range of 7-10 volts, while the holding voltage for an SCR is in a range of 1 to 2 volts. If the first SCR finger 1021 triggers at 7-10 volts and then drops to the holding voltage of 1 to 2 volts, then there is not enough voltage to trigger the other SCR fingers 102. Thus, when the SCR fingers 102 carry large ESD currents, the voltage differences may lead to non-uniform current distribution and premature failure of the SCR fingers 102 and, ultimately, the IC 100 itself.

Such failure to trigger all of the multiple SCR fingers in an ESD protection device is especially prominent in epitaxial technologies. Specifically, wafers with an epitaxially grown layer of low-doped p material have a very low substrate resistance due to the high-doped p-region underneath the p-epitaxial layer. The objective of epitaxial wafers is to have exceptionally good coupling of the substrate to the ground potential. However, the low substrate resistance makes the triggering of the SCR fingers in an ESD protection circuit difficult. The very good coupling of the substrate to the ground potential impedes the current to flow to the other SCR fingers 102, such that only the first SCR finger 1021 will trigger, which may result in the remaining portion of the protection circuit 101 from not protecting the IC 100.

Therefore, there is a need in the art for a multi-fingered SCR protection device having a reliable triggering mechanism.

SUMMARY OF INVENTION

The disadvantages heretofore associated with the prior art are overcome by the present invention of an electrostatic discharge (ESD) protection circuit including a silicon controlled rectifier (SCR) having a plurality of SCR fingers. Each SCR finger includes at least one interspersed high-doped first region formed within a first lightly doped region.

At least one interspersed high-doped second region are formed within a second lightly doped region, where the first and second lightly doped regions are adjacent one another. At least one first trigger-tap is coupled to the second lightly doped region. Additionally, at least one first low-ohmic connection is respectively coupled between the at least one first trigger tap of each SCR finger.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 depicts a schematic diagram of a prior art multi-fingered SCR included within an integrated circuit to provide ESD protection;

FIG. 2 depicts an illustrative schematic diagram of a multi-fingered SCR ESD protection device of the present invention;

FIG. 3 depicts a top view of an embodiment of the multi-fingered SCR ESD protection device of FIG. 2;

FIG. 4 depicts a cross-sectional view taken along line 4-4 of the multi-fingered SCR ESD protection device of FIG. 3; and

FIG. 5 depicts a cross-sectional view taken along line 5-5 of the multi-fingered SCR ESD protection device of FIG. 3.

To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures.

DETAILED DESCRIPTION OF THE INVENTION

The present invention can be practiced in conjunction with integrated circuit fabrication techniques currently used in the art, and only so much of the commonly practiced process steps are included as are necessary for an understanding of the present invention. The figures representing cross-sections and layouts of portions of an IC during fabrication are not drawn to scale, but instead are drawn so as to illustrate the important features of the invention. The present invention is described with reference to CMOS devices. However, those of ordinary skill in the art will appreciate that selecting different dopant types and adjusting concentrations allows the invention to be applied to bipolar and other processes that are susceptible to damage caused by ESD.

FIG. 2 depicts an illustrative schematic diagram embodiment of a multi-fingered SCR ESD protection device 201 of the present invention. The embodiment depicts an integrated circuit (IC) 200 having an IC pad 132 coupled to a trigger device (not shown) and a multi-fingered SCR device 202. An optional current limiting resistor RL (not shown) may be positioned between the circuitry to be protected and the multi-fingered SCR ESD protection device 201. The triggering device, which senses the ESD voltage and provides a trigger current, and multi-fingered SCR 202 together serve as a protection device for the IC circuitry. In particular, the triggering device and multi-fingered SCR 202 protect the IC circuitry from electrostatic discharges (ESD) that may occur at the pad 132, which is coupled to the IC circuitry. When turned on, the multi-fingered SCR 202 functions as a shunt to redirect any ESD currents from the pad 132 to ground. That is, the multi-fingered SCR 202 quickly dissipates such over-voltage ESD condition.

