A method of passivating organic devices positioned on a supporting substrate including the steps of overcoating the organic device with a low temperature deposited film of dielectric material, and sealingly engaging an inorganic layer over the dielectric material so as to substantially hermetically seal the organic device. In a typical embodiment, the dielectric layer is SiO2 and the inorganic layer is a metal can.

Patent
   5771562
Priority
May 02 1995
Filed
May 02 1995
Issued
Jun 30 1998
Expiry
Jun 30 2015
Assg.orig
Entity
Large
343
9
all paid
1. A method of hermetically sealing organic light emitting devices comprising the steps of:
providing an organic light emitting device on a supporting substrate;
overcoating the organic light emitting device with a film of inorganic dielectric material deposited at a temperature less than approximately 300°C
sealingly engaging an inorganic layer over the dielectric material so as to substantially hermetically seal the organic light emitting device.
12. A method of hermetically sealing organic light emitting devices comprising the steps of:
providing an organic light emitting device on a supporting substrate;
overcoating the organic light emitting device with an inorganic dielectric material deposited at a temperature less than approximately 300° C.;
providing a metal can; and
sealing the metal can over the dielectric coating so as to substantially hermetically seal the organic light emitting device.
2. A method of hermetically sealing organic light emitting devices as claimed in claim 1 wherein the step of overcoating the organic light emitting device with the dielectric material includes evaporating the dielectric material in a low pressure oxygen atmosphere to produce the film on the organic light emitting device.
3. A method of hermetically sealing organic light emitting devices as claimed in claim 2 wherein the step of evaporating the dielectric material includes evaporating silicon monoxide in a low pressure oxygen atmosphere to produce a film of silicon dioxide on the organic light emitting device.
4. A method of hermetically sealing organic light emitting devices as claimed in claim 3 wherein the step of evaporating silicon oxide in a low pressure oxygen atmosphere to produce a film of silicon dioxide indudes evaporating the silicon oxide in an oxygen atmosphere at approximately 10-4 Torr.
5. A method of hermetically sealing organic light emitting devices as claimed in claim 1 wherein the step of sealingly engaging the inorganic layer over the dielectric material includes the steps of providing a metal can and sealingly engaging the metal can over the film of dielectric material so as to substantially hermetically seal the organic light emitting device.
6. A method of hermetically sealing organic light emitting devices as claimed in claim 5 wherein the step of sealingly engaging the metal can over the film of dielectric material includes affixing the metal can over the film of dielectric material while retaining the organic light emitting device in an atmosphere at approximately 10-4 Torr.
7. A method of hermetically sealing organic light emitting devices as claimed in claim 5 wherein the step of sealingly engaging the metal can includes utilizing a low temperature solder seal.
8. A method of hermetically sealing organic light emitting devices as claimed in claim 7 wherein the step of sealingly engaging the metal can utilizing the low temperature solder seal includes utilizing indium based solder.
9. A method of hermetically sealing organic light emitting devices as claimed in claim 5 including in addition a step of depositing a layer of a gettering material prior to sealingly engaging the metal can over the film of dielectric material, so as to position the layer of gettering material inside the metal can.
10. A method of hermetically sealing organic light emitting devices as claimed in claim 9 wherein the step of sealingly engaging the metal can over the film of dielectric material includes utilizing an organic adhesive.
11. A method of hermetically sealing organic light emitting devices as claimed in claim 9 wherein the step of depositing the gettering material includes depositing a layer of low work function metal including one of lithium and magnesium.
13. A method of hermetically sealing organic light emitting devices as claimed in claim 12 wherein the step of overcoating the organic light emitting device with the dielectric material includes evaporating the dielectric material in a low pressure oxygen atmosphere to produce the film on the organic light emitting device.
14. A method of hermetically sealing organic light emitting devices as claimed in claim 13 wherein the step of evaporating the dielectric material includes evaporating silicon oxide in a low pressure oxygen atmosphere to produce a film of silicon dioxide on the organic light emitting device.
15. A method of hermetically sealing organic light emitting devices as claimed in claims 14 wherein the step of evaporating silicon oxide in a low pressure oxygen atmosphere to produce a film of silicon dioxide includes evaporating the silicon oxide in an oxygen atmosphere at approximately 10-4 Torr.

The present invention pertains to organic devices and more specifically to passivated organic devices and methods of passivation.

Organic devices, and especially organic light emitting diodes (LEDs) and the like, generally utilize a layer of reactive metal in the cathode to ensure efficient electron injecting electrodes and low operating voltages. However, the reactive metals are susceptible to oxygen and moisture, especially during operation, since oxidation of the metal limits the lifetime of the devices. A hermetic seal is normally required to achieve long term stability and longevity. Several types of hermetic seals are utilized, the most common of which are inorganic materials, such as metals and the like.

A further problem that occurs in the fabrication and passivation of organic devices is a result of the fact that the organic layers of the organic devices can not withstand very high temperatures (i.e. generally greater than approximately 300°C). In many instances, even approaching the critical temperatures of the organic layers, especially if the elevated temperatures are maintained for relatively long periods of time, can degrade the organic material and reduce the reliability and/or the longevity.

A recent process of hermetically sealing organic devices is to overcoat them with an inorganic material, such as a ceramic or metal, to achieve a hermetic seal. However, the organic devices are very susceptible to the high temperatures normally required in the deposition of ceramics and metals. Thus, the ceramic or metal material generally must be deposited by PECVD methods in order to meet the low temperature criteria. The major problem with this method of sealing is that during the PECVD deposition there is a strong possibility of radiation damage to the organic device.

Accordingly, it is highly desirable to devise a relatively inexpensive and convenient method of hermetically sealing organic devices.

