Patent |
Priority |
Assignee |
Title |
10023960, |
Sep 12 2012 |
ASM IP Holdings B.V. |
Process gas management for an inductively-coupled plasma deposition reactor |
10032628, |
May 02 2016 |
ASM IP HOLDING B V |
Source/drain performance through conformal solid state doping |
10043661, |
Jul 13 2015 |
ASM IP Holding B.V. |
Method for protecting layer by forming hydrocarbon-based extremely thin film |
10083836, |
Jul 24 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Formation of boron-doped titanium metal films with high work function |
10087522, |
Apr 21 2016 |
ASM IP HOLDING B V |
Deposition of metal borides |
10087525, |
Aug 04 2015 |
ASM IP Holding B.V. |
Variable gap hard stop design |
10090316, |
Sep 01 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
3D stacked multilayer semiconductor memory using doped select transistor channel |
10103040, |
Mar 31 2017 |
ASM IP HOLDING B V |
Apparatus and method for manufacturing a semiconductor device |
10134757, |
Nov 07 2016 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by using the method |
10167557, |
Mar 18 2014 |
ASM IP Holding B.V. |
Gas distribution system, reactor including the system, and methods of using the same |
10177025, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
10179947, |
Nov 26 2013 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming conformal nitrided, oxidized, or carbonized dielectric film by atomic layer deposition |
10190213, |
Apr 21 2016 |
ASM IP HOLDING B V |
Deposition of metal borides |
10211308, |
Oct 21 2015 |
ASM IP Holding B.V. |
NbMC layers |
10229833, |
Nov 01 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
10236177, |
Aug 22 2017 |
ASM IP HOLDING B V |
Methods for depositing a doped germanium tin semiconductor and related semiconductor device structures |
10249524, |
Aug 09 2017 |
ASM IP Holding B.V. |
Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
10249577, |
May 17 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method |
10262859, |
Mar 24 2016 |
ASM IP Holding B.V. |
Process for forming a film on a substrate using multi-port injection assemblies |
10269558, |
Dec 22 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming a structure on a substrate |
10276355, |
Mar 12 2015 |
ASM IP Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same |
10283353, |
Mar 29 2017 |
ASM IP HOLDING B V |
Method of reforming insulating film deposited on substrate with recess pattern |
10290508, |
Dec 05 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming vertical spacers for spacer-defined patterning |
10312055, |
Jul 26 2017 |
ASM IP Holding B.V. |
Method of depositing film by PEALD using negative bias |
10312129, |
Sep 29 2015 |
ASM IP Holding B.V. |
Variable adjustment for precise matching of multiple chamber cavity housings |
10319588, |
Oct 10 2017 |
ASM IP HOLDING B V |
Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
10322384, |
Nov 09 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Counter flow mixer for process chamber |
10340125, |
Mar 08 2013 |
ASM IP Holding B.V. |
Pulsed remote plasma method and system |
10340135, |
Nov 28 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride |
10343920, |
Mar 18 2016 |
ASM IP HOLDING B V |
Aligned carbon nanotubes |
10361201, |
Sep 27 2013 |
ASM IP Holding B.V. |
Semiconductor structure and device formed using selective epitaxial process |
10364496, |
Jun 27 2011 |
ASM IP Holding B.V. |
Dual section module having shared and unshared mass flow controllers |
10366864, |
Mar 18 2013 |
ASM IP Holding B.V. |
Method and system for in-situ formation of intermediate reactive species |
10367080, |
May 02 2016 |
ASM IP HOLDING B V |
Method of forming a germanium oxynitride film |
10378106, |
Nov 14 2008 |
ASM IP Holding B.V. |
Method of forming insulation film by modified PEALD |
10381219, |
Oct 25 2018 |
ASM IP Holding B.V. |
Methods for forming a silicon nitride film |
10381226, |
Jul 27 2016 |
ASM IP Holding B.V. |
Method of processing substrate |
10388509, |
Jun 28 2016 |
ASM IP Holding B.V. |
Formation of epitaxial layers via dislocation filtering |
10388513, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
10395919, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
10403504, |
Oct 05 2017 |
ASM IP HOLDING B V |
Method for selectively depositing a metallic film on a substrate |
10410943, |
Oct 13 2016 |
ASM IP Holding B.V. |
Method for passivating a surface of a semiconductor and related systems |
10435790, |
Nov 01 2016 |
ASM IP Holding B.V. |
Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap |
10438965, |
Dec 22 2014 |
ASM IP Holding B.V. |
Semiconductor device and manufacturing method thereof |
10446393, |
May 08 2017 |
ASM IP Holding B.V. |
Methods for forming silicon-containing epitaxial layers and related semiconductor device structures |
10458018, |
Jun 26 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Structures including metal carbide material, devices including the structures, and methods of forming same |
10468251, |
Feb 19 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming spacers using silicon nitride film for spacer-defined multiple patterning |
10468261, |
Feb 15 2017 |
ASM IP HOLDING B V |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
10468262, |
Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures |
10480072, |
