Patent
   D588078
Priority
Jun 16 2006
Filed
Dec 15 2006
Issued
Mar 10 2009
Expiry
Mar 10 2023
Assg.orig
Entity
unknown
9
15
n/a
The ornamental design for a heat dissipation deterrence link for semiconductor manufacture, as shown and described.

FIG. 1 is a front view of the design for a heat dissipation deterrence link for semiconductor manufacture in accordance with the invention;

FIG. 2 is a rear view thereof;

FIG. 3 is a right side view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a plan view thereof;

FIG. 6 is a bottom view thereof;

FIG. 7 is a sectional view thereof along A—A of FIG. 1;

FIG. 8 is a perspective view thereof; and,

FIG. 9 shows a heat dissipation deterrence link for semiconductor manufacture in accordance with the invention in use.

In practice, a heat dissipation deterrence link is placed on the bottom of a thermostat plug that is included in a process tube for semiconductor manufacture. Then, in use, the link suppresses heat from a bottom sub-heater. Preferably, the heat dissipation deterrence link for semiconductor manufacture in accordance with the present invention is fabricated from quartz.

The broken line showing the environment is for illustrative purposes only and forms no part of the claimed design.

Suzuki, Daisuke, Okada, Mitsuhiro, Furusawa, Yoshikazu

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Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 15 2006Tokyo Electron Limited(assignment on the face of the patent)
Mar 14 2007OKADA, MITSUHIROTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0191370267 pdf
Mar 19 2007SUZUKI, DAISUKETokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0191370267 pdf
Mar 20 2007FURUSAWA, YOSHIKAZUTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0191370267 pdf
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