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Patent
   D671901
Priority
Apr 13 2011
Filed
Apr 13 2011
Issued
Dec 04 2012
Expiry
Dec 04 2026
Inventors
Severson, …
Assg.orig
Novellus S…
Assg.curr
Novellus S…
Entity
unknown
Referenced by
3
References
22
Maint.:
n/a
We claim the ornamental design for a pedestal cover, as shown and described.

FIG. 1 is a perspective view of a pedestal cover illustrating a platen facing surface having two retaining posts and one guiding post in our new design;

FIG. 2 is a perspective view thereof illustrating a substrate facing surface having six Minimum Contact Area (MCA) supports;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a front view thereof, the bottom view being an identical image thereof; and,

FIG. 6 is a right view thereof, the left view being an identical image thereof.
INVENTORS:

Severson, Brian, Angelov, Ivelin, Solomon, Natan

THIS PATENT IS REFERENCED BY THESE PATENTS:
Patent Priority Assignee Title
D748056, Jun 06 2014 KOKUSAI ELECTRIC CORPORATION Adapter plate
D748578, Jun 06 2014 KOKUSAI ELECTRIC CORPORATION Adapter plate
D910400, Sep 04 2019 YONGKANG MOYI TOOLS CO , LTD Grinder dust shroud
THIS PATENT REFERENCES THESE PATENTS:
Patent Priority Assignee Title
5906684, Sep 16 1993 Hitachi, Ltd. Method of holding substrate and substrate holding system
5976309, Dec 17 1996 Bell Semiconductor, LLC Electrode assembly for plasma reactor
5989349, Jun 24 1997 Applied Materials, Inc. Diagnostic pedestal assembly for a semiconductor wafer processing system
6214184, May 14 1997 Taiwan Semiconductor Manufacturing Company, Ltd Insulated wafer pedestal
6307184, Jul 12 1999 FSI International, Inc Thermal processing chamber for heating and cooling wafer-like objects
6544340, Dec 08 2000 Applied Materials, Inc. Heater with detachable ceramic top plate
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7589950, Oct 13 2006 Applied Materials, Inc Detachable electrostatic chuck having sealing assembly
8033771, Dec 11 2008 Novellus Systems, Inc. Minimum contact area wafer clamping with gas flow for rapid wafer cooling
8088225, Feb 13 2004 ASM IP HOLDING B V Substrate support system for reduced autodoping and backside deposition
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ASSIGNMENT RECORDS    Assignment records on the USPTO
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Apr 11 2011ANGELOV, IVELINNovellus Systems, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0261380381 pdf
Apr 11 2011SEVERSON, BRIANNovellus Systems, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0261380381 pdf
Apr 11 2011SOLOMON, NATANNovellus Systems, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0261380381 pdf
Apr 13 2011Novellus Systems, Inc.(assignment on the face of the patent)
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