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						 Patent  
						   D802790  
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						 Priority  
						Jun 12 2015 
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						 Filed 
						Oct 30 2015  
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						 Issued 
						Nov 14 2017 
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						 Expiry 
						Nov 14 2032 
					   
					   						
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						 Assg.orig 
						
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						 Entity 
						unknown 
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					    18 
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					    31 
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			  The ornamental design for a cover ring for a plasma processing apparatus, as shown and described. 
			  
			  
			  
			  
			 
		 | 
	
 
	
FIG. 1 is a front, top and right side perspective view of a cover ring for a plasma processing apparatus showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 6; and,
FIG. 9 is an enlarged portion view taken along line 9-9 of FIG. 8.
	
	Tauchi, Susumu, Uemura, Takashi, Sato, Kohei
	
	
	  
 	  	 | Patent | 
	  	 Priority | 
	  	 Assignee | 
	  	 Title | 
	  
	      
	 | 12080522,  | 
	 Apr 22 2020 | 
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	 | 12100577,  | 
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	 | D840365,  | 
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	 | D872859,  | 
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	 | D875053,  | 
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	 | D875054,  | 
	 Apr 28 2017 | 
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	 | D875055,  | 
	 Apr 28 2017 | 
	 Applied Materials, Inc | 
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	 | D881767,  | 
	 Nov 30 2018 | 
	 Warn Automotive, LLC | 
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	 | D882536,  | 
	 Apr 28 2017 | 
	 Applied Materials, Inc | 
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	 | D891636,  | 
	 Oct 25 2018 | 
	 HITACHI HIGH-TECH CORPORATION | 
	 Ring for a plasma processing apparatus | 
	 
    
	 | D907593,  | 
	 Jan 20 2017 | 
	 HITACHI HIGH-TECH CORPORATION | 
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	 | D913979,  | 
	 Aug 28 2019 | 
	 Applied Materials, Inc | 
	 Inner shield for a substrate processing chamber | 
	 
    
	 | D918273,  | 
	 May 14 2019 | 
	  | 
	 Shoe and float collar device | 
	 
    
	 | D925481,  | 
	 Dec 06 2018 | 
	 KOKUSAI ELECTRIC CORPORATION | 
	 Inlet liner for substrate processing apparatus | 
	 
    
	 | D931241,  | 
	 Aug 28 2019 | 
	 Applied Materials, Inc | 
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	 | D973609,  | 
	 Apr 22 2020 | 
	 Applied Materials, Inc | 
	 Upper shield with showerhead for a process chamber | 
	 
    
	 | ER5584,  | 
	  | 
	  | 
	  | 
	 
    
	 | ER8981,  | 
	  | 
	  | 
	  | 
	 
	
	
	
	  
 	  	 | Patent | 
	  	 Priority | 
	  	 Assignee | 
	  	 Title | 
	  
	      
	 | 6423175,  | 
	 Oct 06 1999 | 
	 Taiwan Semiconductor Manufacturing Co., Ltd | 
	 Apparatus and method for reducing particle contamination in an etcher | 
	 
    
	 | 7186171,  | 
	 Apr 22 2005 | 
	 Applied Materials, Inc | 
	 Composite retaining ring | 
	 
    
	 | 8298046,  | 
	 Oct 21 2009 | 
	 ESP SPARES, INC  | 
	 Retaining rings | 
	 
    
	 | 20030066484,  | 
	  | 
	  | 
	  | 
	 
    
	 | 20050150452,  | 
	  | 
	  | 
	  | 
	 
    
	 | 20050258280,  | 
	  | 
	  | 
	  | 
	 
    
	 | 20080041820,  | 
	  | 
	  | 
	  | 
	 
    
	 | 20080121620,  | 
	  | 
	  | 
	  | 
	 
    
	 | D404369,  | 
	 Aug 20 1997 | 
	 Tokyo Electron Limited | 
	 Manifold cover for use in a semiconductor wafer heat processing apparatus | 
	 
    
	 | D404370,  | 
	 Aug 20 1997 | 
	 Tokyo Electron Limited | 
	 Cap for use in a semiconductor wafer heat processing apparatus | 
	 
    
	 | D404372,  | 
	 Aug 20 1997 | 
	 Tokyo Electron Limited | 
	 Ring for use in a semiconductor wafer heat processing apparatus | 
	 
    
	 | D491963,  | 
	 Nov 20 2002 | 
	 Tokyo Electron Limited | 
	 Inner wall shield for a process chamber for manufacturing semiconductors | 
	 
    
	 | D556704,  | 
	 Aug 25 2005 | 
	 HITACHI HIGH-TECH CORPORATION | 
	 Grounded electrode for a plasma processing apparatus | 
	 
    
	 | D557226,  | 
	 Aug 25 2005 | 
	 HITACHI HIGH-TECH CORPORATION | 
	 Electrode cover for a plasma processing apparatus | 
	 
    
	 | D557425,  | 
	 Aug 25 2005 | 
	 HITACHI HIGH-TECH CORPORATION | 
	 Cover ring for a plasma processing apparatus | 
	 
    
	 | D559993,  | 
	 Mar 30 2005 | 
	 Tokyo Electron Limited | 
	 Cover ring | 
	 
    
	 | D559994,  | 
	 Mar 30 2005 | 
	 Tokyo Electron Limited | 
	 Cover ring | 
	 
    
	 | D638550,  | 
	 Nov 13 2009 | 
	 DIASORIN ITALIA S P A  | 
	 Sample processing disk cover | 
	 
    
	 | D638951,  | 
	 Nov 13 2009 | 
	 DIASORIN ITALIA S P A  | 
	 Sample processing disk cover | 
	 
    
	 | D658691,  | 
	 Mar 30 2011 | 
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	 Liner for plasma processing apparatus | 
	 
    
	 | D658693,  | 
	 Mar 30 2011 | 
	 Tokyo Electron Limited | 
	 Liner for plasma processing apparatus | 
	 
    
	 | D667561,  | 
	 Nov 13 2009 | 
	 DIASORIN ITALIA S P A  | 
	 Sample processing disk cover | 
	 
    
	 | D699200,  | 
	 Sep 30 2011 | 
	 Tokyo Electron Limited | 
	 Electrode member for a plasma processing apparatus | 
	 
    
	 | D703160,  | 
	 Jan 27 2011 | 
	 HITACHI HIGH-TECH CORPORATION | 
	 Grounded electrode for a plasma processing apparatus | 
	 
    
	 | D716239,  | 
	 Nov 06 2013 | 
	 Applied Materials, Inc | 
	 Upper chamber liner | 
	 
    
	 | D716240,  | 
	 Nov 07 2013 | 
	 Applied Materials, Inc | 
	 Lower chamber liner | 
	 
    
	 | D717746,  | 
	 Nov 06 2013 | 
	 Applied Materials, Inc | 
	 Lower chamber liner | 
	 
    
	 | D766849,  | 
	 May 15 2013 | 
	 Ebara Corporation | 
	 Substrate retaining ring | 
	 
    
	 | D770992,  | 
	 Jun 12 2015 | 
	 HITACHI HIGH-TECH CORPORATION | 
	 Electrode cover for a plasma processing apparatus | 
	 
    
	 | JP1052359,  | 
	  | 
	  | 
	  | 
	 
    
	 | JP1267921,  | 
	  | 
	  | 
	  | 
	 
	
	
	
	
	
	  
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