Patent
   D772824
Priority
Feb 25 2015
Filed
Aug 19 2015
Issued
Nov 29 2016
Expiry
Nov 29 2031
Assg.orig
Entity
unknown
18
23
n/a
The ornamental design for a reaction tube, as shown and described.

FIG. 1 is a perspective view of a reaction tube showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof; and

FIG. 7 is a bottom plan view thereof.

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2 thereof;

FIG. 9 is a cross sectional view taken along line 9-9 in FIG. 2 thereof;

FIG. 10 is a cross sectional view taken along line 10-10 in FIG. 4 thereof; and,

FIG. 11 is a cross sectional view taken along line 11-11 in FIG. 4 thereof.

Yoshida, Hidenari, Taniyama, Tomoshi

Patent Priority Assignee Title
11542601, Feb 09 2016 KOKUSAI ELECTRIC CORPORATION Substrate processing apparatus and method of manufacturing semiconductor device
11952664, Feb 09 2016 KOKUSAI ELECTRIC CORPORATION Substrate processing apparatus and method of manufacturing semiconductor device
D790490, Sep 04 2015 KOKUSAI ELECTRIC CORPORATION Reaction tube
D791090, Sep 04 2015 KOKUSAI ELECTRIC CORPORATION Reaction tube
D842823, Aug 10 2017 KOKUSAI ELECTRIC CORPORATION Reaction tube
D842824, Aug 09 2017 KOKUSAI ELECTRIC CORPORATION Reaction tube
D843958, Aug 10 2017 KOKUSAI ELECTRIC CORPORATION Reaction tube
D853979, Dec 27 2017 KOKUSAI ELECTRIC CORPORATION Reaction tube
D901406, Mar 20 2019 KOKUSAI ELECTRIC CORPORATION Inner tube of reactor for semiconductor fabrication
D931823, Jan 29 2020 KOKUSAI ELECTRIC CORPORATION Reaction tube
D986826, Mar 10 2020 KOKUSAI ELECTRIC CORPORATION Reaction tube
ER3440,
ER5461,
ER707,
ER7131,
ER7251,
ER7371,
ER9216,
Patent Priority Assignee Title
5948300, Sep 12 1997 Kokusai Semiconductor Equipment Corporation Process tube with in-situ gas preheating
20030221779,
20080083372,
20090194521,
20090250005,
D405062, Aug 20 1997 Tokyo Electron Limited Processing tube for use in a semiconductor wafer heat processing apparatus
D405429, Jan 31 1997 Tokyo Electron Limited Processing tube for use in a semiconductor wafer heat processing apparatus
D405431, Aug 20 1997 Tokyo Electron Limited Tube for use in a semiconductor wafer heat processing apparatus
D406113, Jan 31 1997 Tokyo Electron Limited Processing tube for use in a semiconductor wafer heat processing apparatus
D417438, Jan 31 1997 Tokyo Electron Limited Quartz outer tube
D423463, Jan 31 1997 Tokyo Electron Limited Quartz process tube
D424024, Jan 31 1997 Tokyo Electron Limited Quartz process tube
D521464, Nov 04 2003 Tokyo Electron Limited Process tube for semiconductor device manufacturing apparatus
D586768, Oct 12 2006 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
D600659, Sep 12 2006 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
D610559, May 30 2008 KOKUSAI ELECTRIC CORPORATION Reaction tube
D611013, Mar 28 2008 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
D618638, May 09 2008 KOKUSAI ELECTRIC CORPORATION Reaction tube
D711843, Jun 28 2013 KOKUSAI ELECTRIC CORPORATION Reaction tube
D719114, Jun 28 2013 KOKUSAI ELECTRIC CORPORATION Reaction tube
D720707, Jun 28 2013 KOKUSAI ELECTRIC CORPORATION Reaction tube
D725055, Jun 28 2013 KOKUSAI ELECTRIC CORPORATION Reaction tube
D739832, Jun 28 2013 KOKUSAI ELECTRIC CORPORATION Reaction tube
////
Executed onAssignorAssigneeConveyanceFrameReelDoc
Jul 30 2015YOSHIDA, HIDENARIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0363640074 pdf
Jul 30 2015TANIYAMA, TOMOSHIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0363640074 pdf
Aug 19 2015HITACHI KOKUSAI ELECTRIC INC.(assignment on the face of the patent)
Mar 29 2019Hitachi Kokusai Electric IncKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0491960764 pdf
n/a
Date Maintenance Fee Events


n/a
Date Maintenance Schedule