It is a purpose of the present invention to provide a new and improved method of passivating organic devices.

It is a purpose of the present invention to provide a new and improved method of passivating organic devices at relatively low temperatures.

It is another purpose of the present invention to provide a new and improved method of passivating organic devices which is relatively convenient and inexpensive to perform.

The above problems and others are at least partially solved and the above purposes and others are realized in a method of passivating organic devices positioned on a supporting substrate including the steps of overcoating the organic device with a low temperature deposited film of dielectric material, and sealingly engaging an inorganic layer over the dielectric material so as to substantially hermetically seal the organic device.

In a typical embodiment, the dielectric layer is SiO2 and the inorganic layer is a metal can. Also, in some embodiments a getter material can be provided in the metal can to remove any resident oxygen or moisture and to eliminate small amounts that might leak in, thereby further increasing the longevity of the organic devices.

Referring to the drawings, wherein like characters indicate like parts throughout the various views:

FIG. 1 is a simplified cross-sectional view of an organic light emitting diode; and

FIG. 2 is a simplified cross-sectional view of an organic light emitting diode array illustrating a method of passivation in accordance with the present invention.

Referring specifically to FIG. 1, a substrate 10 is illustrated which is, in this specific embodiment, some optically clear material, such as glass, quartz, a transparent semiconductor material or the like, etc. A typical organic light emitting diode 12 (LED) is positioned on substrate 10, generally by fabricating LED 12 directly on substrate 10 in any of the various methods of fabricating organic LEDs.

In this specific example, LED 12 includes a thin film of transparent conductive material 14, such as indium-tinoxide (ITO) or the like, deposited on the upper surface of substrate 10. An organic electroluminescent layer 16 is deposited on the upper surface of conductive layer 14 by any convenient means. Organic electroluminescent layer 16 generally represents the active organic layers of LED 12 and may include from one to several sub-layers, as is understood by those skilled in the art. A metallic contact 18 is positioned on the upper surface of organic electroluminescent layer 16 to serve as the cathode of LED 12. Contact 18 includes at least a thin layer of a reactive, low work function metal which, as described above, is susceptible to oxygen and moisture content in the surrounding atmosphere and must, therefore, be passivated to provide reliability and a reasonable longevity.

A method of passivating one or more LEDs in accordance with the present invention is illustrated in FIG. 2. In FIG. 2 a plurality of LEDs is illustrated in the form of an organic LED array 20. As will be understood by those skilled in the art, a layer 22 of transparent conductive material, such as ITO, is positioned on the upper surface of a substrate 23, which substrate is also transparent and may be, for example, glass or the like. Layer 22 is patterned into rows and a plurality of LEDs are formed on the rows of layer 22. Upper metallic contacts 24 for each of the LEDs are connected into columns so that each of the LEDs in array 20 are individually addressable.

In a first step of this specific embodiment array 20 is overcoated or encapsulated with a low temperature deposited film 25 of dielectric material. A typical example of a low temperature deposited film of dielectric material is silicon dioxide (SiO2), which is deposited by evaporating silicon monoxide (SiO) in an oxygen (02) containing atmosphere at approximately 10-4 Torr. Generally, the thickness of film 25 depends upon the type of LEDs utilized and the thicknesses of the active layers. However, assuming that standard LEDs are fabricated, a layer having a thickness in the range of approximately 500 to 1500 angstroms is generally thick enough to perform the desired functions. Film 25 then provides some additional protection for the following steps.

A metal can 30, or similar impervious cap (e.g. metal foil, metallized polymer film such as metallized polyester, etc.), is then sealingly engaged over array 20 on film 25. In a preferred embodiment, a metal pattern (not shown) is applied to the upper surface of film 25 surrounding array 20 and metal can 30 is positioned over array 20 on the metal pattern, while the structure is still in the 10-4 Torr. vacuum of the film deposition step. Metal can 30 is then sealed over array 20, at 32, utilizing a low temperature solder seal. A typical low temperature solder that can be used for this purpose is indium based solder. In some specific applications, and if a solder with a sufficiently low melting temperature is used, it may be possible to simply seal metal can 30 directly to a surface of substrate 23. For purposes of this disclosure, it should be noted that indium solder with a melting point of 70°C-117° C. can be obtained.

If additional protection is required or desired, a film 34 of getter material can be formed inside of metal can 30, for example, as a lining of metal can 30 or as a layer of material on the upper surface of film 25. Generally, low work function metals, such as lithium (Li) or magnesium (Mg), are utilized as a gettering material to absorb trapped or resident gases within metal can 30 or small amounts that might leak into metal can 30 subsequent to sealing.

By incorporating gettering film 34 into metal can 30, small amounts of leakage are absorbed so that in some special applications it is possible to seal metal can 30 onto film 25 or the like with an organic adhesive. Generally, organic adhesives do not require elevated temperatures and, if metal can 30 is properly fitted to film 25, the thickness of the organic adhesive seal 32 is a minimum.

Thus, depending upon the application and the amount of protection required, various combinations of metal can 30, film 25 of dielectric material, gettering film 34 and different types of sealing material at seal 32 can be easily and conveniently incorporated into a fabrication process. It should also be noted that film 25 generally has a lower permeability than array 20 and metal can 30 is substantially impermeable, so that the overall structure has a better resistance to permeation than prior structures that are simply encapsulated with a layer of inorganic material. Also, because film 25 is deposited at low temperatures and metal can 30 is sealed at low temperatures, array 20 is not damaged, degraded, or otherwise compromised by the encapsulation operation or by thermal cycling of the finished product. Further, the present invention includes a more manufacturable process than prior art methods and devices.

