Process tube for manufacturing semiconductor wafers

Abstract

Description

FIG. 1 is a perspective view of the design for a process tube for manufacturing semiconductor wafers in accordance with the invention;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a top view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is a right side view thereof;

FIG. 7 is a left side view thereof;

FIG. 8 is a sectional view thereof along line 8—8 of FIG. 4;

FIG. 9 is a sectional view thereof along line 9—9 of FIG. 4;

FIG. 10 is a sectional view thereof along line 10—10 of FIG. 4; and,

FIG. 11 is a sectional view thereof along line 11—11 of FIG. 2.

The broken lines are shown for illustrative purpose only and form no part of the claimed design.

Claims

The ornamental design for a process tub for manufacturing semiconductor wafers, as shown and described.