Outer tube for use in a semiconductor wafer heat processing apparatus

Abstract

Description

FIG. 1 a perspective view of a outertube for use in a semiconductor wafer heat processing apparatus;

FIG. 2 a front elevational view thereof;

FIG. 3 a top plan view thereof;

FIG. 4 a bottom plan view thereof; and,

FIG. 5 a cross-sectional view taken along line V-V in FIG. 3 .

Claims

I claim the ornamental design for an outertube for use in a semiconductor wafer heat processing apparatus, as shown and described.