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Patent
D699692
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Priority
Jan 19 2012
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Filed
Jan 19 2012
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Issued
Feb 18 2014
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Expiry
Feb 18 2028
TERM.DISCL.
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Assg.orig
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Entity
unknown
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10
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14
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n/a
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The ornamental design for an upper liner, as shown and described.
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FIG. 1 is a top perspective view of an upper liner showing my new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a rear elevational view thereof;
FIG. 6 is a front elevational view thereof;
FIG. 7 is a side elevational view thereof, the opposite side being a mirror image; and,
FIG. 8 is a cross-sectional view thereof, taken along line 8-8 in FIG. 3.
The broken line portions illustrate environmental structure and form no part of the claimed design.
Yousif, Imad
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Title |
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Patent |
Priority |
Assignee |
Title |
6170429, |
Sep 30 1998 |
Lam Research Corporation |
Chamber liner for semiconductor process chambers |
6277237, |
Sep 30 1998 |
Lam Research Corporation |
Chamber liner for semiconductor process chambers |
7011039, |
Jul 07 2000 |
Applied Materials, Inc |
Multi-purpose processing chamber with removable chamber liner |
7234412, |
Apr 11 2002 |
Micron Technology, Inc. |
Semiconductor substrate deposition processor chamber liner apparatus |
7942969, |
May 30 2007 |
Applied Materials, Inc. |
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7987814, |
Apr 07 2008 |
Applied Materials, Inc.; Applied Materials, Inc |
Lower liner with integrated flow equalizer and improved conductance |
8118938, |
Apr 07 2008 |
Applied Materials, Inc. |
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8282736, |
Apr 07 2008 |
Applied Materials, Inc. |
Lower liner with integrated flow equalizer and improved conductance |
8313578, |
Jan 28 2008 |
Applied Materials, Inc. |
Etching chamber having flow equalizer and lower liner |
8440019, |
Apr 07 2008 |
Applied Materials, Inc. |
Lower liner with integrated flow equalizer and improved conductance |
20020069970, |
|
|
|
20090188625, |
|
|
|
D484856, |
Dec 05 2001 |
SUGATSUNE KOGYO CO , LTD |
Edge liner |
D593969, |
Oct 10 2006 |
Tokyo Electron Limited |
Processing chamber for manufacturing semiconductors |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a