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Patent
D924823
Priority
Jul 19 2018
Filed
Dec 04 2018
Issued
Jul 13 2021
Expiry
Jul 13 2036
Assg.orig
Entity
unknown
13
30
n/a
We claim the ornamental design for an adiabatic plate for substrate processing apparatus, as shown and described.
FIG. 1 is a front, bottom and right side perspective view of an adiabatic plate for substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a top plan view thereof;
FIG. 5 is a bottom plan view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a right side elevational view thereof; and,
FIG. 8 is a cross-sectional view take along line 8 -8 in FIG. 2 .
Saiki, Koji , Tsuri, Makoto
Patent
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KOKUSAI ELECTRIC CORPORATION
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Date
Maintenance Fee Events
n/a
Date
Maintenance Schedule
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