Patent
   D707408
Priority
Apr 20 2011
Filed
Oct 20 2011
Issued
Jun 17 2014
Expiry
Jun 17 2028
Assg.orig
Entity
unknown
15
34
n/a
The ornamental design for a roller for semiconductor wafer cleaning, as shown and described.

FIG. 1 is a front elevation view of a roller for semiconductor wafer cleaning showing my new design;

FIG. 2 is a rear elevation view thereof;

FIG. 3 is a top plan view thereof; the bottom view being an identical,

FIG. 4 is a right side view thereof; the left side view being an identical; and,

FIG. 5 is a cross section view taken along the line of 5-5 of FIG. 4 thereof.

Ishibashi, Tomoatsu

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Patent Priority Assignee Title
5401231, Aug 23 1993 Texturing roller
5414914, Sep 20 1985 Uni-Charm Corporation Process for producing apertured nonwoven fabric
5675856, Jun 14 1996 SOLID STATE EQUIPMENT HOLDINGS LLC; SOLID STATE EQUIPMENT LLC Wafer scrubbing device
5745945, Jun 28 1996 International Business Machines Corporation Brush conditioner for a semiconductor cleaning brush
5966765, Oct 21 1996 Ebara Corporation Cleaning apparatus
6004402, Jan 09 1997 Xomed Surgical Products, Inc. Method of cleaning silicon material with a sponge
6027573, Oct 06 1994 XOMED SURIGICAL PRODUCTS, INC Industrial cleaning sponge apparatus and method for extracting residue from a sponge material
6041465, Dec 19 1997 Speedfam Co., Ltd. Cleaning apparatus
6080092, Oct 06 1994 Xomed Surgical Products, Inc. Industrial cleaning sponge
6182323, Nov 16 1998 Illinois Tool Works Inc Ultraclean surface treatment device
6202658, Nov 11 1998 Applied Materials, Inc.; Applied Materials, Inc Method and apparatus for cleaning the edge of a thin disc
6235125, Oct 06 1994 Xomed Surgical Products, Inc. Industrial cleaning sponge
6247197, Jul 09 1998 Lam Research Corporation Brush interflow distributor
6308369, Feb 04 1998 Silikinetic Technology, Inc. Wafer cleaning system
6345630, Nov 11 1998 Applied Materials, Inc. Method and apparatus for cleaning the edge of a thin disc
6405399, Jun 25 1999 Lam Research Corporation Method and system of cleaning a wafer after chemical mechanical polishing or plasma processing
6464796, Jul 09 1998 Lam Research Corporation Methods for applying fluid through a brush interflow distributor
6502273, Nov 08 1996 AION CO , LTD Cleaning sponge roller
6543084, Dec 03 1999 Lam Research Corporation Wafer scrubbing brush core
6557202, Dec 03 1999 Lam Research Corporation Wafer scrubbing brush core having an internal motor and method of making the same
6616516, Dec 13 2001 Lam Research Corporation Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates
6684447, Nov 08 1996 AION CO , LTD Cleaning sponge roller
6904637, Oct 03 2001 Applied Materials, Inc.; Applied Materials, Inc Scrubber with sonic nozzle
7735177, Feb 10 2006 Lam Research Corporation Brush core assembly
7955693, Apr 20 2001 Hydrofera, LLC Foam composition roller brush with embedded mandrel
8372210, Oct 27 2003 Applied Materials, Inc. Post CMP scrubbing of substrates
8496758, Jan 17 2006 Fujitsu Semiconductor Limited Cleaning apparatus and cleaning method for wafer
20020100132,
20020121289,
20050109371,
D456667, Jan 12 2001 WORLD KITCHEN, LLC Handle sleeve
D482566, May 21 2001 BLUE RHINO GLOBAL SOURCING, INC Hand grip for barbecue tool
D622920, May 02 2007 MORGAN STANLEY SENIOR FUNDING, INC Cleaning sponge roller
D682497, Dec 21 2010 MORGAN STANLEY SENIOR FUNDING, INC Substrate cleaning brush
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Oct 20 2011Ebara Corporation(assignment on the face of the patent)
Oct 21 2011ISHIBASHI, TOMOATSUEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0274650963 pdf
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