Patent
   D658693
Priority
Mar 30 2011
Filed
Sep 07 2011
Issued
May 01 2012
Expiry
May 01 2026
Assg.orig
Entity
unknown
19
39
n/a
The ornamental design for a liner for plasma processing apparatus, as shown and described.

FIG. 1 is a front view of a liner for plasma processing apparatus showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a sectional view taken along line 5-5 of FIG. 2 thereof; and,

FIG. 6 is a perspective view thereof.

Ueda, Atsushi, Yamashita, Jun, Ban, Masakazu, Suzuki, Kouki

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Executed onAssignorAssigneeConveyanceFrameReelDoc
Aug 03 2011SUZUKI, KOUKITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0268720432 pdf
Aug 03 2011YAMASHITA, JUNTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0268720432 pdf
Aug 03 2011BAN, MASAKAZUTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0268720432 pdf
Aug 03 2011UEDA, ATSUSHITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0268720432 pdf
Sep 07 2011Tokyo Electron Limited(assignment on the face of the patent)
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