Patent
   D766849
Priority
May 15 2013
Filed
Nov 12 2013
Issued
Sep 20 2016
Expiry
Sep 20 2030
Assg.orig
Entity
unknown
22
36
n/a
The ornamental design for a substrate retaining ring, as shown and described.

FIG. 1 is a top perspective view of a first embodiment of a substrate retaining ring showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a side view thereof, with the ring being radially symmetrical about a vertical axis;

FIG. 6 is a top perspective view of a second embodiment of a substrate retaining ring showing our new design;

FIG. 7 is a bottom perspective view thereof;

FIG. 8 is a top plan view thereof;

FIG. 9 is a bottom plan view thereof; and,

FIG. 10 is a side view thereof, with the ring being radially symmetrical about a vertical axis.

The broken lines shown in the drawings represent portions of the substrate retaining ring that form no part of the claimed design.

Yasuda, Hozumi, Fukushima, Makoto, Nabeya, Osamu, Namiki, Keisuke, Togashi, Shingo, Yamaki, Satoru

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ER1922,
ER2449,
ER2608,
ER511,
ER9340,
Patent Priority Assignee Title
5205082, Dec 20 1991 Ebara Corporation Wafer polisher head having floating retainer ring
5944593, Sep 03 1997 United Microelectronics Corp. Retainer ring for polishing head of chemical-mechanical polish machines
6068548, Dec 17 1997 Intel Corporation Mechanically stabilized retaining ring for chemical mechanical polishing
6186880, Sep 29 1999 Semiconductor Equipment Technology Recyclable retaining ring assembly for a chemical mechanical polishing apparatus
6224472, Jun 24 1999 Samsung Austin Semiconductor, LLC Retaining ring for chemical mechanical polishing
6264540, Mar 30 2000 SpeedFam-IPEC Corporation Method and apparatus for disposable bladder carrier assembly
6602116, Dec 30 1997 Applied Materials Inc. Substrate retaining ring
6869335, Jul 08 2002 U S BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces
7029375, Aug 31 2004 TECH Semiconductor Singapore Pte Ltd Retaining ring structure for edge control during chemical-mechanical polishing
7029386, Jun 10 2004 M & R ENGINEERING, INC Retaining ring assembly for use in chemical mechanical polishing
7160493, Oct 11 2002 Semplastics, LLC; SEMPLASTICS, L L C Retaining ring for use on a carrier of a polishing apparatus
7186171, Apr 22 2005 Applied Materials, Inc Composite retaining ring
7326105, Aug 31 2005 U S BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces
7344434, Nov 13 2003 Applied Materials, Inc Retaining ring with shaped surface
7459057, May 15 1998 Applied Materials, Inc. Substrate retainer
7597609, Oct 12 2006 IV Technologies CO., Ltd. Substrate retaining ring for CMP
7819723, Mar 22 2007 Renesas Electronics Corporation Retainer ring and polishing machine
8298046, Oct 21 2009 ESP SPARES, INC Retaining rings
8517803, Sep 16 2009 SPM Technology, Inc.; SPM TECHNOLOGY, INC Retaining ring for chemical mechanical polishing
D548705, Sep 29 2005 Tokyo Electron Limited Attracting disc for an electrostatic chuck for semiconductor production
D699200, Sep 30 2011 Tokyo Electron Limited Electrode member for a plasma processing apparatus
D709536, Sep 30 2011 Tokyo Electron Limited Focusing ring
D709537, Sep 30 2011 Tokyo Electron Limited Focusing ring
D709538, Sep 30 2011 Tokyo Electron Limited Focusing ring
D709539, Sep 30 2011 Tokyo Electron Limited Focusing ring
D716742, Sep 13 2013 ASM IP Holding B.V. Substrate supporter for semiconductor deposition apparatus
D724553, Sep 13 2013 ASM IP Holding B.V. Substrate supporter for semiconductor deposition apparatus
D734377, Mar 28 2013 HIRATA CORPORATION Top cover of a load lock chamber
TW130502,
TW132339,
TW132340,
TW138369,
TW140827,
TW140828,
TW140829,
TW140830,
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 12 2013Ebara Corporation(assignment on the face of the patent)
Nov 15 2013FUKUSHIMA, MAKOTOEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0317060368 pdf
Nov 15 2013YASUDA, HOZUMIEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0317060368 pdf
Nov 15 2013YAMAKI, SATORUEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0317060368 pdf
Nov 18 2013NAMIKI, KEISUKEEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0317060368 pdf
Nov 18 2013NABEYA, OSAMUEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0317060368 pdf
Nov 18 2013TOGASHI, SHINGOEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0317060368 pdf
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