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Patent
D802790
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Priority
Jun 12 2015
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Filed
Oct 30 2015
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Issued
Nov 14 2017
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Expiry
Nov 14 2032
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Assg.orig
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Entity
unknown
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18
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31
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n/a
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The ornamental design for a cover ring for a plasma processing apparatus, as shown and described.
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FIG. 1 is a front, top and right side perspective view of a cover ring for a plasma processing apparatus showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 6; and,
FIG. 9 is an enlarged portion view taken along line 9-9 of FIG. 8.
Tauchi, Susumu, Uemura, Takashi, Sato, Kohei
Patent |
Priority |
Assignee |
Title |
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D907593, |
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|
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ER5584, |
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ER8981, |
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Patent |
Priority |
Assignee |
Title |
6423175, |
Oct 06 1999 |
Taiwan Semiconductor Manufacturing Co., Ltd |
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8298046, |
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20030066484, |
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20050150452, |
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20080041820, |
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20080121620, |
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D404369, |
Aug 20 1997 |
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Manifold cover for use in a semiconductor wafer heat processing apparatus |
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D559993, |
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Cover ring |
D638550, |
Nov 13 2009 |
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Sample processing disk cover |
D638951, |
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Sample processing disk cover |
D658691, |
Mar 30 2011 |
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Liner for plasma processing apparatus |
D658693, |
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D667561, |
Nov 13 2009 |
DIASORIN ITALIA S P A |
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D699200, |
Sep 30 2011 |
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Electrode member for a plasma processing apparatus |
D703160, |
Jan 27 2011 |
HITACHI HIGH-TECH CORPORATION |
Grounded electrode for a plasma processing apparatus |
D716239, |
Nov 06 2013 |
Applied Materials, Inc |
Upper chamber liner |
D716240, |
Nov 07 2013 |
Applied Materials, Inc |
Lower chamber liner |
D717746, |
Nov 06 2013 |
Applied Materials, Inc |
Lower chamber liner |
D766849, |
May 15 2013 |
Ebara Corporation |
Substrate retaining ring |
D770992, |
Jun 12 2015 |
HITACHI HIGH-TECH CORPORATION |
Electrode cover for a plasma processing apparatus |
JP1052359, |
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JP1267921, |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a