|
I claim the ornamental design for a fin for use in a semiconductor wafer heat processing apparatus, as shown and described. |
FIG. 1 a perspective view of fin for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a right side view thereof;
FIG. 3 a front elevational view thereof;
FIG. 4 a top plan view thereof;
FIG. 5 a bottom plan view thereof;
FIG. 6 a cross-sectional view taken along line VI--VI in FIG. 3;
FIG. 7 a cross-sectional view taken along line VII--VII in FIG. 3; and,
FIG. 8 a cross-sectional view taken along line VIII--VIII in FIG. 3.
Patent | Priority | Assignee | Title |
D600220, | Mar 28 2008 | Tokyo Electron Limited | Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers |
D600660, | Mar 28 2008 | Tokyo Electron Limited | Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers |
D615937, | Mar 06 2009 | Tokyo Electron Limited | Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers |
D672451, | Jun 28 2010 | Glen Dimplex Americas Limited | Fin |
D924823, | Jul 19 2018 | KOKUSAI ELECTRIC CORPORATION | Adiabatic plate for substrate processing apparatus |
Patent | Priority | Assignee | Title |
4857689, | Mar 23 1988 | Axcelis Technologies, Inc | Rapid thermal furnace for semiconductor processing |
5314574, | Jun 26 1992 | Tokyo Electron Kabushiki Kaisha | Surface treatment method and apparatus |
5320218, | Apr 07 1992 | MURATEC AUTOMATION CO , LTD | Closed container to be used in a clean room |
5752796, | Jan 24 1996 | Brooks Automation, Inc | Vacuum integrated SMIF system |
Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Feb 12 1998 | Tokyo Electron Limited | (assignment on the face of the patent) | / | |||
Mar 17 1998 | KIMURA, NORIFUMI | Tokyo Electron Limited | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009131 | /0664 |
Date | Maintenance Fee Events |
Date | Maintenance Schedule |