Patent
   D884855
Priority
Oct 30 2019
Filed
Oct 30 2019
Issued
May 19 2020
Expiry
May 19 2035
Assg.orig
Entity
unknown
2
21
n/a
The ornamental design for a heater pedestal, as shown and described.

FIG. 1 is an isometric top view of a heater pedestal showing our new design;

FIG. 2 is an isometric bottom view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a side elevational view thereof along lines 5-5 of FIG. 1, the opposite side elevational view being identical;

FIG. 6 is a side cross-sectional view thereof along lines 6-6 of FIG. 4;

FIG. 7 is a detail view thereof shown in FIG. 4;

FIG. 8 is a partial sectional view thereof along lines 8-8 of FIG. 4;

FIG. 9 is a side cross-sectional view thereof along lines 9-9 of FIG. 4;

FIG. 10 is a detail view of the sectional view thereof shown in FIG. 6;

FIG. 11 is a detail view of the sectional view thereof shown in FIG. 6;

FIG. 12 is a detail view of the sectional view thereof shown in FIG. 6;

FIG. 13 is a detail view of the sectional view thereof shown in FIG. 6;

FIG. 14 is a detail view of the sectional view thereof shown in FIG. 9;

FIG. 15 is a partial sectional view thereof along lines 15-15 of FIG. 4; and,

FIG. 16 is a detail view of the sectional view thereof shown in FIG. 9.

Apurva, Naman, Ramakrishna, Mahesh

Patent Priority Assignee Title
ER1522,
ER8108,
Patent Priority Assignee Title
6278089, Nov 02 1999 Applied Materials, Inc Heater for use in substrate processing
6544340, Dec 08 2000 Applied Materials, Inc. Heater with detachable ceramic top plate
6907924, Jan 02 1997 VEECO ROCHESTER INC Thermally conductive chuck for vacuum processor
7705275, Aug 17 2005 SORAA INC Substrate support having brazed plates and resistance heater
9673077, Jul 03 2012 Watlow Electric Manufacturing Company Pedestal construction with low coefficient of thermal expansion top
20060096972,
20070151517,
20120164829,
20140014642,
20140251214,
20150108203,
20170204514,
20180251893,
20190276366,
20200035520,
20200098651,
D583394, Dec 15 2006 Tokyo Electron Limited Cover for a heater stage of a plasma processing apparatus
D614593, Jul 21 2008 ASM KOREA LTD Substrate support for a semiconductor deposition apparatus
D716742, Sep 13 2013 ASM IP Holding B.V. Substrate supporter for semiconductor deposition apparatus
D807481, Apr 08 2016 Applied Materials, Inc Patterned heater pedestal
D862539, Dec 04 2017 LIQUA-TECH CORPORATION Register gear adapter plate
///
Executed onAssignorAssigneeConveyanceFrameReelDoc
Oct 30 2019Applied Materials, Inc.(assignment on the face of the patent)
Oct 31 2019RAMAKRISHNA, MAHESHApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0515300016 pdf
Jan 10 2020APURVA, NAMANApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0515300016 pdf
n/a
Date Maintenance Fee Events


n/a
Date Maintenance Schedule