Tube for use in a semiconductor wafer heat processing apparatus

Abstract

Description

FIG. 1 a perspective view of a tube for use in a semiconductor wafer heat processing apparatus;

FIG. 2 a front elevational view thereof;

FIG. 3 a cross-sectional view taken along line III--III in FIG. 2;

FIG. 4 a bottom plan view thereof;

FIG. 5 a right side view thereof;

FIG. 6 a rear elevational view thereof;

FIG. 7 a top plan view thereof;

FIG. 8 a cross-sectional view taken along line VIII--VIII in FIG. 7; and,

FIG. 9 a left side view thereof.

Claims

I claim the ornamental design for tube for use in a semiconductor wafer heat processing apparatus, as shown and described.