Apr 06 2009 |
ASM IP HOLDING B V |
Semiconductor processing reactor and components thereof |
10483099, |
Jul 26 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming thermally stable organosilicon polymer film |
10501866, |
Mar 09 2016 |
ASM IP Holding B.V. |
Gas distribution apparatus for improved film uniformity in an epitaxial system |
10504742, |
May 31 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of atomic layer etching using hydrogen plasma |
10510536, |
Mar 29 2018 |
ASM IP Holding B.V. |
Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber |
10529542, |
Mar 11 2015 |
ASM IP Holdings B.V. |
Cross-flow reactor and method |
10529554, |
Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
10529563, |
Mar 29 2017 |
ASM IP Holdings B.V. |
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
10535516, |
Feb 01 2018 |
ASM IP Holdings B.V. |
Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures |
10541173, |
Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
10541333, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures |
10559458, |
Nov 26 2018 |
ASM IP Holding B.V. |
Method of forming oxynitride film |
10561975, |
Oct 07 2014 |
ASM IP Holdings B.V. |
Variable conductance gas distribution apparatus and method |
10566223, |
Aug 28 2012 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Systems and methods for dynamic semiconductor process scheduling |
10590535, |
Jul 26 2017 |
ASM IP HOLDING B V |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
10600673, |
Jul 07 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Magnetic susceptor to baseplate seal |
10604847, |
Mar 18 2014 |
ASM IP Holding B.V. |
Gas distribution system, reactor including the system, and methods of using the same |
10605530, |
Jul 26 2017 |
ASM IP Holding B.V. |
Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace |
10607895, |
Sep 18 2017 |
ASM IP HOLDING B V |
Method for forming a semiconductor device structure comprising a gate fill metal |
10612136, |
Jun 29 2018 |
ASM IP HOLDING B V ; ASM IP Holding, B.V. |
Temperature-controlled flange and reactor system including same |
10612137, |
Jul 08 2016 |
ASM IP HOLDING B V |
Organic reactants for atomic layer deposition |
10622375, |
Nov 07 2016 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by using the method |
10643826, |
Oct 26 2016 |
ASM IP HOLDING B V |
Methods for thermally calibrating reaction chambers |
10643904, |
Nov 01 2016 |
ASM IP HOLDING B V |
Methods for forming a semiconductor device and related semiconductor device structures |
10644025, |
Nov 07 2016 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by using the method |
10655221, |
Feb 09 2017 |
ASM IP Holding B.V. |
Method for depositing oxide film by thermal ALD and PEALD |
10658181, |
Feb 20 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of spacer-defined direct patterning in semiconductor fabrication |
10658205, |
Sep 28 2017 |
ASM IP HOLDING B V |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
10665452, |
May 02 2016 |
ASM IP Holdings B.V. |
Source/drain performance through conformal solid state doping |
10672636, |
Aug 09 2017 |
ASM IP Holding B.V. |
Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
10683571, |
Feb 25 2014 |
ASM IP Holding B.V. |
Gas supply manifold and method of supplying gases to chamber using same |
10685834, |
Jul 05 2017 |
ASM IP Holdings B.V. |
Methods for forming a silicon germanium tin layer and related semiconductor device structures |
10692741, |
Aug 08 2017 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Radiation shield |
10707106, |
Jun 06 2011 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules |
10714315, |
Oct 12 2012 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Semiconductor reaction chamber showerhead |
10714335, |
Apr 25 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of depositing thin film and method of manufacturing semiconductor device |
10714350, |
Nov 01 2016 |
ASM IP Holdings, B.V.; ASM IP HOLDING B V |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
10714385, |
Jul 19 2016 |
ASM IP Holding B.V. |
Selective deposition of tungsten |
10720322, |
Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on top surface |
10720331, |
Nov 01 2016 |
ASM IP Holdings, B.V. |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
10731249, |
Feb 15 2018 |
ASM IP HOLDING B V |
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
10734223, |
Oct 10 2017 |
ASM IP Holding B.V. |
Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
10734244, |
Nov 16 2017 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by the same |
10734497, |
Jul 18 2017 |
ASM IP HOLDING B V |
Methods for forming a semiconductor device structure and related semiconductor device structures |
10741385, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
10755922, |
Jul 03 2018 |
ASM IP HOLDING B V |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
10755923, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
10767789, |
Jul 16 2018 |
ASM IP Holding B.V. |
Diaphragm valves, valve components, and methods for forming valve components |
10770286, |
May 08 2017 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
10770336, |
Aug 08 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate lift mechanism and reactor including same |
10784102, |
Dec 22 2016 |
