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Patent
D594488
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Priority
Apr 20 2007
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Filed
Oct 12 2007
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Issued
Jun 16 2009
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Expiry
Jun 16 2023
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Assg.orig
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Entity
unknown
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8
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16
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n/a
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The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.
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FIG. 1 is a front view of the design for a process tube for manufacturing semiconductor wafers in accordance with the invention;
FIG. 2 is a rear view thereof;
FIG. 3 is a right side view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a bottom view thereof;
FIG. 6 is a top view thereof; and,
FIG. 7 is a front perspective view thereof.
The broken line showings are for the purpose of illustrating environmental structure and forms no part of the claimed design.
Inoue, Hisashi, Toiya, Masataka, Mizuno, Yoshikatsu
Patent |
Priority |
Assignee |
Title |
5711436, |
Feb 15 1995 |
Scanwood |
Combination drinking glass and wine glass rack |
5948300, |
Sep 12 1997 |
Kokusai Semiconductor Equipment Corporation |
Process tube with in-situ gas preheating |
20080132079, |
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|
|
D404368, |
Aug 20 1997 |
Tokyo Electron Limited |
Outer tube for use in a semiconductor wafer heat processing apparatus |
D405062, |
Aug 20 1997 |
Tokyo Electron Limited |
Processing tube for use in a semiconductor wafer heat processing apparatus |
D405429, |
Jan 31 1997 |
Tokyo Electron Limited |
Processing tube for use in a semiconductor wafer heat processing apparatus |
D405431, |
Aug 20 1997 |
Tokyo Electron Limited |
Tube for use in a semiconductor wafer heat processing apparatus |
D406113, |
Jan 31 1997 |
Tokyo Electron Limited |
Processing tube for use in a semiconductor wafer heat processing apparatus |
D423463, |
Jan 31 1997 |
Tokyo Electron Limited |
Quartz process tube |
D424024, |
Jan 31 1997 |
Tokyo Electron Limited |
Quartz process tube |
D452220, |
Oct 15 1998 |
Meto International GmbH |
Arrangement of aluminum foil coils forming an inductor of a resonant frequency identification element |
D504405, |
Jul 09 2003 |
SANYO ELECTRIC CO , LTD |
Semiconductor device |
D520467, |
Nov 04 2003 |
Tokyo Electron Limited |
Process tube for semiconductor device manufacturing apparatus |
D521464, |
Nov 04 2003 |
Tokyo Electron Limited |
Process tube for semiconductor device manufacturing apparatus |
D568838, |
May 01 2006 |
Nitto Denko Corporation |
Grooves formed around a semiconductor device on a circuit board |
D586768, |
Oct 12 2006 |
Tokyo Electron Limited |
Process tube for manufacturing semiconductor wafers |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a