While we have shown and described specific embodiments of the present invention, further modifications and improvements will occur to those skilled in the art. We desire it to be understood, therefore, that this invention is not limited to the particular forms shown and we intend in the appended claims to cover all modifications that do not depart from the spirit and scope of this invention.

Harvey, III, Thomas B., So, Franky

Patent Priority Assignee Title
10003047, May 09 2012 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and electronic device
10078868, Jan 31 2007 Experian Information Solutions, Inc. System and method for providing an aggregation tool
10121194, Oct 05 2006 Experian Information Solutions, Inc. System and method for generating a finance attribute from tradeline data
10189048, Dec 12 2013 Semiconductor Energy Laboratory Co., Ltd. Peeling method and peeling apparatus
10236331, Aug 18 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and display device
10242019, Dec 19 2014 Experian Information Solutions, Inc User behavior segmentation using latent topic detection
10262362, Feb 14 2014 Experian Information Solutions, Inc Automatic generation of code for attributes
10311466, Jan 31 2007 Experian Information Solutions, Inc. Systems and methods for providing a direct marketing campaign planning environment
10340319, Oct 16 2008 Semiconductor Energy Laboratory Co., Ltd. Organic light-emitting device having a color filter
10381599, May 09 2012 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and electronic device
10402901, Jan 31 2007 Experian Information Solutions, Inc. System and method for providing an aggregation tool
10418586, Jul 02 2009 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, lighting device, and electronic device
10431510, Oct 09 2017 Global Circuit Innovations, Inc. Hermetic lid seal printing method
10445152, Dec 19 2014 Experian Information Solutions, Inc Systems and methods for dynamic report generation based on automatic modeling of complex data structures
10529748, Aug 22 2001 Semiconductor Energy Laboratory Co., Ltd. Peeling method and method of manufacturing semiconductor device
10586279, Sep 22 2004 Experian Information Solutions, Inc. Automated analysis of data to generate prospect notifications based on trigger events
10586816, Jul 16 2001 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and peeling off method and method of manufacturing semiconductor device
10636692, Feb 20 2013 Semiconductor Energy Laboratory Co., Ltd. Peeling method, semiconductor device, and peeling apparatus
10650449, Jan 31 2007 Experian Information Solutions, Inc. System and method for providing an aggregation tool
10680277, Jun 07 2010 Sapurast Research LLC Rechargeable, high-density electrochemical device
10692105, Jan 31 2007 Experian Information Solutions, Inc. Systems and methods for providing a direct marketing campaign planning environment
10784465, May 20 2004 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device having white light emission
10891691, Jan 31 2007 Experian Information Solutions, Inc. System and method for providing an aggregation tool
10903453, May 09 2012 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and electronic device
10909617, Mar 24 2010 CONSUMERINFO.COM, INC. Indirect monitoring and reporting of a user's credit data
10950821, Jan 26 2007 Samsung Display Co., Ltd. Method of encapsulating an environmentally sensitive device
10963961, Oct 05 2006 Experian Information Solutions, Inc. System and method for generating a finance attribute from tradeline data
11010345, Dec 19 2014 Experian Information Solutions, Inc User behavior segmentation using latent topic detection
11063236, May 20 2004 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element and display device
11107158, Feb 14 2014 Experian Information Solutions, Inc. Automatic generation of code for attributes
11176570, Jan 31 2007 Experian Information Solutions, Inc. Systems and methods for providing a direct marketing campaign planning environment
11189676, Oct 16 2008 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device having fluorescent and phosphorescent materials
11296131, Aug 22 2001 Semiconductor Energy Laboratory Co., Ltd. Peeling method and method of manufacturing semiconductor device
11355382, Feb 20 2013 Semiconductor Energy Laboratory Co., Ltd. Peeling method, semiconductor device, and peeling apparatus
11373261, Sep 22 2004 Experian Information Solutions, Inc. Automated analysis of data to generate prospect notifications based on trigger events
11442298, Sep 06 2019 Fujitsu Optical Components Limited Optical modulation device and method for manufacturing optical modulation device
11443373, Jan 31 2007 Experian Information Solutions, Inc. System and method for providing an aggregation tool
11539088, Mar 09 2020 International Business Machines Corporation Ultra-thin microbattery packaging and handling
11562457, Sep 22 2004 Experian Information Solutions, Inc. Automated analysis of data to generate prospect notifications based on trigger events
11588137, Jun 05 2019 Semiconductor Energy Laboratory Co., Ltd. Functional panel, display device, input/output device, and data processing device
11621407, May 09 2012 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device having first to third supports
11631129, Oct 05 2006 Experian Information Solutions, Inc System and method for generating a finance attribute from tradeline data
11659758, Jul 05 2019 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Display unit, display module, and electronic device
11683952, May 20 2004 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element and display device
11803873, Jan 31 2007 Experian Information Solutions, Inc. Systems and methods for providing a direct marketing campaign planning environment
11839106, May 09 2012 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and electronic device
11844236, Jul 12 2019 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Functional panel, display device, input/output device, and data processing device
11847693, Feb 14 2014 Experian Information Solutions, Inc. Automatic generation of code for attributes
11861756, Sep 22 2004 Experian Information Solutions, Inc. Automated analysis of data to generate prospect notifications based on trigger events
11908005, Jan 31 2007 Experian Information Solutions, Inc. System and method for providing an aggregation tool
11925097, Jul 05 2019 Semiconductor Energy Laboratory Co., Ltd. Display unit, display module, and electronic device