ASM IP Holding B.V. |
Method of forming a structure on a substrate |
10787741, |
Aug 21 2014 |
ASM IP Holding B.V. |
Method and system for in situ formation of gas-phase compounds |
10797133, |
Jun 21 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
10801106, |
Dec 15 2016 |
ASM IP Holding B.V. |
Shower plate structure for exhausting deposition inhibiting gas |
10804098, |
Aug 14 2009 |
ASM IP HOLDING B V |
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
10811256, |
Oct 16 2018 |
ASM IP Holding B.V. |
Method for etching a carbon-containing feature |
10818758, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
10829852, |
Aug 16 2018 |
ASM IP Holding B.V. |
Gas distribution device for a wafer processing apparatus |
10832903, |
Oct 28 2011 |
ASM IP Holding B.V. |
Process feed management for semiconductor substrate processing |
10844484, |
Sep 22 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
10844486, |
Apr 06 2009 |
ASM IP HOLDING B V |
Semiconductor processing reactor and components thereof |
10847365, |
Oct 11 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming conformal silicon carbide film by cyclic CVD |
10847366, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
10847371, |
Mar 27 2018 |
ASM IP Holding B.V. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
10851456, |
Apr 21 2016 |
ASM IP Holding B.V. |
Deposition of metal borides |
10854498, |
Jul 15 2011 |
ASM IP Holding B.V.; ASM JAPAN K K |
Wafer-supporting device and method for producing same |
10858737, |
Jul 28 2014 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Showerhead assembly and components thereof |
10865475, |
Apr 21 2016 |
ASM IP HOLDING B V |
Deposition of metal borides and silicides |
10867786, |
Mar 30 2018 |
ASM IP Holding B.V. |
Substrate processing method |
10867788, |
Dec 28 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming a structure on a substrate |
10872771, |
Jan 16 2018 |
ASM IP Holding B. V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
10883175, |
Aug 09 2018 |
ASM IP HOLDING B V |
Vertical furnace for processing substrates and a liner for use therein |
10886123, |
Jun 02 2017 |
ASM IP Holding B.V. |
Methods for forming low temperature semiconductor layers and related semiconductor device structures |
10892156, |
May 08 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
10896820, |
Feb 14 2018 |
ASM IP HOLDING B V |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
10910262, |
Nov 16 2017 |
ASM IP HOLDING B V |
Method of selectively depositing a capping layer structure on a semiconductor device structure |
10914004, |
Jun 29 2018 |
ASM IP Holding B.V. |
Thin-film deposition method and manufacturing method of semiconductor device |
10923344, |
Oct 30 2017 |
ASM IP HOLDING B V |
Methods for forming a semiconductor structure and related semiconductor structures |
10928731, |
Sep 21 2017 |
ASM IP Holding B.V. |
Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same |
10934619, |
Nov 15 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas supply unit and substrate processing apparatus including the gas supply unit |
10941490, |
Oct 07 2014 |
ASM IP Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
10943771, |
Oct 26 2016 |
ASM IP Holding B.V. |
Methods for thermally calibrating reaction chambers |
10950432, |
Apr 25 2017 |
ASM IP Holding B.V. |
Method of depositing thin film and method of manufacturing semiconductor device |
10975470, |
Feb 23 2018 |
ASM IP Holding B.V. |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
11001925, |
Dec 19 2016 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11004977, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures |
11015245, |
Mar 19 2014 |
ASM IP Holding B.V. |
Gas-phase reactor and system having exhaust plenum and components thereof |
11018002, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
11018047, |
Jan 25 2018 |
ASM IP Holding B.V. |
Hybrid lift pin |
11022879, |
Nov 24 2017 |
ASM IP Holding B.V. |
Method of forming an enhanced unexposed photoresist layer |
11024523, |
Sep 11 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus and method |
11031242, |
Nov 07 2018 |
ASM IP Holding B.V. |
Methods for depositing a boron doped silicon germanium film |
11049751, |
Sep 14 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
11053591, |
Aug 06 2018 |
ASM IP Holding B.V. |
Multi-port gas injection system and reactor system including same |
11056344, |
Aug 30 2017 |
ASM IP HOLDING B V |
Layer forming method |
11056567, |
May 11 2018 |
ASM IP Holding B.V. |
Method of forming a doped metal carbide film on a substrate and related semiconductor device structures |
11069510, |
Aug 30 2017 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11081345, |
Feb 06 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of post-deposition treatment for silicon oxide film |
11087997, |
Oct 31 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus for processing substrates |
11088002, |
Mar 29 2018 |
ASM IP HOLDING B V |
Substrate rack and a substrate processing system and method |
11094546, |
Oct 05 2017 |
ASM IP Holding B.V. |
Method for selectively depositing a metallic film on a substrate |
11094582, |
Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
11101370, |
May 02 2016 |
ASM IP Holding B.V. |
Method of forming a germanium oxynitride film |
