Patent
   D616393
Priority
Mar 06 2009
Filed
Sep 02 2009
Issued
May 25 2010
Expiry
May 25 2024
Assg.orig
Entity
unknown
5
8
n/a
The ornamental design for a heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.

FIG. 1 is front perspective view of a heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a front perspective view of a heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers in use.

The broken lines are shown for illustrative purposes only and form no part of the claimed design.

Sato, Izumi

Patent Priority Assignee Title
D654883, Oct 21 2010 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
D654884, Oct 21 2010 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
D655257, Oct 21 2010 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
D655259, Oct 21 2010 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
D798250, Dec 01 2015 NuFlare Technology, Inc. Heater
Patent Priority Assignee Title
6056123, Dec 10 1997 Novus Corporation Semiconductor wafer carrier having the same composition as the wafers
6062853, Feb 29 1996 Tokyo Electron Limited Heat-treating boat for semiconductor wafers
6110285, Apr 15 1997 COORSTEK KK Vertical wafer boat
7033168, Jan 24 2005 GLOBALWAFERS CO , LTD Semiconductor wafer boat for a vertical furnace
7484958, Jul 16 2003 SHIN-ETSU HANDOTAI CO , LTD Vertical boat for heat treatment and method for producing the same
20020113027,
D404372, Aug 20 1997 Tokyo Electron Limited Ring for use in a semiconductor wafer heat processing apparatus
D600220, Mar 28 2008 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
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Aug 21 2009SATO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0231810429 pdf
Sep 02 2009Tokyo Electron Limited(assignment on the face of the patent)
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