Patent
   D989144
Priority
May 14 2021
Filed
Oct 13 2021
Issued
Jun 13 2023
Expiry
Jun 13 2038
Assg.orig
Entity
unknown
0
24
n/a
The ornamental design for an apparatus for evaluating semiconductor substrate, as shown and described.

FIG. 1 is a front, top, and right side perspective view of an apparatus for evaluating semiconductor substrate according to the design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 2; and,

FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 2.

The broken lines illustrate portions of the apparatus for evaluating semiconductor substrate that form no part of the claimed design. The hatching shown in FIG. 8 and FIG. 9 represents unclaimed subject matter and forms no part of the claimed design.

Arakawa, Masayuki, Kojima, Akira, Kobayashi, Tomokazu, Mizuochi, Masaki, Hokari, Junpei, Kikuchi, Takaaki

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Oct 13 2021HITACHI HIGH-TECH CORPORATION(assignment on the face of the patent)
Nov 16 2021HOKARI, JUNPEIHITACHI HIGH-TECH CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0586390525 pdf
Nov 16 2021MIZUOCHI, MASAKIHITACHI HIGH-TECH CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0586390525 pdf
Nov 17 2021ARAKAWA, MASAYUKIHITACHI HIGH-TECH CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0586390525 pdf
Dec 06 2021KOJIMA, AKIRAHITACHI HIGH-TECH CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0586390525 pdf
Dec 06 2021KOBAYASHI, TOMOKAZUHITACHI HIGH-TECH CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0586390525 pdf
Dec 07 2021KIKUCHI, TAKAAKIHITACHI HIGH-TECH CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0586390525 pdf
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