Process tube for manufacturing semiconductor wafers

Abstract

Description

FIG. 1 is a perspective view;

FIG. 2 is a front view;

FIG. 3 is a rear view;

FIG. 4 is a left side view and the right side being a mirror image thereof;

FIG. 5 is a plan view and the bottom plan being a mirror image thereof;

FIG. 6 is a sectional view thereof along 6—6 of the plan view shown in FIG. 5;

FIG. 7 is an enlarged sectional view along 7—7 of the rear view shown in FIG. 3; and,

FIG. 8 is a view of process tube for manufacturing semiconductor wafers in use wherein the broken line showing of the environment is for illustrative purposes only and forms no part of the claimed design.

Claims

The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.