In particular, the SCR protection circuit 201 is connected from a pad 132 to ground 124. The SCR protection circuit 201 comprises a first SCR 2021 (i.e., "first finger") and a second SCR 2022 (i.e., "second finger") (collectively SCR fingers 202). The first SCR finger 2021 further comprises a NPN transistor QN12311 and a PNP transistor QP22321. In particular, the SCR protection device 201 includes an anode 222, which is connected to the pad 132 and to one side of a resistor Rn1 2421. The resistor Rn1 2421 represents the intrinsic resistance of the N-well, which is seen at the base of the PNP transistor QP1 of the first SCR finger 2021. Additionally, the anode 222 is coupled to an emitter 2081 of a PNP transistor QP12321, which is parallel to the intrinsic N-well resistance Rn1 2421.

A first node 2341 is formed by the base of the PNP transistor QP12321, the other side of the resistor Rn1 2421, and the collector 2041 of the NPN transistor QN12311. A second node 2361 is formed by the collector 2061 of the PNP transistor QP12321, the base of the NPN transistor QN12311, and one side of a resistor Rp1 2411. The resistor Rp1 241 represents the intrinsic resistance of the P-well, which is seen at the base of the NPN transistor QN1 of the SCR 2021. The other side of resistor Rp1 2411 is connected to a third node 224, which is grounded and serves as the cathode. Furthermore, the emitter 2121 of the NPN transistor QN12311 is also connected to the grounded third node 224.

A second SCR 2022 is formed exactly in the same manner as described with regard to the first SCR 2021. In particular, an emitter 2082 of a second PNP transistor QP22322 is coupled to the anode 222, which is common to all of the multi-finger SCR's 202 and the pad 132. Furthermore, an emitter 2122 of a second NPN transistor QN22312 is coupled to the cathode 224, which is common to all of the multi-finger SCR's 202 and grounded. In addition, the two fingers 2021 and 2022 of the multi-finger SCR protection circuit 201 are coupled together by a common P-substrate and shared N-well regions therein as discussed below with regard to FIGS. 3-5. Furthermore, the bases, which are each formed by a P-well of the first and second NPN transistors QN12311 and QN22312, are coupled via a low-ohmic (metal or poly silicon) connection 203p. Similarly, the bases, which are each formed by a N-well of the first and second PNP transistors QP12321 and QP22322, are coupled via a similar low-ohmic connection 203n.

A single triggering device is either connected to a first trigger gate 205 or a second trigger gate 207. The single triggering device, in conjunction with the inventive features as discussed below, is used to proficiently and reliably trigger all of the SCR fingers 202 in the ESD protection device 201.

FIG. 3 depicts a top view of an embodiment of the multi-fingered SCR ESD protection device 201, and FIG. 4 depicts a cross-sectional view of an embodiment of the multi-fingered SCR ESD protection device 201. FIGS. 3 and 4 should be viewed together. The multi-fingered SCR protection device 201 is formed on a P-substrate 302 having an optional N doped isolation layer N-ISO 404 (see FIG. 4) implanted in a portion of the P-substrate 302. Implanted in the P-substrate layer 302 (or over an optional N-ISO layer 404) are a plurality of P and N wells 306 and 308. In particular, the first SCR finger 2021 comprises a first P-well 3061 and first N-well 3081, which are positioned adjacent to one another to form a junction 3071 as shown in FIGS. 4 and 5. Additionally, the first P-well 3061 has a plurality of interspersed first high-doped N+ regions 3101-1 through 3101-4 implanted therein, while the first N-well 3081 has a plurality of interspersed first high-doped P+ regions 3121-1 through 3121-4 implanted therein.

Furthermore, where an optional N-ISO layer (see N-ISO layer 404 in FIG. 4) is implanted in the P-substrate 302 beneath the P and N wells 306 and 308, an additional N-well region 314 is provided adjacent to the sides of the P-wells 306. The additional N-well region 314 is provided to isolate the sides of the P-wells 306 from the P-substrate 302. Conversely, when the optional N-ISO layer 404 is not implanted in the P-substrate 302, the additional N-well region 314 is not required.