11930668, Oct 16 2008 Semiconductor Energy Laboratory Co., Ltd. Flexible light-emitting device and EL module including transparent conductive film
11954731, Oct 05 2006 Experian Information Solutions, Inc. System and method for generating a finance attribute from tradeline data
11963430, Jul 05 2019 Semiconductor Energy Laboratory Co., Ltd. Display unit, display module, and electronic device
11997766, Oct 11 2019 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Functional panel, display device, input/output device, and data processing device
5952778, Mar 18 1997 Innolux Corporation Encapsulated organic light emitting device
6080031, Sep 02 1998 UNIVERSAL DISPLAY CORPORATION Methods of encapsulating electroluminescent apparatus
6104137, Jul 22 1997 Pioneer Electronic Corporation; Tohoku Pioneer Electronic Corporation Organic electroluminescent display device
6160346, May 28 1996 U S PHILIPS CORPORATION Organic electroluminescent device with housing
6198217, May 12 1997 JOLED INC Organic electroluminescent device having a protective covering comprising organic and inorganic layers
6198220, Jul 11 1997 ALLIGATOR HOLDINGS, INC Sealing structure for organic light emitting devices
6392824, Aug 18 1997 Carl Zeiss SMT AG Soldering process for optical materials to metal mountings, and mounted assemblies
6413645, Apr 20 2000 SAMSUNG DISPLAY CO , LTD Ultrabarrier substrates
6465953, Jun 12 2000 BOE TECHNOLOGY GROUP CO , LTD Plastic substrates with improved barrier properties for devices sensitive to water and/or oxygen, such as organic electroluminescent devices
6470594, Sep 21 2001 Global Oled Technology LLC Highly moisture-sensitive electronic device element and method for fabrication utilizing vent holes or gaps
6492026, Apr 20 2000 SAMSUNG DISPLAY CO , LTD Smoothing and barrier layers on high Tg substrates
6522067, Dec 16 1998 SAMSUNG DISPLAY CO , LTD Environmental barrier material for organic light emitting device and method of making
6537688, Dec 01 2000 UNIVERSAL DISPLAY CORPORATION Adhesive sealed organic optoelectronic structures
6548912, Oct 25 1999 SAMSUNG DISPLAY CO , LTD Semicoductor passivation using barrier coatings
6570325, Dec 16 1998 SAMSUNG DISPLAY CO , LTD Environmental barrier material for organic light emitting device and method of making
6573652, Oct 25 1999 SAMSUNG DISPLAY CO , LTD Encapsulated display devices
6576351, Feb 16 2001 UNIVERSAL DISPLAY CORPORATION Barrier region for optoelectronic devices
6590157, Sep 21 2001 Global Oled Technology LLC Sealing structure for highly moisture-sensitive electronic device element and method for fabrication
6594916, Sep 21 2001 Global Oled Technology LLC Highly moisture-sensitive electronic device element and method for fabrication utilizing vent holes or gaps
6605826, Aug 18 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and display device
6614057, Feb 07 2001 UNIVERSAL DISPLAY CORPORATION Sealed organic optoelectronic structures
6624568, Mar 28 2001 UNIVERSAL DISPLAY CORPORATION Multilayer barrier region containing moisture- and oxygen-absorbing material for optoelectronic devices
6635988, May 04 1999 Chisso Corporation Organic el device
6664137, Mar 29 2001 UNIVERSAL DISPLAY CORPORATION Methods and structures for reducing lateral diffusion through cooperative barrier layers
6664624, May 31 2001 Fujitsu-Quantum Devices Limited Semiconductor device and manufacturing method thereof
6664730, Jul 09 2001 UNIVERSAL DISPLAY CORPORATION Electrode structure of el device
6689492, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
6692326, Jun 16 2001 DAEWOO ELECTRONICS SERVICE CO , LTD Method of making organic electroluminescent display
6706316, May 08 2001 Global Oled Technology LLC Ultrasonically sealing the cover plate to provide a hermetic enclosure for OLED displays
6730560, Jan 31 2002 Matsushita Electric Industrial Co., Ltd. Method for fabricating semiconductor device
6784037, Nov 02 1998 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method therefor
6818291, Aug 17 2002 3M Innovative Properties Company Durable transparent EMI shielding film
6818479, Sep 21 2001 Global Oled Technology LLC Highly moisture-sensitive electronic device element and method for fabrication
6821553, Nov 25 1996 Seiko Epson Corporation Method of manufacturing organic EL element, organic EL element, and organic EL display device
6822391, Feb 21 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device, electronic equipment, and method of manufacturing thereof
6830494, Oct 12 1999 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Electro-optical device and manufacturing method thereof
6833156, Nov 25 1996 Seiko Epson Corporation Method of manufacturing organic EL element, organic EL element, and organic EL display device
6838192, Nov 25 1996 Seiko Epson Corporation Method of manufacturing organic EL element, organic EL element, and organic EL display device
6849877, Jun 20 2001 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Light emitting device and method of manufacturing the same
6863961, Nov 25 1996 Seiko Epson Corporation Method of manufacturing organic EL element, organic EL element, and organic EL display device
6866901, Oct 25 1999 SAMSUNG DISPLAY CO , LTD Method for edge sealing barrier films
6887733, Sep 11 2002 Osram GmbH Method of fabricating electronic devices
6888307, Aug 21 2001 UNIVERSAL DISPLAY CORPORATION Patterned oxygen and moisture absorber for organic optoelectronic device structures
6894312, Sep 17 1999 Semiconductor Energy Laboratory Co., Ltd. EL display device
6923702, Oct 25 1999 SAMSUNG DISPLAY CO , LTD Method of making encapsulated display devices
6924594, Oct 03 2000 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Light emitting device
6929864, Aug 17 2002 3M Innovative Properties Company Extensible, visible light-transmissive and infrared-reflective film and methods of making and using the film
6933051, Aug 17 2002 3M Innovative Properties Company Flexible electrically conductive film
6933538, Sep 11 2000 Osram GmbH Plasma encapsulation for electronic and microelectronic components such as organic light emitting diodes
6956325, Feb 21 2001 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, electronic equipment, and method of manufacturing thereof
6962671, Oct 25 1999 SAMSUNG DISPLAY CO , LTD Multilayer plastic substrates
6965195, Sep 22 1999 SEMICONDUCTOR ENERGY LABORATORY CO , LTD EL display device and electronic device
6977394, Nov 02 1998 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method therefor
