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Patent
D404368
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Priority
Aug 20 1997
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Filed
Feb 02 1998
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Issued
Jan 19 1999
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Expiry
Jan 19 2013
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Assg.orig
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Entity
unknown
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24
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10
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n/a
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I claim the ornamental design for an outertube for use in a semiconductor wafer heat processing apparatus, as shown and described.
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FIG. 1 a perspective view of a outertube for use in a semiconductor wafer
heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a top plan view thereof;
FIG. 4 a bottom plan view thereof; and,
FIG. 5 a cross-sectional view taken along line V-V in FIG. 3 .
Shimazu, Tomohisa
Patent |
Priority |
Assignee |
Title |
D586768, |
Oct 12 2006 |
Tokyo Electron Limited |
Process tube for manufacturing semiconductor wafers |
D590359, |
Feb 20 2006 |
Tokyo Electron Limited |
Process tube for manufacturing semiconductor wafers or the like |
D594488, |
Apr 20 2007 |
Tokyo Electron Limited |
Process tube for manufacturing semiconductor wafers |
D600659, |
Sep 12 2006 |
Tokyo Electron Limited |
Process tube for manufacturing semiconductor wafers |
D611013, |
Mar 28 2008 |
Tokyo Electron Limited |
Process tube for manufacturing semiconductor wafers |
D711843, |
Jun 28 2013 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D719114, |
Jun 28 2013 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D720308, |
Nov 18 2011 |
Tokyo Electron Limited |
Inner tube for process tube for manufacturing semiconductor wafers |
D720309, |
Nov 18 2011 |
Tokyo Electron Limited |
Inner tube for process tube for manufacturing semiconductor wafers |
D720707, |
Jun 28 2013 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D724551, |
Nov 18 2011 |
Tokyo Electron Limited |
Inner tube for process tube for manufacturing semiconductor wafers |
D725053, |
Nov 18 2011 |
Tokyo Electron Limited |
Outer tube for process tube for manufacturing semiconductor wafers |
D725055, |
Jun 28 2013 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D739832, |
Jun 28 2013 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D742339, |
Mar 12 2014 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D748594, |
Mar 12 2014 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D770993, |
Sep 04 2015 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D813210, |
Jun 23 2016 |
VOXX International Corporation |
Antenna housing |
D813941, |
Mar 09 2015 |
NATURAL MACHINES, INC |
Capsule for dispensing flowable 3D printing medium |
D842823, |
Aug 10 2017 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D842824, |
Aug 09 2017 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D845936, |
Jun 23 2016 |
VOXX International Corporation |
Antenna housing |
D853979, |
Dec 27 2017 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D901406, |
Mar 20 2019 |
KOKUSAI ELECTRIC CORPORATION |
Inner tube of reactor for semiconductor fabrication |
Patent |
Priority |
Assignee |
Title |
4587689, |
Jan 12 1983 |
|
Meat packing apparatus |
5046909, |
Jun 29 1989 |
Applied Materials, Inc. |
Method and apparatus for handling semiconductor wafers |
5314574, |
Jun 26 1992 |
Tokyo Electron Kabushiki Kaisha |
Surface treatment method and apparatus |
5320218, |
Apr 07 1992 |
MURATEC AUTOMATION CO , LTD |
Closed container to be used in a clean room |
5407449, |
Mar 10 1992 |
ASM INTERNATIONAL N V |
Device for treating micro-circuit wafers |
5516732, |
Dec 04 1992 |
Tokyo Electron Limited |
Wafer processing machine vacuum front end method and apparatus |
5518360, |
Nov 16 1990 |
Kabushiki-Kaisha Watanabe Shoko |
Wafer carrying device and wafer carrying method |
5536128, |
Oct 21 1988 |
Renesas Electronics Corporation |
Method and apparatus for carrying a variety of products |
5658115, |
Sep 05 1991 |
Hitachi, Ltd. |
Transfer apparatus |
5752796, |
Jan 24 1996 |
Brooks Automation, Inc |
Vacuum integrated SMIF system |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a