11107676, |
Jul 28 2016 |
ASM IP Holding B.V. |
Method and apparatus for filling a gap |
11114283, |
Mar 16 2018 |
ASM IP Holding B.V. |
Reactor, system including the reactor, and methods of manufacturing and using same |
11114294, |
Mar 08 2019 |
ASM IP Holding B.V. |
Structure including SiOC layer and method of forming same |
11127589, |
Feb 01 2019 |
ASM IP Holding B.V. |
Method of topology-selective film formation of silicon oxide |
11127617, |
Nov 27 2017 |
ASM IP HOLDING B V |
Storage device for storing wafer cassettes for use with a batch furnace |
11139191, |
Aug 09 2017 |
ASM IP HOLDING B V |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
11139308, |
Dec 29 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Atomic layer deposition of III-V compounds to form V-NAND devices |
11158513, |
Dec 13 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
11164955, |
Jul 18 2017 |
ASM IP Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures |
11168395, |
Jun 29 2018 |
ASM IP Holding B.V. |
Temperature-controlled flange and reactor system including same |
11171025, |
Jan 22 2019 |
ASM IP Holding B.V. |
Substrate processing device |
11205585, |
Jul 28 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus and method of operating the same |
11217444, |
Nov 30 2018 |
ASM IP HOLDING B V |
Method for forming an ultraviolet radiation responsive metal oxide-containing film |
11222772, |
Dec 14 2016 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11227782, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
11227789, |
Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
11230766, |
Mar 29 2018 |
ASM IP HOLDING B V |
Substrate processing apparatus and method |
11232963, |
Oct 03 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and method |
11233133, |
Oct 21 2015 |
ASM IP Holding B.V. |
NbMC layers |
11242598, |
Jun 26 2015 |
ASM IP Holding B.V. |
Structures including metal carbide material, devices including the structures, and methods of forming same |
11244825, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
11251035, |
Dec 22 2016 |
ASM IP Holding B.V. |
Method of forming a structure on a substrate |
11251040, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method including treatment step and apparatus for same |
11251068, |
Oct 19 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and substrate processing method |
11270899, |
Jun 04 2018 |
ASM IP Holding B.V. |
Wafer handling chamber with moisture reduction |
11274369, |
Sep 11 2018 |
ASM IP Holding B.V. |
Thin film deposition method |
11282698, |
Jul 19 2019 |
ASM IP Holding B.V. |
Method of forming topology-controlled amorphous carbon polymer film |
11286558, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
11286562, |
Jun 08 2018 |
ASM IP Holding B.V. |
Gas-phase chemical reactor and method of using same |
11289326, |
May 07 2019 |
ASM IP Holding B.V. |
Method for reforming amorphous carbon polymer film |
11295980, |
Aug 30 2017 |
ASM IP HOLDING B V |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
11296189, |
Jun 21 2018 |
ASM IP Holding B.V. |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
11306395, |
Jun 28 2017 |
ASM IP HOLDING B V |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
11315794, |
Oct 21 2019 |
ASM IP Holding B.V. |
Apparatus and methods for selectively etching films |
11339476, |
Oct 08 2019 |
ASM IP Holding B.V. |
Substrate processing device having connection plates, substrate processing method |
11342216, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
11345999, |
Jun 06 2019 |
ASM IP Holding B.V. |
Method of using a gas-phase reactor system including analyzing exhausted gas |
11355338, |
May 10 2019 |
ASM IP Holding B.V. |
Method of depositing material onto a surface and structure formed according to the method |
11361990, |
May 28 2018 |
ASM IP Holding B.V. |
Substrate processing method and device manufactured by using the same |
11374112, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures |
11378337, |
Mar 28 2019 |
ASM IP Holding B.V. |
Door opener and substrate processing apparatus provided therewith |
11387106, |
Feb 14 2018 |
ASM IP Holding B.V. |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
11387120, |
Sep 28 2017 |
ASM IP Holding B.V. |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
11390945, |
Jul 03 2019 |
ASM IP Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same |
11390946, |
Jan 17 2019 |
ASM IP Holding B.V. |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
11390950, |
Jan 10 2017 |
ASM IP HOLDING B V |
Reactor system and method to reduce residue buildup during a film deposition process |
11393690, |
Jan 19 2018 |
ASM IP HOLDING B V |
Deposition method |
11396702, |
Nov 15 2016 |
ASM IP Holding B.V. |
Gas supply unit and substrate processing apparatus including the gas supply unit |
11398382, |
Mar 27 2018 |
ASM IP Holding B.V. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
11401605, |
Nov 26 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11410851, |
Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
11411088, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
11414760, |
Oct 08 2018 |
ASM IP Holding B.V. |
Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same |
11417545, |
Aug 08 2017 |
ASM IP Holding B.V. |
Radiation shield |
11424119, |
Mar 08 2019 |
