FIG. 1 is a perspective view of a gas distribution plate showing my new design;
FIG. 2 is a top plan view thereof, the bottom plan view being a mirror image of the top plan view;
FIG. 3 is a front elevational view thereof, and the left side elevational view, the right side elevational view, and the rear elevational view being a mirror image of the front elevational view;
FIG. 4A is an enlarged cross-sectional view taken along line 4A-4A of FIG. 2;
FIG. 4B is an enlarged cross-sectional view taken along line 4B-4B of FIG. 2;
FIG. 4C is an enlarged cross-sectional view taken along line 4C-4C of FIG. 2;
FIG. 4D is an enlarged cross-sectional view taken along line 4D-4D of FIG. 2;
FIG. 5 is a top plan view of a gas distribution plate showing a broken line where one or more rows of apertures/holes with different sizes may be located. The one or more rows of apertures/holes may be arranged in a pattern of increasing diameter with radial distance as the pattern shown in FIG. 1; and,
FIG. 6 is a top plan view of a gas distribution plate according to another embodiment of FIG. 1 thereof, the bottom plan view being a mirror image of the top plan view.
The broken away symbols in the drawings indicate the appearance of any portion of the article between the break lines forms no part of the claimed design.