Patent
   D404374
Priority
Aug 20 1997
Filed
Feb 12 1998
Issued
Jan 19 1999
Expiry
Jan 19 2013
Assg.orig
Entity
unknown
5
4
n/a
I claim the ornamental design for a fin for use in a semiconductor wafer heat processing apparatus, as shown and described.

FIG. 1 a perspective view of fin for use in a semiconductor wafer heat processing apparatus;

FIG. 2 a right side view thereof;

FIG. 3 a front elevational view thereof;

FIG. 4 a top plan view thereof;

FIG. 5 a bottom plan view thereof;

FIG. 6 a cross-sectional view taken along line VI--VI in FIG. 3;

FIG. 7 a cross-sectional view taken along line VII--VII in FIG. 3; and,

FIG. 8 a cross-sectional view taken along line VIII--VIII in FIG. 3.

Kimura, Norifumi

Patent Priority Assignee Title
D600220, Mar 28 2008 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
D600660, Mar 28 2008 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
D615937, Mar 06 2009 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
D672451, Jun 28 2010 Glen Dimplex Americas Limited Fin
D924823, Jul 19 2018 KOKUSAI ELECTRIC CORPORATION Adiabatic plate for substrate processing apparatus
Patent Priority Assignee Title
4857689, Mar 23 1988 Axcelis Technologies, Inc Rapid thermal furnace for semiconductor processing
5314574, Jun 26 1992 Tokyo Electron Kabushiki Kaisha Surface treatment method and apparatus
5320218, Apr 07 1992 MURATEC AUTOMATION CO , LTD Closed container to be used in a clean room
5752796, Jan 24 1996 Brooks Automation, Inc Vacuum integrated SMIF system
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Feb 12 1998Tokyo Electron Limited(assignment on the face of the patent)
Mar 17 1998KIMURA, NORIFUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0091310664 pdf
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