ASM IP HOLDING B V |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
11430640, |
Jul 30 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11430674, |
Aug 22 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
11437241, |
Apr 08 2020 |
ASM IP Holding B.V. |
Apparatus and methods for selectively etching silicon oxide films |
11443926, |
Jul 30 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11447861, |
Dec 15 2016 |
ASM IP HOLDING B V |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
11447864, |
Apr 19 2019 |
ASM IP Holding B.V. |
Layer forming method and apparatus |
11453943, |
May 25 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
11453946, |
Jun 06 2019 |
ASM IP Holding B.V. |
Gas-phase reactor system including a gas detector |
11469098, |
May 08 2018 |
ASM IP Holding B.V. |
Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures |
11473195, |
Mar 01 2018 |
ASM IP Holding B.V. |
Semiconductor processing apparatus and a method for processing a substrate |
11476109, |
Jun 11 2019 |
ASM IP Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
11482412, |
Jan 19 2018 |
ASM IP HOLDING B V |
Method for depositing a gap-fill layer by plasma-assisted deposition |
11482418, |
Feb 20 2018 |
ASM IP Holding B.V. |
Substrate processing method and apparatus |
11482533, |
Feb 20 2019 |
ASM IP Holding B.V. |
Apparatus and methods for plug fill deposition in 3-D NAND applications |
11488819, |
Dec 04 2018 |
ASM IP Holding B.V. |
Method of cleaning substrate processing apparatus |
11488854, |
Mar 11 2020 |
ASM IP Holding B.V. |
Substrate handling device with adjustable joints |
11492703, |
Jun 27 2018 |
ASM IP HOLDING B V |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
11495459, |
Sep 04 2019 |
ASM IP Holding B.V. |
Methods for selective deposition using a sacrificial capping layer |
11499222, |
Jun 27 2018 |
ASM IP HOLDING B V |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
11499226, |
Nov 02 2018 |
ASM IP Holding B.V. |
Substrate supporting unit and a substrate processing device including the same |
11501956, |
Oct 12 2012 |
ASM IP Holding B.V. |
Semiconductor reaction chamber showerhead |
11501968, |
Nov 15 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for providing a semiconductor device with silicon filled gaps |
11501973, |
Jan 16 2018 |
ASM IP Holding B.V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
11515187, |
May 01 2020 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Fast FOUP swapping with a FOUP handler |
11515188, |
May 16 2019 |
ASM IP Holding B.V. |
Wafer boat handling device, vertical batch furnace and method |
11521851, |
Feb 03 2020 |
ASM IP HOLDING B V |
Method of forming structures including a vanadium or indium layer |
11527400, |
Aug 23 2019 |
ASM IP Holding B.V. |
Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane |
11527403, |
Dec 19 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
11530483, |
Jun 21 2018 |
ASM IP Holding B.V. |
Substrate processing system |
11530876, |
Apr 24 2020 |
ASM IP Holding B.V. |
Vertical batch furnace assembly comprising a cooling gas supply |
11532757, |
Oct 27 2016 |
ASM IP Holding B.V. |
Deposition of charge trapping layers |
11551912, |
Jan 20 2020 |
ASM IP Holding B.V. |
Method of forming thin film and method of modifying surface of thin film |
11551925, |
Apr 01 2019 |
ASM IP Holding B.V. |
Method for manufacturing a semiconductor device |
11557474, |
Jul 29 2019 |
ASM IP Holding B.V. |
Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation |
11562901, |
Sep 25 2019 |
ASM IP Holding B.V. |
Substrate processing method |
11572620, |
Nov 06 2018 |
ASM IP Holding B.V. |
Methods for selectively depositing an amorphous silicon film on a substrate |
11581186, |
Dec 15 2016 |
ASM IP HOLDING B V |
Sequential infiltration synthesis apparatus |
11581220, |
Aug 30 2017 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
11587814, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
11587815, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
11587821, |
Aug 08 2017 |
ASM IP Holding B.V. |
Substrate lift mechanism and reactor including same |
11594450, |
Aug 22 2019 |
ASM IP HOLDING B V |
Method for forming a structure with a hole |
11594600, |
Nov 05 2019 |
ASM IP Holding B.V. |
Structures with doped semiconductor layers and methods and systems for forming same |
11605528, |
Jul 09 2019 |
ASM IP Holding B.V. |
Plasma device using coaxial waveguide, and substrate treatment method |
11610774, |
Oct 02 2019 |
ASM IP Holding B.V. |
Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process |
11610775, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
11615970, |
Jul 17 2019 |
ASM IP HOLDING B V |
Radical assist ignition plasma system and method |
11615980, |
Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
11626308, |
May 13 2020 |
ASM IP Holding B.V. |
Laser alignment fixture for a reactor system |
11626316, |
Nov 20 2019 |
ASM IP Holding B.V. |
Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure |
11629406, |
Mar 09 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
11629407, |
Feb 22 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus and method for processing substrates |
11637011, |
Oct 16 2019 |
ASM IP Holding B.V. |
Method of topology-selective film formation of silicon oxide |
11637014, |
Oct 17 2019 |
ASM IP Holding B.V. |