Likewise, the second SCR finger 2022 comprises a second P-well 3062 and second N-well 3082, which are also positioned adjacent to one another to form a junction 3072 as shown in FIGS. 4 and 5. Additionally, the second P-well 3062 has a plurality of interspersed second high-doped N+ regions 3102-1 through 3102-4 implanted therein, while the second N-well 3082 has a plurality of interspersed second high-doped P+ regions 3122-1 through 3122-4 implanted therein. It is noted that the P and N wells 306 and 308 of each SCR finger 202 are formed adjacent to each other and form a junction 309 in a similar manner as the junctions 307. For example, the N-well 3081 of the first SCR finger 2021 is positioned adjacent to the second P-well 3062, and so forth for each SCR finger 202 in the protective SCR device 201.

Referring to FIG. 3, the anode 222 of each SCR finger 202 comprises a plurality of contacts 328A1 through 328An, which are coupled together via external wiring 330A to the pad 132. Furthermore, the anode 222 of each SCR finger 202 is coupled together via external metallic anode connections 324An. Likewise, the cathode 224 of each SCR finger 202 comprises a plurality of contacts 328C1 through 328Cn, which are coupled together via external wiring 330C to ground. Furthermore, the cathode 224 of each SCR finger 202 is coupled together via external metallic cathode connections 324Cn. The external, but on-chip wiring 330A and 330C and metallic connections 324An and 324Cn are preferably fabricated by metallization processes known in the art, where each end of the wire is connected to a single contact 328.

FIG. 4 depicts a cross-sectional view taken along line 4--4 of the multi-fingered SCR ESD protection device 201 of FIG. 3. The first SCR finger 2021 is formed by the first P-well 3061 and first N-well 3081, having the plurality of alternating first N+ doped regions (only region 3101-1 shown) interspersed with a plurality of P+ doped regions (only region 3121-1 shown) respectively disposed therein. In particular, the plurality of first P+ doped regions 3121, N-well region 3081, and P-well region 3061 forms the first PNP transistor QP12321 of the first SCR finger 2021. Similarly, the plurality of first N+ doped regions 3101, P-well region 3061, and N-well region 3081 forms the first NPN transistor QN12311 of the first SCR finger 2021. The intrinsic resistance Rn1 and Rp1 of the N-well 3081 and P-well 3061 are also shown as coupled to the bases of the respective transistors QP12321 and QN12311. Typically, the intrinsic resistances Rn1 and Rp1 are in the range of 100 to 2000 Ohms.

Likewise, the second SCR finger 2022 is formed by the second P-well 3062 and second N-well 3082 respectively having the plurality of second N+ doped regions 3102-1 through 3102-4 interspersed with an alternating plurality of second P+ doped regions 3122-1 through 3122-4 disposed therein. In particular, the plurality of second P+ regions 3122, N-well region 3082, and P-well region 3062 form the second PNP transistor QP22322 of the second SCR finger 2022. Similarly, the plurality of second N+ regions 3102, P-well region 3062, and N-well region 3082 form the second NPN transistor QN22312 of the second SCR finger 2022. The intrinsic resistance Rn2 and Rp2 of the N-well 3082 and P-well 3062 are also shown as coupled to the bases of the respective transistors QP22322 and QN22312. Typically, the intrinsic resistances Rn2 and Rp2 are in the range of 100 to 2000 Ohms. The metallic connections 324An and 324Cn externally connect the anodes 222 and cathodes 224 of the first and second SCR fingers 2021 and 2022 together.

The anode 222 and cathode 224 of each SCR finger are formed by the interspersed high-doped P+ and N+ regions 312 and 310 respectively disposed in the N-well 308 and P-well 306. For example, the second SCR finger 2022 in FIG. 3 depicts four P+ regions 3122-1 through 3122-4, which collectively form the anode 2222. The four P+ regions 3122-1 through 3122-4 are disposed in line in the N-well 3082 and have 5 exemplary contacts 328 thereon. Similarly, four N+ regions 3102-1 through 3102-4 collectively form the cathode 2242. The four N+ regions 3102-1 through 3102-4 are disposed in line in the P-well 3062 and have 5 exemplary contacts 328 thereon. The same interspersed anode 222 and cathode 224 structures are provided for all of the SCR fingers 202 in the ESD protection device 201. Although, the P+ anode 222 and N+ cathode 224 are illustratively shown in FIG. 3 as having four regions and each region with 5 contacts, one skilled in the art will understand that the number of regions and contacts is not considered as limiting.

