Patent
   D600220
Priority
Mar 28 2008
Filed
Sep 26 2008
Issued
Sep 15 2009
Expiry
Sep 15 2023
Assg.orig
Entity
unknown
8
11
n/a
The ornamental design for a heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.

FIG. 1 is a perspective view;

FIG. 2 is a front view;

FIG. 3 is a rear view;

FIG. 4 is a right side view the left side being a mirror image thereof;

FIG. 5 is a plan view;

FIG. 6 is a bottom view; and,

FIG. 7 is a sectional view thereof along line 77 of FIG. 2.

Sato, Izumi

Patent Priority Assignee Title
D615937, Mar 06 2009 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
D616392, Mar 06 2009 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
D616393, Mar 06 2009 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
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D918848, Jul 18 2019 KOKUSAI ELECTRIC CORPORATION Retainer of ceiling heater for semiconductor fabrication apparatus
Patent Priority Assignee Title
5567986, Jun 04 1993 Diamond Electric Mfg. Co., Ltd. Heat sink
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Sep 26 2008Tokyo Electron Limited(assignment on the face of the patent)
Nov 13 2008SATO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0220040045 pdf
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