Methods for selective deposition of doped semiconductor material |
11639548, |
Aug 21 2019 |
ASM IP Holding B.V. |
Film-forming material mixed-gas forming device and film forming device |
11639811, |
Nov 27 2017 |
ASM IP HOLDING B V |
Apparatus including a clean mini environment |
11643724, |
Jul 18 2019 |
ASM IP Holding B.V. |
Method of forming structures using a neutral beam |
11644758, |
Jul 17 2020 |
ASM IP Holding B.V. |
Structures and methods for use in photolithography |
11646184, |
Nov 29 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11646197, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
11646204, |
Jun 24 2020 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming a layer provided with silicon |
11646205, |
Oct 29 2019 |
ASM IP Holding B.V. |
Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
11649546, |
Jul 08 2016 |
ASM IP Holding B.V. |
Organic reactants for atomic layer deposition |
11658029, |
Dec 14 2018 |
ASM IP HOLDING B V |
Method of forming a device structure using selective deposition of gallium nitride and system for same |
11658030, |
Mar 29 2017 |
ASM IP Holding B.V. |
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
11658035, |
Jun 30 2020 |
ASM IP HOLDING B V |
Substrate processing method |
11664199, |
Oct 19 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and substrate processing method |
11664245, |
Jul 16 2019 |
ASM IP Holding B.V. |
Substrate processing device |
11664267, |
Jul 10 2019 |
ASM IP Holding B.V. |
Substrate support assembly and substrate processing device including the same |
11674220, |
Jul 20 2020 |
ASM IP Holding B.V. |
Method for depositing molybdenum layers using an underlayer |
11676812, |
Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on top/bottom portions |
11680839, |
Aug 05 2019 |
ASM IP Holding B.V. |
Liquid level sensor for a chemical source vessel |
11682572, |
Nov 27 2017 |
ASM IP Holdings B.V. |
Storage device for storing wafer cassettes for use with a batch furnace |
11685991, |
Feb 14 2018 |
ASM IP HOLDING B V ; Universiteit Gent |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
11688603, |
Jul 17 2019 |
ASM IP Holding B.V. |
Methods of forming silicon germanium structures |
11694892, |
Jul 28 2016 |
ASM IP Holding B.V. |
Method and apparatus for filling a gap |
11695054, |
Jul 18 2017 |
ASM IP Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures |
11705333, |
May 21 2020 |
ASM IP Holding B.V. |
Structures including multiple carbon layers and methods of forming and using same |
11718913, |
Jun 04 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas distribution system and reactor system including same |
11725277, |
Jul 20 2011 |
ASM IP HOLDING B V |
Pressure transmitter for a semiconductor processing environment |
11725280, |
Aug 26 2020 |
ASM IP Holding B.V. |
Method for forming metal silicon oxide and metal silicon oxynitride layers |
11735414, |
Feb 06 2018 |
ASM IP Holding B.V. |
Method of post-deposition treatment for silicon oxide film |
11735422, |
Oct 10 2019 |
ASM IP HOLDING B V |
Method of forming a photoresist underlayer and structure including same |
11735445, |
Oct 31 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus for processing substrates |
11742189, |
Mar 12 2015 |
ASM IP Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same |
11742198, |
Mar 08 2019 |
ASM IP Holding B.V. |
Structure including SiOCN layer and method of forming same |
11746414, |
Jul 03 2019 |
ASM IP Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same |
11749562, |
Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
11767589, |
May 29 2020 |
ASM IP Holding B.V. |
Substrate processing device |
11769670, |
Dec 13 2018 |
ASM IP Holding B.V. |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
11769682, |
Aug 09 2017 |
ASM IP Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
11776846, |
Feb 07 2020 |
ASM IP Holding B.V. |
Methods for depositing gap filling fluids and related systems and devices |
11781221, |
May 07 2019 |
ASM IP Holding B.V. |
Chemical source vessel with dip tube |
11781243, |
Feb 17 2020 |
ASM IP Holding B.V. |
Method for depositing low temperature phosphorous-doped silicon |
11795545, |
Oct 07 2014 |
ASM IP Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
11798830, |
May 01 2020 |
ASM IP Holding B.V. |
Fast FOUP swapping with a FOUP handler |
11798834, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
11798999, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
11802338, |
Jul 26 2017 |
ASM IP Holding B.V. |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
11804364, |
May 19 2020 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11804388, |
Sep 11 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and method |
11810788, |
Nov 01 2016 |
ASM IP Holding B.V. |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
11814715, |
Jun 27 2018 |
ASM IP Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
11814747, |
Apr 24 2019 |
ASM IP Holding B.V. |
Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly |
11821078, |
Apr 15 2020 |
ASM IP HOLDING B V |
Method for forming precoat film and method for forming silicon-containing film |
11823866, |
Apr 02 2020 |
ASM IP Holding B.V. |
Thin film forming method |
11823876, |
Sep 05 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus |
