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The ornamental design for a semiconductor manufacturing apparatus, as shown.
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Soraoka, Minoru, Kihara, Hideki, Nagayasu, Nobuo, Ohirabaru, Yuzo
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Aug 01 2005 | KIHARA, HIDEKI | Hitachi High-Technologies Corporation | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 016928 | /0065 | |
Aug 03 2005 | SORAOKA, MINORU | Hitachi High-Technologies Corporation | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 016928 | /0065 | |
Aug 03 2005 | OHIRABARU, YUZO | Hitachi High-Technologies Corporation | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 016928 | /0065 | |
Aug 03 2005 | NGAYASU, NUBUO | Hitachi High-Technologies Corporation | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 016928 | /0065 | |
Aug 26 2005 | Hitachi High-Technologies Corporation | (assignment on the face of the patent) | / | |||
Feb 12 2020 | Hitachi High-Technologies Corporation | HITACHI HIGH-TECH CORPORATION | CHANGE OF NAME AND ADDRESS | 052259 | /0227 |
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