FIG. 1 is a front view of a roller shaft for substrate cleaning showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a plane view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is an enlarged front view thereof;
FIG. 6 is an enlarged perspective view thereof;
FIG. 7 is another front view, showing the cross-sectional cut line thereof;
FIG. 8 is a cross-section view taken along the line 8-8 of FIG. 1 thereof;
FIG. 9 is an enlarged plane view of portion 9 of FIG. 3 thereof;
FIG. 10 is an enlarged right side view of portion 10 of FIG. 4 thereof; and,
FIG. 11 is a cross-section view taken along the line 11-11 of FIG. 7 thereof.
The internal material revealed by the cross-sectional slice, illustrated in FIGS. 8 and 11, forms no part of the claimed design.
The particular cross-hatching patterns in FIGS. 8 and 11 do not represent any particular materials.
The broken lines in the drawings illustrate portions of the roller shaft for substrate cleaning. the broken lines form no part of the claimed design.
Patent |
Priority |
Assignee |
Title |
3426365, |
|
|
|
5745945, |
Jun 28 1996 |
International Business Machines Corporation |
Brush conditioner for a semiconductor cleaning brush |
6240588, |
Dec 03 1999 |
Lam Research Corporation |
Wafer scrubbing brush core |
6254167, |
Nov 11 1997 |
Mitsuba Corporation |
Wiper device for vehicle |
6308369, |
Feb 04 1998 |
Silikinetic Technology, Inc. |
Wafer cleaning system |
6330729, |
Apr 06 1998 |
Micron Technology, Inc. |
Brush alignment platform |
6371421, |
Aug 23 1997 |
Samhongsa Co., Ltd. |
Device for controlling the height of a swivel chair |
6467120, |
Sep 08 1999 |
International Business Machines Corporation |
Wafer cleaning brush profile modification |
6502273, |
Nov 08 1996 |
AION CO , LTD |
Cleaning sponge roller |
6523210, |
Apr 05 2000 |
|
Surface charge controlling apparatus for wafer cleaning |
6598255, |
May 22 1998 |
Aion Co., Ltd. |
Cleaning rotary brush |
6802099, |
Sep 28 2001 |
Ebara Corporation |
Cleaning member and cylindrical cleaning element |
7735177, |
Feb 10 2006 |
Lam Research Corporation |
Brush core assembly |
7955693, |
Apr 20 2001 |
Hydrofera, LLC |
Foam composition roller brush with embedded mandrel |
8092730, |
Dec 06 2005 |
MORGAN STANLEY SENIOR FUNDING, INC |
Molded rotatable base for a porous pad |
8372210, |
Oct 27 2003 |
Applied Materials, Inc. |
Post CMP scrubbing of substrates |
8496758, |
Jan 17 2006 |
Fujitsu Semiconductor Limited |
Cleaning apparatus and cleaning method for wafer |
8533895, |
Aug 16 2006 |
MORGAN STANLEY SENIOR FUNDING, INC |
Methods and materials for making a monolithic porous pad cast onto a rotatable base |
8826778, |
Jul 15 2011 |
|
Apparatus and method for tightening or loosening toilet seat |
20090026671, |
|
|
|
20130312790, |
|
|
|
20140295716, |
|
|
|
241074, |
|
|
|
D269852, |
Mar 21 1980 |
Perma-Tite AB |
Lock washer |
D293812, |
Jul 31 1985 |
Holdren Brothers, Inc. |
Tank cleaning spray head |
D357030, |
Dec 02 1993 |
Flowserve Management Company |
Bushing |
D447755, |
Jul 19 2000 |
|
Sewing machine adapter |
D468190, |
Jan 14 2002 |
|
Spool |
D481498, |
Dec 06 2001 |
|
Dryer tube filter |
D508750, |
Jun 24 2004 |
|
Donut shaped drop opal lens trim |
D558048, |
Oct 12 2005 |
|
Spool for bags |
D622920, |
May 02 2007 |
MORGAN STANLEY SENIOR FUNDING, INC |
Cleaning sponge roller |
D658978, |
Aug 04 2011 |
APEXOEM, INC |
Detent washer |
D707408, |
Apr 20 2011 |
Ebara Corporation |
Roller for semiconductor wafer cleaning |
D710062, |
Jun 09 2011 |
Ebara Corporation |
Roller shaft for semiconductor cleaning |
D710191, |
Dec 20 2012 |
Kabushiki Kaisha Yamazaki Active |
Washer |
D718340, |
Mar 21 2014 |
TIKO PRODUCT DESIGN LTD |
Self-powered robotic lawn mower |