11827978, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
11827981, |
Oct 14 2020 |
ASM IP HOLDING B V |
Method of depositing material on stepped structure |
11828707, |
Feb 04 2020 |
ASM IP Holding B.V. |
Method and apparatus for transmittance measurements of large articles |
11830730, |
Aug 29 2017 |
ASM IP HOLDING B V |
Layer forming method and apparatus |
11830738, |
Apr 03 2020 |
ASM IP Holding B.V. |
Method for forming barrier layer and method for manufacturing semiconductor device |
11837483, |
Jun 04 2018 |
ASM IP Holding B.V. |
Wafer handling chamber with moisture reduction |
11837494, |
Mar 11 2020 |
ASM IP Holding B.V. |
Substrate handling device with adjustable joints |
11840761, |
Dec 04 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11848200, |
May 08 2017 |
ASM IP Holding B.V. |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
11851755, |
Dec 15 2016 |
ASM IP Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
11866823, |
Nov 02 2018 |
ASM IP Holding B.V. |
Substrate supporting unit and a substrate processing device including the same |
11873557, |
Oct 22 2020 |
ASM IP HOLDING B V |
Method of depositing vanadium metal |
11876008, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
11876356, |
Mar 11 2020 |
ASM IP Holding B.V. |
Lockout tagout assembly and system and method of using same |
11885013, |
Dec 17 2019 |
ASM IP Holding B.V. |
Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
11885020, |
Dec 22 2020 |
ASM IP Holding B.V. |
Transition metal deposition method |
11885023, |
Oct 01 2018 |
ASM IP Holding B.V. |
Substrate retaining apparatus, system including the apparatus, and method of using same |
11887857, |
Apr 24 2020 |
ASM IP Holding B.V. |
Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element |
11891696, |
Nov 30 2020 |
ASM IP Holding B.V. |
Injector configured for arrangement within a reaction chamber of a substrate processing apparatus |
11898242, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film |
11898243, |
Apr 24 2020 |
ASM IP Holding B.V. |
Method of forming vanadium nitride-containing layer |
11901175, |
Mar 08 2019 |
ASM IP Holding B.V. |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
11901179, |
Oct 28 2020 |
ASM IP HOLDING B V |
Method and device for depositing silicon onto substrates |
11908684, |
Jun 11 2019 |
ASM IP Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
11908733, |
May 28 2018 |
ASM IP Holding B.V. |
Substrate processing method and device manufactured by using the same |
11915929, |
Nov 26 2019 |
ASM IP Holding B.V. |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
9324811, |
Sep 26 2012 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Structures and devices including a tensile-stressed silicon arsenic layer and methods of forming same |
9384987, |
Apr 04 2012 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Metal oxide protective layer for a semiconductor device |
9394608, |
Apr 06 2009 |
ASM IP HOLDING B V |
Semiconductor processing reactor and components thereof |
9404587, |
Apr 24 2014 |
ASM IP Holding B.V |
Lockout tagout for semiconductor vacuum valve |
9412564, |
Jul 22 2013 |
ASM IP Holding B.V. |
Semiconductor reaction chamber with plasma capabilities |
9447498, |
Mar 18 2014 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for performing uniform processing in gas system-sharing multiple reaction chambers |
9455138, |
Nov 10 2015 |
ASM IP HOLDING B V |
Method for forming dielectric film in trenches by PEALD using H-containing gas |
9478415, |
Feb 13 2015 |
ASM IP Holding B.V. |
Method for forming film having low resistance and shallow junction depth |
9484191, |
Mar 08 2013 |
ASM IP Holding B.V. |
Pulsed remote plasma method and system |
9543180, |
Aug 01 2014 |
ASM IP Holding B.V. |
Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum |
9556516, |
Oct 09 2013 |
ASM IP Holding B.V; ASM IP HOLDING B V |
Method for forming Ti-containing film by PEALD using TDMAT or TDEAT |
9558931, |
Jul 27 2012 |
ASM IP HOLDING B V |
System and method for gas-phase sulfur passivation of a semiconductor surface |
9589770, |
Mar 08 2013 |
ASM IP Holding B.V. |
Method and systems for in-situ formation of intermediate reactive species |
9605342, |
Sep 12 2012 |
ASM IP Holding B.V. |
Process gas management for an inductively-coupled plasma deposition reactor |
9607837, |
Dec 21 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming silicon oxide cap layer for solid state diffusion process |
9627221, |
Dec 28 2015 |
ASM IP Holding B.V. |
Continuous process incorporating atomic layer etching |
9640416, |
Dec 26 2012 |
ASM IP Holding B.V. |
Single-and dual-chamber module-attachable wafer-handling chamber |
9647114, |
Aug 14 2015 |
ASM IP Holding B.V. |
Methods of forming highly p-type doped germanium tin films and structures and devices including the films |
9657845, |
Oct 07 2014 |
ASM IP Holding B.V. |
Variable conductance gas distribution apparatus and method |
9659799, |
Aug 28 2012 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Systems and methods for dynamic semiconductor process scheduling |
9711345, |
Aug 25 2015 |
ASM IP HOLDING B V |
Method for forming aluminum nitride-based film by PEALD |
9735024, |
Dec 28 2015 |
ASM IP Holding B.V. |
Method of atomic layer etching using functional group-containing fluorocarbon |
9754779, |
