Process tube for manufacturing semiconductor wafers

Abstract

Description

FIG. 1 is a reference perspective view of the process tube for manufacturing semiconductor wafers;

FIG. 2 is a reference perspective view of the process tube as seen from another direction;

FIG. 3 is a front view of the process tube;

FIG. 4 is a back view thereof;

FIG. 5 is a left side view thereof. A right side view thereof is a mirror image thereto;

FIG. 6 is a top view thereof;

FIG. 7 is a bottom view thereof;

FIG. 8 is a sectional view taken along line 8—8 in FIG. 6; and,

FIG. 9 is a sectional view taken along line 9—9 in FIG. 3.

Claims

The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.