Disposed between each P+ region 3122-1 through 3122-4 and N+ region 3102-1 through 3102-4 are smaller interspersed high-doped N+ and P+ regions (hereinafter called trigger taps 320 and 322). Recall, that a single trigger gate 205 or 207 is used and is coupled to either the base of the NPN transistor QN12311 (in the case of gate G1205) or the base of the PNP transistor QP12321 (in the case of gate G2207). In the illustrative embodiment of FIG. 3, three P+ trigger tap regions 3222 are disposed between the four N+ regions 3102-1 through 3102-4 in the P-wells 3061 and 3062. The three trigger P+ tap regions 322 correspond to the NPN transistor QN12311 and are being coupled to a trigger device connected at the first trigger gate G1205 of FIG. 2.

Similarly, three N+ trigger tap regions 3202 are disposed between the four P+ anode regions 3122-1 through 3122-4 in the N-wells 3081 and 3082. These N+ and P+ trigger taps 320 and 322 respectively form low ohmic connections to and between the N-wells 3081-2 as well as to and between the P-wells 3061-2. The three N+ trigger tap regions 320 correspond to the PNP transistor QP12321 and are coupled to a trigger device connected at the second trigger gate G2207 of FIG. 2. That is, the P+ and N+ trigger taps 322 and 320 serve as first and second SCR trigger gates G1 and G2205 and 207. The trigger taps 322 and 320 may be alternatively or both used to inject a hole current (at gate G1205) or an electron current (at gate G2207) to trigger the SCR.

It is also noted that where the optional N-ISO layer 404 is implanted in the P-substrate 302, the additional N-well 314 is required adjacent to the P-wells 306. For example, the additional N-well 314 is implanted adjacent to the first P-well 3061 as shown in FIG. 4, as well as at the ends of the in-line P-wells 3061 and 3062, thereby completely isolating the P-wells 306 from the P-substrate 302.

FIG. 5 depicts a cross-sectional view taken along line 5-5B of the multi-fingered SCR ESD protection device of FIG. 3. FIG. 5 should be viewed along with FIG. 3. In particular, the cross-sectional view shows the first P+ trigger tap (i.e., SCR trigger gate G1) 3221 disposed in the first P-well 3061 and the first N+ trigger tap (i.e., SCR gate G2) 3201 disposed in the first N-well 3081 of the first SCR finger 2021. Likewise, the second P+ trigger tap 3222 is disposed in the second P-well 3062, while the second N+ trigger tap 3202 is disposed in the second N-well 3082 of the second SCR finger 2022. An external, but on-chip P-well low-ohmic connector 203p connects the first P+ trigger 3221 of the first SCR finger 2021 to the second P+ trigger tap 3222 of the second SCR finger 2022. Similarly, an external, but on-chip N-well low-ohmic connector 203n connects the first N+ trigger 3201 of the first SCR finger 2021 to the second N+ trigger 3202 of the second SCR finger 2022. The P and N-well low-ohmic connections 203p and 203n are preferably fabricated from metal (typically aluminum or copper) or poly silicon (e.g., silicided poly silicon) or any other material available in the IC processing technology having a high electrical conductivity. Each end of the P and N-well metallic connections 203p and 203n is connected to a single contact 328 disposed over the P+ and N+ trigger taps 322 and 320.

