Patent
   D618638
Priority
May 09 2008
Filed
Nov 06 2008
Issued
Jun 29 2010
Expiry
Jun 29 2024
Assg.orig
Entity
unknown
26
6
n/a
I claim an ornamental design for a reaction tube, as shown and described.

FIG. 1 is a reference perspective view 1 of a reaction tube;

FIG. 2 is a reference perspective view 2 thereof;

FIG. 3 is a front elevation view thereof;

FIG. 4 is a rear elevation view thereof;

FIG. 5 is a left side elevation view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is sectional view taken along line 88 in FIG. 6; and,

FIG. 9 is sectional view taken along line 99 in FIG. 3.

Nakashima, Seiyo

Patent Priority Assignee Title
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D901406, Mar 20 2019 KOKUSAI ELECTRIC CORPORATION Inner tube of reactor for semiconductor fabrication
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ER3440,
ER707,
ER7251,
ER9216,
Patent Priority Assignee Title
5948300, Sep 12 1997 Kokusai Semiconductor Equipment Corporation Process tube with in-situ gas preheating
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D520467, Nov 04 2003 Tokyo Electron Limited Process tube for semiconductor device manufacturing apparatus
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 06 2008Hitachi Kokusai Electric, Inc.(assignment on the face of the patent)
Feb 16 2009NAKASHIMA, SEIYOHitachi Kokusai Electric, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0222670032 pdf
Dec 05 2018Hitachi Kokusai Electric IncKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0480080206 pdf
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