Patent
   D546354
Priority
Jul 15 2005
Filed
Aug 26 2005
Issued
Jul 10 2007
Expiry
Jul 10 2021
Assg.orig
Entity
unknown
5
8
n/a
The ornamental design for a semiconductor manufacturing apparatus, as shown.

FIG. 1 is a front, top and left side perspective view of semiconductor manufacturing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a top plan elevational view thereof;

FIG. 6 is a bottom plan elevational view thereof; and,

FIG. 7 is a rear elevational view thereof.

Soraoka, Minoru, Kihara, Hideki, Nagayasu, Nobuo, Ohirabaru, Yuzo

Patent Priority Assignee Title
D989144, May 14 2021 HITACHI HIGH-TECH CORPORATION Apparatus for evaluating semiconductor substrate
D989830, May 14 2021 HITACHI HIGH-TECH CORPORATION Semiconductor substrate transfer apparatus
D989831, May 14 2021 HITACHI HIGH-TECH CORPORATION Apparatus for evaluating semiconductor substrate
ER7490,
ER8606,
Patent Priority Assignee Title
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Aug 01 2005KIHARA, HIDEKIHitachi High-Technologies CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0169280065 pdf
Aug 03 2005SORAOKA, MINORUHitachi High-Technologies CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0169280065 pdf
Aug 03 2005OHIRABARU, YUZOHitachi High-Technologies CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0169280065 pdf
Aug 03 2005NGAYASU, NUBUOHitachi High-Technologies CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0169280065 pdf
Aug 26 2005Hitachi High-Technologies Corporation(assignment on the face of the patent)
Feb 12 2020Hitachi High-Technologies CorporationHITACHI HIGH-TECH CORPORATIONCHANGE OF NAME AND ADDRESS0522590227 pdf
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