6998776, Apr 16 2003 Corning Incorporated Glass package that is hermetically sealed with a frit and method of fabrication
7005671, Oct 01 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device, electronic equipment, and organic polarizing film
7022556, Nov 11 1998 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Exposure device, exposure method and method of manufacturing semiconductor device
7026758, Sep 28 2001 Osram GmbH Reinforcement of glass substrates in flexible devices
7050835, Dec 12 2001 UNIVERSAL DISPLAY CORPORATION Intelligent multi-media display communication system
7067337, Feb 13 1988 Seiko Epson Corporation Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device
7067976, Jul 03 2001 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, method of manufacturing a light-emitting device, and electronic equipment
7091605, Sep 21 2001 Global Oled Technology LLC Highly moisture-sensitive electronic device element and method for fabrication
7112115, Nov 09 1999 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Light emitting device and method of manufacturing the same
7129102, Jul 03 2001 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, method of manufacturing a light-emitting device, and electronic equipment
7141821, Nov 10 1998 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Semiconductor device having an impurity gradient in the impurity regions and method of manufacture
7147530, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electroluminescence display device and method of manufacturing the same
7164155, May 15 2002 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Light emitting device
7187119, Mar 29 2001 UNIVERSAL DISPLAY CORPORATION Methods and structures for reducing lateral diffusion through cooperative barrier layers
7189999, Aug 18 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device with coating film on portions of substrates and sealing member
7193364, Sep 12 2002 Osram GmbH Encapsulation for organic devices
7198832, Oct 25 1999 SAMSUNG DISPLAY CO , LTD Method for edge sealing barrier films
7205662, Feb 27 2003 DEMARAY, LLC Dielectric barrier layer films
7211828, Jun 20 2001 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Light emitting device and electronic apparatus
7215473, Aug 17 2002 3M Innovative Properties Company Enhanced heat mirror films
7222981, Feb 15 2001 Semiconductor Energy Laboratory Co., Ltd. EL display device and electronic device
7224116, Sep 11 2002 OSRAM Opto Semiconductors GmbH Encapsulation of active electronic devices
7229859, May 15 1996 Seiko Epson Corporation Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device
7238628, May 23 2003 DEMARAY, LLC Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides
7261950, Aug 17 2002 3M Innovative Properties Company Flexible, formable conductive films
7262131, Feb 27 2003 DEMARAY, LLC Dielectric barrier layer films
7288420, Jun 04 1999 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Method for manufacturing an electro-optical device
7294517, Jun 18 2001 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Light emitting device and method of fabricating the same
7344901, Apr 16 2003 Corning Incorporated Hermetically sealed package and method of fabricating of a hermetically sealed package
7351479, Aug 17 2002 3M Innovative Properties Company Durable EMI shielding film
7364925, Apr 04 2002 INTERNATIONAL DISPLAY SYSTEMS, INC Organic light emitting device having a protective barrier
7365442, Mar 31 2003 Pictiva Displays International Limited Encapsulation of thin-film electronic devices
7372200, Jul 03 2001 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, method of manufacturing a light-emitting device, and electronic equipment
7378356, Mar 16 2002 DEMARAY, LLC Biased pulse DC reactive sputtering of oxide films
7381657, Mar 16 2002 DEMARAY, LLC Biased pulse DC reactive sputtering of oxide films
7391054, Nov 10 1998 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
7393557, Aug 17 2002 3M Innovative Properties Flexible electrically conductive film
7393707, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an electro-optical device
7404877, Nov 09 2001 DEMARAY, LLC Low temperature zirconia based thermal barrier layer by PVD
7405432, Nov 11 1998 Semiconductor Energy Laboratory Co., Ltd. Exposure device, exposure method and method of manufacturing semiconductor device
7407423, Apr 16 2003 Corning Incorporated Glass package that is hermetically sealed with a frit and method of fabrication
7413998, Mar 16 2002 DEMARAY, LLC Biased pulse DC reactive sputtering of oxide films
7417253, Nov 02 1998 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method therefor
7420208, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method of manufacturing the same
7443097, Feb 21 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and electronic equipment
7453089, Aug 18 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and display device
7462501, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an electro-optical device
7469558, Jul 10 2001 DEMARAY, LLC As-deposited planar optical waveguides with low scattering loss and methods for their manufacture
7495644, Dec 26 2003 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing display device
7510913, Apr 11 2003 SAMSUNG DISPLAY CO , LTD Method of making an encapsulated plasma sensitive device
7518146, Sep 17 1999 Semiconductor Energy Laboratory Co., Ltd. EL display device including color filter and light shielding film
7544276, Mar 16 2002 DEMARAY, LLC Biased pulse DC reactive sputtering of oxide films
7549905, Sep 30 2005 INTERNATIONAL DISPLAY SYSTEMS, INC Method of encapsulating an organic light emitting device
7572478, Oct 03 2000 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
7602121, Apr 16 2003 Corning Incorporated Glass package that is hermetically sealed with a frit and method of fabrication
7621794, Nov 09 2005 INTERNATIONAL DISPLAY SYSTEMS, INC Method of encapsulating an organic light-emitting device
7642559, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
7648925, Apr 11 2003 SAMSUNG DISPLAY CO , LTD Multilayer barrier stacks and methods of making multilayer barrier stacks
7659012, Feb 02 2004 SAMSUNG DISPLAY CO , LTD Organic electroluminescent display device
7662425, Nov 25 1996 Seiko Epson Corporation Method of manufacturing organic EL element, organic EL element and organic EL display device
7675074, May 15 2002 Semiconductor Energy Laboratory Co., Ltd. Light emitting device including a lamination layer
