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I claim the ornamental design for a fin for use in a semiconductor wafer heat processing apparatus, as shown and described. |
FIG. 1 a perspective view of a fin for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a right side view thereof;
FIG. 4 a top plan view thereof;
FIG. 5 a bottom plan view therof;
FIG. 6 a cross-sectional view taken along line VI-VI in FIG. 2; and,
FIG. 7 a cross-sectional view taken alone line VII-VII in FIG. 4.
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Feb 12 1998 | Tokyo Electron Limited | (assignment on the face of the patent) | / | |||
Mar 17 1998 | KIMURA, NORIFUMI | Tokyo Electron Limited | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009126 | /0789 |
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