Patent
   D341418
Priority
Feb 22 1991
Filed
Aug 21 1991
Issued
Nov 16 1993
Expiry
Nov 16 2007
Assg.orig
Entity
unknown
22
7
n/a
The ornamental design for supply nozzle for applying liquid resist to a semiconductor wafer, as shown and described.

FIG. 1 is a top, front and left side perspective view of supply nozzle for applying liquid resist to a semiconductor wafer showing my new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a front elevational view thereof, the rear being a mirror image;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a cross-sectional view thereof taken on line 7--7 in FIG. 3; and,

FIG. 8 is a cross-sectional view thereof taken on line 8--8 in FIG. 2.

Akimoto, Masami

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Executed onAssignorAssigneeConveyanceFrameReelDoc
Aug 21 1991Tokyo Electron Limited(assignment on the face of the patent)
Aug 21 1991Tokyo Electron Kyushu Limited(assignment on the face of the patent)
Aug 29 1991AKIMOTO, MASAMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0066530821 pdf
Aug 29 1991AKIMOTO, MASAMITokyo Electron Kyushu LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0066530821 pdf
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