7683534, Mar 29 2001 UNIVERSAL DISPLAY CORPORATION Methods and structures for reducing lateral diffusion through cooperative barrier layers
7683535, Feb 03 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method of manufacturing the same
7697052, Feb 17 1999 Semiconductor Energy Laboratory Co., Ltd. Electronic view finder utilizing an organic electroluminescence display
7701134, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Active matrix display device with improved operating performance
7710019, Dec 11 2002 SAMSUNG DISPLAY CO , LTD Organic light-emitting diode display comprising auxiliary electrodes
7727601, Oct 25 1999 SAMSUNG DISPLAY CO , LTD Method for edge sealing barrier films
7728326, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and electronic apparatus
7741775, Jun 07 1999 Semiconductor Energy Laboratories Co., Ltd. Electro-optical device and electronic device
7745991, Oct 12 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device having an EL layer over a plurality of pixels
7745993, Feb 03 2000 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing light emitting device comprising reflective film
7767498, Aug 25 2005 SAMSUNG DISPLAY CO , LTD Encapsulated devices and method of making
7781670, Jul 02 2004 ASCA Organic photovoltaic component with encapsulation
7800099, Oct 01 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device, electronic equipment, and organic polarizing film
7825588, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
7826702, Aug 27 2002 DEMARAY, LLC Optically coupling into highly uniform waveguides
7838133, Sep 02 2005 DEMARAY, LLC Deposition of perovskite and other compound ceramic films for dielectric applications
7863622, Nov 02 1998 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method therefor
7867053, Feb 03 2000 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing light emitting device
7880167, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an electro-optical device or electroluminescence display device
7952101, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method of manufacturing the same
7952103, Sep 17 1999 Semiconductor Energy Laboratory Co., Ltd. EL display device and method for manufacturing the same
7959769, Dec 08 2004 Sapurast Research LLC Deposition of LiCoO2
7977876, Nov 09 1999 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method of manufacturing the same
7991677, Oct 29 2004 American Express Travel Related Services Company, Inc. Using commercial share of wallet to rate investments
7993773, Aug 09 2002 Sapurast Research LLC Electrochemical apparatus with barrier layer protected substrate
8021778, Aug 09 2002 Sapurast Research LLC Electrochemical apparatus with barrier layer protected substrate
8030658, Nov 25 1998 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing thin film transistor
8045832, Mar 16 2002 DEMARAY, LLC Mode size converter for a planar waveguide
8062708, Sep 29 2006 Sapurast Research LLC Masking of and material constraint for depositing battery layers on flexible substrates
8063560, Apr 16 2003 Corning Incorporated Glass package that is hermetically sealed with a frit and method of fabrication
8076005, May 23 2003 DEMARAY, LLC Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides
8088502, Sep 20 2006 Battelle Memorial Institute Nanostructured thin film optical coatings
8105466, Mar 16 2002 DEMARAY, LLC Biased pulse DC reactive sputtering of oxide films
8106407, Aug 18 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and display device
8120039, Nov 19 1999 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
8129715, May 15 2002 Semiconductor Energy Labratory Co., Ltd. Light emitting device
8134149, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting device
8183571, Sep 17 1999 Semiconductor Energy Laboratory Co., Ltd. EL display device and method for manufacturing the same
8188474, Oct 16 2008 Semiconductor Energy Laboratory Co., Ltd. Flexible light-emitting device
8188643, Dec 26 2003 SAMSUNG DISPLAY CO , LTD Display apparatus
8197781, Nov 07 2006 Sapurast Research LLC Sputtering target of Li3PO4 and method for producing same
8198203, Oct 20 2008 Corning Incorporated Antimony-free glass, antimony-free frit and a glass package that is hermetically sealed with the frit
8203265, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
8212280, May 20 2004 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element and display device
8227809, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
8236443, Jun 15 2005 Sapurast Research LLC Metal film encapsulation
8237169, Nov 25 1998 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing thin film transistor
8241752, Nov 02 1998 3M Innovative Properties Company Transparent conductive articles and methods of making same
8253327, Jun 28 2007 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element, light-emitting device, and electronic device
8260203, Sep 12 2008 Sapurast Research LLC Energy device with integral conductive surface for data communication via electromagnetic energy and method thereof
8268488, Dec 21 2007 Sapurast Research LLC Thin film electrolyte for thin film batteries
8297991, Nov 11 1998 Semiconductor Energy Laboratory Co., Ltd. Exposure device, exposure method and method of manufacturing semiconductor device
8314426, May 14 1999 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating the same
8338198, Aug 22 2001 Semiconductor Energy Laboratory Co., Ltd. Method of peeling thin film device and method of manufacturing semiconductor device using peeled thin film device
8339038, Feb 03 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
8350451, Jun 05 2008 3M Innovative Properties Company Ultrathin transparent EMI shielding film comprising a polymer basecoat and crosslinked polymer transparent dielectric layer
8350519, Apr 02 2008 Sapurast Research LLC Passive over/under voltage control and protection for energy storage devices associated with energy harvesting
8362487, Jun 11 2002 Semiconductor Energy Laboratory Co., Ltd. Light emitting device comprising film having hygroscopic property and transparency
8367440, Jul 16 2001 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and peeling off method and method of manufacturing semiconductor device
8373173, Nov 25 1998 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing thin film transistor
8390190, Oct 26 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device with active matrix EL display
8394522, Apr 29 2008 Sapurast Research LLC Robust metal film encapsulation
