Patent
   D728177
Priority
Feb 01 2013
Filed
Jul 18 2013
Issued
Apr 28 2015
Expiry
Apr 28 2029
Assg.orig
Entity
unknown
13
37
n/a
The ornamental design for a roller shaft for substrate cleaning, as shown and described.

FIG. 1 is a front view of a roller shaft for substrate cleaning showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a plane view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is an enlarged front view thereof;

FIG. 6 is an enlarged perspective view thereof;

FIG. 7 is another front view, showing the cross-sectional cut line thereof;

FIG. 8 is a cross-section view taken along the line 8-8 of FIG. 1 thereof;

FIG. 9 is an enlarged plane view of portion 9 of FIG. 3 thereof;

FIG. 10 is an enlarged right side view of portion 10 of FIG. 4 thereof; and,

FIG. 11 is a cross-section view taken along the line 11-11 of FIG. 7 thereof.

The internal material revealed by the cross-sectional slice, illustrated in FIGS. 8 and 11, forms no part of the claimed design.

The particular cross-hatching patterns in FIGS. 8 and 11 do not represent any particular materials.

The broken lines in the drawings illustrate portions of the roller shaft for substrate cleaning. the broken lines form no part of the claimed design.

Kojima, Hiroshi, Ishibashi, Tomoatsu

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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jul 04 2013ISHIBASHI, TOMOATSUEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0309710611 pdf
Jul 04 2013KOJIMA, HIROSHIEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0309710611 pdf
Jul 18 2013Ebara Corporation(assignment on the face of the patent)
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