Plasma source liner

Abstract

Description

FIG. 1 is an isometric top view of a plasma source liner.

FIG. 2 is an isometric bottom view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a side elevational view thereof, the other side elevational view being identical.

FIG. 6 is an end elevational view thereof, the other side elevational view being identical.

FIG. 7 is a cross-sectional view thereof taken along lines 7-7 of FIG. 3; and,

FIG. 8 is a cross-sectional view thereof taken along lines 8-8 of FIG. 5.

The oblique hatching shown in FIGS. 7 and 8 represents a refractory material.

Claims

The ornamental design for a plasma source liner, as shown and described.