FIG. 2 depicts the schematic representation of the low-ohmic connections 203n and 203p between PNP transistors QP12321 and QP22322, and between NPN transistors QN12311 and QN22312, respectively. As such, a single trigger device (e.g., an NMOS device, not shown) is coupled to each P-well 306 of each SCR finger 202 via the low-ohmic connectors 203p (see also, FIG. 5). That is, a trigger current is injected into each P+ trigger tap 3221 and 3222 in the P-wells 3061 and 3062 via the interspersed connectors 203n and 203p. It is noted that in the configuration as shown in FIG. 2, a ESD overvoltage condition causes the trigger device (not shown) to provide a positive trigger current at the trigger gate 205 and as such to the base of all NPN transistors QN 231 which turns on the NPN transistor QN 231. Subsequently, the PNP transistors QP 232 of each SCR finger 202 turn on. Accordingly, only the first trigger gate G1 of the SCR finger 202 is used for triggering. As such, the N+ trigger taps 320 (i.e., second SCR gates G2) are not used for injecting the initial trigger current for triggering the SCR fingers 202. However, the low-ohmic connections 203n between the N+ trigger taps 320 closely link the base regions of the PNP transistors QP1 together. As such the connections 203n and the N+ trigger taps 320 promote propagating the triggering to all of the SCR fingers 202. This is similar to the injection of the initial trigger current at the first trigger gate G1205. The current flow in all the SCR fingers 2021 and 2022 is increased, thereby providing quicker turn-on time for the entire multi-fingered SCR device 201.

In a second embodiment, the trigger gate G2207 is utilized. For example, a PMOS device (not shown) is coupled to the N+ trigger taps 320 of each SCR finger 202. It is noted that in this second embodiment, a negative current is provided from the trigger device the trigger gate G2207. This trigger current causes the PNP transistors QP 232 to turn on, which subsequently turns on the NPN transistors QN 231 of each SCR finger 202. When the trigger gate G2207 is utilized, the trigger current is alternately coupled to the N+ trigger taps 320, instead of the P+ trigger taps 322 for the trigger gate G1205. Accordingly, only the second gate G2207 of the SCR finger 202 is used for triggering. As such, the N+ trigger taps 322 (i.e., the first SCR gates G1) are not used for injecting the initial trigger current for triggering the SCR fingers 202. However, the low-ohmic connections 203p between the P+ trigger taps 322 closely link the base regions of the NPN transistors QN together. As such the connections 203p and the P+ trigger taps 322 promote propagating the triggering to all of the SCR fingers 202. This is similar as the injection of the initial trigger current at trigger gate G2207. The current flow in all the SCR fingers 2021 and 2022 is increased thereby providing quicker turn-on time for the entire multi-fingered SCR device 201.

The inventive embodiment differs from the prior art of FIG. 1, since there is a direct coupling of the triggering voltage to the bases of, illustratively, each NPN transistor 231, for example, transistors QN1 and QN22311 and 2312. Additionally, the inventive embodiment provides direct coupling of the PNP transistors of each SCR finger 202 (e.g., QP1 and QP22321 and 2322). In this manner, the inventive embodiment differs over the prior art because the direct coupling of the P and N well regions 306 and 308 between each SCR finger 202 ensures that if the potential in one well rises (i.e., the P-well 306) or falls (e.g., the N-well 308) from triggering a first SCR finger (e.g., first SCR finger 2021), then the other SCR fingers 202n will also trigger. As such, the SCR fingers 202 may carry large ESD current without any significant voltage differences, which could lead to non-uniform current distribution and premature failure.

It is further noted that the N-ISO layer 404 is optionally provided to isolate the P-wells 306 from the P-substrate 302. Isolating the P-wells 306 from the P-substrate 302 is beneficial because the P-wells 306 may be tied to the same voltage potentials via the connections 203, while being different from the substrate potential normally tied to ground. It is also noted that it is beneficial to use only one trigger device to ensure a well-defined trigger point.

Although various embodiments that incorporate the teachings of the present invention have been shown and described in detail herein, those skilled in the art can readily devise many other varied embodiments that still incorporate these teachings.

INVENTORS:

Russ, Christian C.

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ASSIGNMENT RECORDS    Assignment records on the USPTO
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Oct 10 2001Sarnoff Corporation(assignment on the face of the patent)
Oct 10 2001RUSS, CHRISTIAN C Sarnoff CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0122540569 pdf
Apr 17 2007Sarnoff CorporationSarnoff EuropeASSIGNMENT OF UNDIVIDED ONE-HALF RIGHT, TITLE AND INTEREST0192040304 pdf
Jun 23 2009Sarnoff CorporationSarnoff Europe BVBAASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0229380643 pdf
Jul 08 2009Sarnoff EuropeSofics BVBACHANGE OF NAME SEE DOCUMENT FOR DETAILS 0229940903 pdf
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