Inner tube of reactor for semiconductor fabrication

Abstract

Description

FIG. 1 is a front, top and right side perspective view of an inner tube of reactor for semiconductor fabrication showing our new design;

FIG. 2 is a front elevational view thereof,

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2; and,

FIG. 9 is a cross sectional view taken along line 9-9 in FIG. 8.

Claims

The ornamental design for an inner tube of reactor for semiconductor fabrication, as shown and described.