8404376, Aug 09 2002 Sapurast Research LLC Metal film encapsulation
8415208, Jul 16 2001 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and peeling off method and method of manufacturing semiconductor device
8415660, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
8421114, Oct 13 1998 Semiconductor Energy Laboratory Co., Ltd. Active matrix electroluminescent device within resin sealed housing
8421350, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
8431182, Sep 19 1996 Seiko Epson Corporation Matrix type display device and manufacturing method thereof
8431264, Aug 09 2002 Sapurast Research LLC Hybrid thin-film battery
8434328, Oct 20 2008 Corning Incorporated Antimony-free glass, antimony-free frit and a glass package that is hermetically sealed with the frit
8445130, Nov 17 2005 Sapurast Research LLC Hybrid thin-film battery
8450745, Sep 17 1999 Semiconductor Energy Laboratory Co., Ltd. EL display device
8476623, May 15 2002 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
8476665, Nov 11 1998 Semiconductor Energy Laboratory Co., Ltd. Display device
8497516, Aug 18 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and display device
8508193, Oct 08 2008 Sapurast Research LLC Environmentally-powered wireless sensor module
8518581, Jan 11 2008 Sapurast Research LLC Thin film encapsulation for thin film batteries and other devices
8535396, Aug 09 2002 Sapurast Research LLC Electrochemical apparatus with barrier layer protected substrate
8541942, Nov 02 1998 3M Innovative Properties Company Transparent conductive articles and methods of making same
8569767, Nov 19 1999 Semiconductor Energy Laboratory Co., Ltd. Electroluminescence display device
8580333, Sep 19 1996 Seiko Epson Corporation Matrix type display device with optical material at predetermined positions and manufacturing method thereof
8581265, Oct 16 2008 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and electronic device including substrate having flexibility
8590338, Dec 31 2009 SAMSUNG DISPLAY CO , LTD Evaporator with internal restriction
8599572, Sep 01 2009 Sapurast Research LLC Printed circuit board with integrated thin film battery
8610108, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and electronic apparatus
8614545, Nov 25 1996 Seiko Epson Corporation Organic EL display device having a bank formed to fill spaces between pixel electrodes
8636876, Dec 08 2004 DEMARAY, LLC Deposition of LiCoO2
8643020, Jul 02 2009 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, lighting device, and electronic device
8659012, May 15 2002 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
8669579, May 20 2004 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element and display device
8674364, Aug 22 2001 Semiconductor Energy Laboratory Co., Ltd. Peeling method and method of manufacturing semiconductor device
8674600, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Display device
8698160, Nov 25 1998 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing thin film transistor
8728285, May 23 2003 DEMARAY, LLC Transparent conductive oxides
8729557, Nov 19 1999 Semiconductor Energy Laboratory Co., Ltd. Electroluminescence display device
8735874, Feb 14 2011 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, display device, and method for manufacturing the same
8735899, Aug 18 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and display device
8735900, Sep 17 1999 Semiconductor Energy Laboratory Co., Ltd. EL display device
8766269, Jul 02 2009 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Light-emitting device, lighting device, and electronic device
8803140, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device having an organic light emitting diode that emits white light
8809891, May 20 2004 Semiconductor Energy Laboratory Co. Ltd. Light-emitting element and display device
8810130, Feb 03 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method of manufacturing the same
8822982, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and electronic apparatus
8853696, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
8853724, Sep 14 2010 Semiconductor Energy Laboratory Co., Ltd. Solid-state light-emitting element, light-emitting device, and lighting device
8859947, Nov 11 1998 Semiconductor Energy Laboratory Co., Ltd. Display device comprising at least dual transistor electrically connected to dual parallel wiring
8871536, Feb 14 2011 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, display device, and method for manufacturing the same
8890172, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an electro-optical device
8900366, Apr 15 2002 SAMSUNG DISPLAY CO , LTD Apparatus for depositing a multilayer coating on discrete sheets
8904819, Dec 31 2009 Samsung Display Co., Ltd. Evaporator with internal restriction
8906523, Aug 11 2008 Sapurast Research LLC Energy device with integral collector surface for electromagnetic energy harvesting and method thereof
8933624, Oct 26 1999 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
8941301, Jun 28 2007 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element, light-emitting device, electronic device, and method for fabricating light-emitting element
8955217, Oct 25 1999 SAMSUNG DISPLAY CO , LTD Method for edge sealing barrier films
8957424, Nov 19 1999 Semiconductor Energy Laboratory Co., Ltd. Electroluminescence display device
8969906, Oct 13 1998 Semiconductor Energy Laboratory Co., Ltd. Active matrix electroluminescent device within resin sealed housing
8987988, Nov 02 1920 Semiconductor Energy Laboratory Co., Ltd. Display device
9000442, Jan 20 2010 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, flexible light-emitting device, electronic device, and method for manufacturing light-emitting device and flexible-light emitting device
9000443, Jan 20 2010 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, flexible light-emitting device, electronic device, lighting apparatus, and method of manufacturing light-emitting device and flexible-light emitting device
9059049, Sep 17 1999 Semiconductor Energy Laboratory Co., Ltd. EL display device
9088006, May 09 2012 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and electronic device
9105855, May 20 2004 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element and display device
9117976, Oct 16 2008 Semiconductor Energy Laboratory Co., Ltd. Flexible light-emitting device
9118025, May 15 2002 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
9123854, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
