FIG. 1 is a front view of a roller shaft for substrate cleaning showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a plane view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is an enlarged front view thereof;
FIG. 7 is an enlarged perspective view thereof;
FIG. 8 is another front view, showing the cross-sectional cut line thereof;
FIG. 9 is a cross-section view taken along the line 9-9 of FIG. 1 thereof;
FIG. 10 is an enlarged plane view of portion 10 of FIG. 3 thereof;
FIG. 11 is an enlarged bottom view of portion 11 of FIG. 4 thereof;
FIG. 12 is an enlarged right side view of portion 12 of FIG. 5 thereof; and,
FIG. 13 is a cross-section view taken along the line 13-13 of FIG. 8 of thereof.
The internal material revealed by the cross-sectional slice, illustrated in FIGS. 9 and 13, forms no part of the claimed design.
The particular cross-hatching patterns in FIGS. 9 and 13 do not represent any particular materials.
The broken lines in the drawings illustrate portions of the roller shaft for substrate cleaning which form no part of the claimed design.
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