|
I claim the ornamental design for tube for use in a semiconductor wafer heat processing apparatus, as shown and described. |
FIG. 1 a perspective view of a tube for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a cross-sectional view taken along line III--III in FIG. 2;
FIG. 4 a bottom plan view thereof;
FIG. 5 a right side view thereof;
FIG. 6 a rear elevational view thereof;
FIG. 7 a top plan view thereof;
FIG. 8 a cross-sectional view taken along line VIII--VIII in FIG. 7; and,
FIG. 9 a left side view thereof.
Patent | Priority | Assignee | Title |
D594488, | Apr 20 2007 | Tokyo Electron Limited | Process tube for manufacturing semiconductor wafers |
D711843, | Jun 28 2013 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D719114, | Jun 28 2013 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D720308, | Nov 18 2011 | Tokyo Electron Limited | Inner tube for process tube for manufacturing semiconductor wafers |
D720309, | Nov 18 2011 | Tokyo Electron Limited | Inner tube for process tube for manufacturing semiconductor wafers |
D720707, | Jun 28 2013 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D724551, | Nov 18 2011 | Tokyo Electron Limited | Inner tube for process tube for manufacturing semiconductor wafers |
D725053, | Nov 18 2011 | Tokyo Electron Limited | Outer tube for process tube for manufacturing semiconductor wafers |
D725055, | Jun 28 2013 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D739832, | Jun 28 2013 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D742339, | Mar 12 2014 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D748594, | Mar 12 2014 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D770993, | Sep 04 2015 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D772824, | Feb 25 2015 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D778458, | Feb 23 2015 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D790490, | Sep 04 2015 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D791090, | Sep 04 2015 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D813941, | Mar 09 2015 | NATURAL MACHINES, INC | Capsule for dispensing flowable 3D printing medium |
D842823, | Aug 10 2017 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D842824, | Aug 09 2017 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D853979, | Dec 27 2017 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D901406, | Mar 20 2019 | KOKUSAI ELECTRIC CORPORATION | Inner tube of reactor for semiconductor fabrication |
D931823, | Jan 29 2020 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
D986826, | Mar 10 2020 | KOKUSAI ELECTRIC CORPORATION | Reaction tube |
ER3440, | |||
ER707, | |||
ER7251, | |||
ER7687, | |||
ER9216, |
Patent | Priority | Assignee | Title |
4587689, | Jan 12 1983 | Meat packing apparatus | |
5046909, | Jun 29 1989 | Applied Materials, Inc. | Method and apparatus for handling semiconductor wafers |
5314574, | Jun 26 1992 | Tokyo Electron Kabushiki Kaisha | Surface treatment method and apparatus |
5320218, | Apr 07 1992 | MURATEC AUTOMATION CO , LTD | Closed container to be used in a clean room |
5407449, | Mar 10 1992 | ASM INTERNATIONAL N V | Device for treating micro-circuit wafers |
5516732, | Dec 04 1992 | Tokyo Electron Limited | Wafer processing machine vacuum front end method and apparatus |
5518360, | Nov 16 1990 | Kabushiki-Kaisha Watanabe Shoko | Wafer carrying device and wafer carrying method |
5536128, | Oct 21 1988 | Renesas Electronics Corporation | Method and apparatus for carrying a variety of products |
5658115, | Sep 05 1991 | Hitachi, Ltd. | Transfer apparatus |
5752796, | Jan 24 1996 | Brooks Automation, Inc | Vacuum integrated SMIF system |
Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Feb 05 1998 | Tokyo Electron Ltd. | (assignment on the face of the patent) | / | |||
Mar 18 1998 | SHIMAZU, TOMOHISA | Tokyo Electron Limited | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009126 | /0600 |
Date | Maintenance Fee Events |
Date | Maintenance Schedule |