9166180, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. Light emitting device having an organic light emitting diode that emits white light
9178168, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. White light emitting device
9178177, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
9184410, Dec 22 2008 SAMSUNG DISPLAY CO , LTD Encapsulated white OLEDs having enhanced optical output
9202987, Jul 16 2001 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and peeling off method and method of manufacturing semiconductor device
9240525, Jul 02 2009 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, lighting device, and electronic device
9263697, Aug 18 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and display device
9276224, Jun 20 2001 Semiconductor Energy Laboratory Co., Ltd. Organic light emitting device having dual flexible substrates
9281403, Aug 22 2001 Semiconductor Energy Laboratory Co., Ltd. Peeling method and method of manufacturing semiconductor device
9281497, Feb 14 2011 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, display device, and method for manufacturing the same
9293726, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an electro-optical device
9334557, Dec 21 2007 Sapurast Research LLC Method for sputter targets for electrolyte films
9337446, Dec 22 2008 SAMSUNG DISPLAY CO , LTD Encapsulated RGB OLEDs having enhanced optical output
9349775, May 20 2004 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element and display device
9356209, Sep 14 2010 Semiconductor Energy Laboratory Co., Ltd. Solid-state light-emitting element, light-emitting device, and lighting device
9362530, Dec 22 2008 Samsung Display Co., Ltd. Encapsulated white OLEDs having enhanced optical output
9366971, Nov 11 1998 Semiconductor Energy Laboratory Co., Ltd. Display device comprising dual transistor with LDD regions overlapping the gate electrodes and one of a source electrode and a drain electrode of first transistor is electrically connected to the second gate electrode
9368680, Jun 04 1999 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
9391132, Oct 26 1999 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
9401458, Oct 16 2008 Semiconductor Energy Laboratory Co., Ltd. Film and light-emitting device
9401498, Mar 04 2011 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, lighting device, substrate, and manufacturing method of substrate
9419066, Feb 03 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method of manufacturing the same
9431470, Sep 17 1999 Semiconductor Energy Laboratory Co., Ltd. Display device
9502690, Dec 16 2010 Semiconductor Energy Laboratory Co., Ltd. Organic light-emitting device and lighting device with organic resin and glass substrate
9508092, Jan 31 2007 Experian Information Solutions, Inc. Systems and methods for providing a direct marketing campaign planning environment
9532453, Sep 01 2009 Sapurast Research LLC Printed circuit board with integrated thin film battery
9553281, Nov 19 2010 Semiconductor Energy Laboratory Co., Ltd. Lighting device
9563916, Oct 05 2006 Experian Information Solutions, Inc. System and method for generating a finance attribute from tradeline data
9608004, Jul 16 2001 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and peeling off method and method of manufacturing semiconductor device
9614012, May 20 2004 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element and display device
9627648, May 09 2012 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and electronic device
9634296, Aug 09 2002 Sapurast Research LLC Thin film battery on an integrated circuit or circuit board and method thereof
9673223, Nov 19 1999 Semiconductor Energy Laboratory Co., Ltd. Electroluminescence display device
9735218, Sep 17 1999 Semiconductor Energy Laboratory Co., Ltd. EL display device and method for manufacturing the same
9755148, Aug 22 2001 Semiconductor Energy Laboratory Co., Ltd. Peeling method and method of manufacturing semiconductor device
9768239, Aug 18 2000 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and display device
9768410, Jul 02 2009 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, lighting device, and electronic device
9786873, Jan 11 2008 Allegro MicroSystems, LLC Thin film encapsulation for thin film batteries and other devices
9793329, Oct 16 2008 Semiconductor Energy Laboratory Co., Ltd. Display device including light-emitting layer
9793523, Aug 09 2002 Sapurast Research LLC Electrochemical apparatus with barrier layer protected substrate
9822454, Dec 28 2006 3M Innovative Properties Company Nucleation layer for thin film metal layer formation
9839940, Apr 11 2003 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
9842994, Aug 22 2001 Semiconductor Energy Laboratory Co., Ltd. Peeling method and method of manufacturing semiconductor device
9876151, Sep 14 2010 Semiconductor Energy Laboratory Co., Ltd. Solid-state light-emitting element, light-emitting device, and lighting device
9882165, Dec 16 2010 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and lighting device
9916596, Jan 31 2007 Experian Information Solutions, Inc. Systems and methods for providing a direct marketing campaign planning environment
9947568, Feb 20 2013 SEMICONDUCTOR ENERGY LABORATORY CO , LTD Peeling method, semiconductor device, and peeling apparatus
RE40531, Oct 25 1999 SAMSUNG DISPLAY CO , LTD Ultrabarrier substrates
RE40787, Oct 25 1999 SAMSUNG DISPLAY CO , LTD Multilayer plastic substrates
Patent Priority Assignee Title
3217169,
3807833,
4097889, Nov 01 1976 RCA Corporation Combination glass/low temperature deposited Siw Nx Hy O z
4767679, Oct 22 1986 ALPS Electric Co., Ltd. Thin film EL panel
5047687, Jul 26 1990 Global Oled Technology LLC Organic electroluminescent device with stabilized cathode
5059861, Jul 26 1990 Global Oled Technology LLC Organic electroluminescent device with stabilizing cathode capping layer
5073446, Jul 26 1990 Global Oled Technology LLC Organic electroluminescent device with stabilizing fused metal particle cathode
5124204, Jul 14 1988 Sharp Kabushiki Kaisha Thin film electroluminescent (EL) panel
5394011, Jun 20 1991 Iwaki Electronics Co. Ltd.; Fuji Electrochemical Co., Ltd. Package structure for semiconductor devices and method of manufacturing the same
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Jan 04 2011Motorola, IncMOTOROLA SOLUTIONS, INCCHANGE OF NAME SEE DOCUMENT FOR DETAILS 0259090661 pdf
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