Feb 19 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
9790595, |
Jul 12 2013 |
ASM IP Holding B.V. |
Method and system to reduce outgassing in a reaction chamber |
9793115, |
Aug 14 2013 |
ASM IP Holding B.V. |
Structures and devices including germanium-tin films and methods of forming same |
9793135, |
Jul 14 2016 |
ASM IP HOLDING B V |
Method of cyclic dry etching using etchant film |
9793148, |
Jun 22 2011 |
ASM Japan K.K. |
Method for positioning wafers in multiple wafer transport |
9812320, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
9859151, |
Jul 08 2016 |
ASM IP HOLDING B V |
Selective film deposition method to form air gaps |
9887082, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
9890456, |
Aug 21 2014 |
ASM IP Holding B.V. |
Method and system for in situ formation of gas-phase compounds |
9891521, |
Nov 19 2014 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for depositing thin film |
9892908, |
Oct 28 2011 |
ASM IP HOLDING B V |
Process feed management for semiconductor substrate processing |
9899291, |
Jul 13 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for protecting layer by forming hydrocarbon-based extremely thin film |
9899405, |
Dec 22 2014 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Semiconductor device and manufacturing method thereof |
9905420, |
Dec 01 2015 |
ASM IP HOLDING B V |
Methods of forming silicon germanium tin films and structures and devices including the films |
9909214, |
Oct 15 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for depositing dielectric film in trenches by PEALD |
9916980, |
Dec 15 2016 |
ASM IP HOLDING B V |
Method of forming a structure on a substrate |
9960072, |
Sep 29 2015 |
ASM IP Holding B.V. |
Variable adjustment for precise matching of multiple chamber cavity housings |
D753269, |
Jan 09 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Top plate |
D789888, |
Jan 08 2016 |
ASM IP Holding B.V. |
Electrode plate for semiconductor manufacturing apparatus |
D790041, |
Jan 08 2016 |
ASM IP Holding B.V. |
Gas dispersing plate for semiconductor manufacturing apparatus |
D799646, |
Aug 30 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Heater block |
D802546, |
Jan 08 2016 |
ASM IP Holding B.V. |
Outer wall of reactor for semiconductor manufacturing apparatus |
D807481, |
Apr 08 2016 |
Applied Materials, Inc |
Patterned heater pedestal |
D820679, |
Nov 30 2016 |
CARECAPS |
Bottle cap assembly |
D829306, |
Jul 06 2016 |
ASM IP Holding B.V. |
Shower plate |
D830981, |
Apr 07 2017 |
ASM IP HOLDING B V ; ASM IP Holding B.V. |
Susceptor for semiconductor substrate processing apparatus |
D834686, |
Dec 15 2016 |
ASM IP Holding B.V. |
Shower plate |
D858281, |
Dec 03 2015 |
Integrated Liner Technologies, Inc. |
Cap with septa |
D870249, |
May 27 2014 |
BLUCHER METAL A/S |
Drain channel |
D880437, |
Feb 01 2018 |
ASM IP Holding B.V. |
Gas supply plate for semiconductor manufacturing apparatus |
D900036, |
Aug 24 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Heater electrical connector and adapter |
D900760, |
Jul 24 2018 |
HITACHI HIGH-TECH CORPORATION |
Ion shield plate for semiconductor manufacturing apparatus |
D901407, |
Jul 24 2018 |
HITACHI HIGH-TECH CORPORATION |
Integrated type ion shield for semiconductor manufacturing apparatus |
D903477, |
Jan 24 2018 |
ASM IP HOLDING B V |
Metal clamp |
D913980, |
Feb 01 2018 |
ASM IP Holding B.V. |
Gas supply plate for semiconductor manufacturing apparatus |
D922229, |
Jun 05 2019 |
ASM IP Holding B.V. |
Device for controlling a temperature of a gas supply unit |
D924824, |
Jul 24 2018 |
HITACHI HIGH-TECH CORPORATION |
Ion shield plate base for semiconductor manufacturing apparatus |
D930782, |
Aug 22 2019 |
ASM IP Holding B.V. |
Gas distributor |
D931978, |
Jun 27 2019 |
ASM IP Holding B.V. |
Showerhead vacuum transport |
D935572, |
May 24 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas channel plate |
D940837, |
Aug 22 2019 |
ASM IP Holding B.V. |
Electrode |
D944946, |
Jun 14 2019 |
ASM IP Holding B.V. |
Shower plate |
D947913, |
May 17 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor shaft |
D948463, |
Oct 24 2018 |
ASM IP Holding B.V. |
Susceptor for semiconductor substrate supporting apparatus |
D949319, |
Aug 22 2019 |
ASM IP Holding B.V. |
Exhaust duct |
D965044, |
Aug 19 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor shaft |
D965524, |
Aug 19 2019 |
ASM IP Holding B.V. |
Susceptor support |
D971192, |
Jun 03 2019 |
SPACE EXPLORATION TECHNOLOGIES CORP |
Antenna apparatus |
D971900, |
Jun 03 2019 |
SPACE EXPLORATION TECHNOLOGIES CORP |
Antenna apparatus |
D975665, |
May 17 2019 |
ASM IP Holding B.V. |
Susceptor shaft |
D976242, |
Jun 03 2019 |
SPACE EXPLORATION TECHNOLOGIES CORP |
Antenna apparatus |
D979506, |
Aug 22 2019 |
ASM IP Holding B.V. |
Insulator |
D980813, |
May 11 2021 |
ASM IP HOLDING B V |
Gas flow control plate for substrate processing apparatus |
D980814, |
May 11 2021 |
ASM IP HOLDING B V |
Gas distributor for substrate processing apparatus |
D981973, |
May 11 2021 |
ASM IP HOLDING B V |
Reactor wall for substrate processing apparatus |
ER3967, |
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ER4489, |
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ER4840, |
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ER6015, |
|
|
|
ER6328, |
|
|
|
ER8750, |
|
|
|