Patent
   D710062
Priority
Jun 09 2011
Filed
Dec 08 2011
Issued
Jul 29 2014
Expiry
Jul 29 2028
Assg.orig
Entity
unknown
9
23
n/a
We claim the ornamental design for a roller shaft for semiconductor cleaning, as shown and described.

FIG. 1 is a front elevational view of a roller shaft for semiconductor cleaning showing our new design;

FIG. 2 is a rear elevation view thereof;

FIG. 3 is a top plan view thereof, the bottom view being a mirror image thereof;

FIG. 4 is a right side view thereof, the left side view being a mirror image thereof;

FIG. 5 is a cross sectional view taken along the line 5-5 of FIG. 1;

FIG. 6 is a front perspective view, at an enlarged scale;

FIG. 7 is a front elevational view thereof, at an enlarged scale;

FIG. 8 is an enlarged view of the area 8 seen in FIG. 3; and,

FIG. 9 is an enlarged view of the area 9 seen in FIG. 4.

The broken line showing depicts environmental subject matter only and forms no part of the claimed design.

Tanaka, Hideaki, Ishibashi, Tomoatsu, Oikawa, Fumitoshi, Hombo, Teruaki

Patent Priority Assignee Title
D728177, Feb 01 2013 Ebara Corporation Roller shaft for substrate cleaning
D735427, Feb 01 2013 Ebara Corporation Roller shaft for substrate cleaning
D769108, Aug 06 2014 Eberl Iron Works, Inc.; EBERL IRON WORKS, INC Rooftop support base
D959374, Nov 13 2020 ELECTRICAL GRID MONITORING LTD BNC cap assembly
D961516, Jun 26 2020 Omron Corporation Insulation monitoring device
ER1028,
ER1419,
ER1931,
ER69,
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 07 2011ISHIBASHI, TOMOATSUEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0276780270 pdf
Dec 07 2011OIKAWA, FUMITOSHIEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0276780270 pdf
Dec 07 2011TANAKA, HIDEAKIEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0276780270 pdf
Dec 07 2011HOMBO, TERUAKIEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0276780270 pdf
Dec 08 2011Ebara Corporation(assignment on the face of the patent)
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