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Patent
D571740
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Priority
Aug 12 2005
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Filed
Nov 14 2005
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Issued
Jun 24 2008
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Expiry
Jun 24 2022
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Assg.orig
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Entity
unknown
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2
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15
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n/a
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The ornamental design for a semiconductor wafer delivery apparatus, as shown and described.
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FIG. 1 is a front elevational view of a semiconductor wafer delivery apparatus, showing my design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a cross-sectional view taken along line 7—7 in FIG. 1;
FIG. 8 is a top and right front perspective view thereof; and,
FIG. 9 is a top and right rear perspective view thereof.
The broken line showing and the indicia shown in the Figures are shown for illustrative purposes only and form no part of the claimed design.
Hosaka, Hiroki
Patent |
Priority |
Assignee |
Title |
5636960, |
Jul 29 1992 |
Tokyo Electron Limited |
Apparatus for detecting and aligning a substrate |
5740059, |
May 18 1995 |
JAPAN DISPLAY CENTRAL INC |
Method of transporting substrates and apparatus for transporting substrates |
5772386, |
Mar 28 1995 |
Brooks Automation GmbH |
Loading and unloading station for semiconductor processing installations |
5826129, |
Jun 30 1994 |
Tokyo Electron Limited |
Substrate processing system |
6132160, |
Jun 27 1997 |
Tokyo Electron Limited |
Substrate transferring apparatus |
6234738, |
Apr 24 1998 |
ASYST JAPAN INC |
Thin substrate transferring apparatus |
6811370, |
Mar 25 1999 |
n&k Technology, Inc. |
Wafer handling robot having X-Y stage for wafer handling and positioning |
6846149, |
Apr 02 1999 |
AVIZA TECHNOLOGY, INC |
Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system |
20020044860, |
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20020182040, |
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20020197138, |
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20030133776, |
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20040265100, |
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20050220581, |
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20070031222, |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a