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Patent
D981970
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Priority
Mar 04 2021
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Filed
Sep 03 2021
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Issued
Mar 28 2023
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Expiry
Mar 28 2038
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Assg.orig
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Entity
unknown
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2
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12
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n/a
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The ornamental design for a substrate mounting plate for substrate processing apparatus, as shown and described.
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FIG. 1 is a front, top and right side perspective view of a substrate mounting plate for substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view.
FIG. 4 is a top plan view thereof;
FIG. 5 is a bottom plan view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a right side elevational view thereof; and,
FIG. 8 is a view take along line 8-8 in FIG. 2.
Yasui, Takeshi, Inada, Tetsuaki
Patent |
Priority |
Assignee |
Title |
20100108500, |
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D908645, |
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D937329, |
Mar 23 2020 |
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Sputter target for a physical vapor deposition chamber |
D940765, |
Dec 02 2020 |
Applied Materials, Inc |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a