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Patent
D766849
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Priority
May 15 2013
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Filed
Nov 12 2013
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Issued
Sep 20 2016
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Expiry
Sep 20 2030
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Assg.orig
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Entity
unknown
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22
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36
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n/a
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The ornamental design for a substrate retaining ring, as shown and described.
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FIG. 1 is a top perspective view of a first embodiment of a substrate retaining ring showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a side view thereof, with the ring being radially symmetrical about a vertical axis;
FIG. 6 is a top perspective view of a second embodiment of a substrate retaining ring showing our new design;
FIG. 7 is a bottom perspective view thereof;
FIG. 8 is a top plan view thereof;
FIG. 9 is a bottom plan view thereof; and,
FIG. 10 is a side view thereof, with the ring being radially symmetrical about a vertical axis.
The broken lines shown in the drawings represent portions of the substrate retaining ring that form no part of the claimed design.
Yasuda, Hozumi, Fukushima, Makoto, Nabeya, Osamu, Namiki, Keisuke, Togashi, Shingo, Yamaki, Satoru
Patent |
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Title |
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D943539, |
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Patent |
Priority |
Assignee |
Title |
5205082, |
Dec 20 1991 |
Ebara Corporation |
Wafer polisher head having floating retainer ring |
5944593, |
Sep 03 1997 |
United Microelectronics Corp. |
Retainer ring for polishing head of chemical-mechanical polish machines |
6068548, |
Dec 17 1997 |
Intel Corporation |
Mechanically stabilized retaining ring for chemical mechanical polishing |
6186880, |
Sep 29 1999 |
Semiconductor Equipment Technology |
Recyclable retaining ring assembly for a chemical mechanical polishing apparatus |
6224472, |
Jun 24 1999 |
Samsung Austin Semiconductor, LLC |
Retaining ring for chemical mechanical polishing |
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Mar 30 2000 |
SpeedFam-IPEC Corporation |
Method and apparatus for disposable bladder carrier assembly |
6602116, |
Dec 30 1997 |
Applied Materials Inc. |
Substrate retaining ring |
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Jul 08 2002 |
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Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces |
7029375, |
Aug 31 2004 |
TECH Semiconductor Singapore Pte Ltd |
Retaining ring structure for edge control during chemical-mechanical polishing |
7029386, |
Jun 10 2004 |
M & R ENGINEERING, INC |
Retaining ring assembly for use in chemical mechanical polishing |
7160493, |
Oct 11 2002 |
Semplastics, LLC; SEMPLASTICS, L L C |
Retaining ring for use on a carrier of a polishing apparatus |
7186171, |
Apr 22 2005 |
Applied Materials, Inc |
Composite retaining ring |
7326105, |
Aug 31 2005 |
U S BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT |
Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces |
7344434, |
Nov 13 2003 |
Applied Materials, Inc |
Retaining ring with shaped surface |
7459057, |
May 15 1998 |
Applied Materials, Inc. |
Substrate retainer |
7597609, |
Oct 12 2006 |
IV Technologies CO., Ltd. |
Substrate retaining ring for CMP |
7819723, |
Mar 22 2007 |
Renesas Electronics Corporation |
Retainer ring and polishing machine |
8298046, |
Oct 21 2009 |
ESP SPARES, INC |
Retaining rings |
8517803, |
Sep 16 2009 |
SPM Technology, Inc.; SPM TECHNOLOGY, INC |
Retaining ring for chemical mechanical polishing |
D548705, |
Sep 29 2005 |
Tokyo Electron Limited |
Attracting disc for an electrostatic chuck for semiconductor production |
D699200, |
Sep 30 2011 |
Tokyo Electron Limited |
Electrode member for a plasma processing apparatus |
D709536, |
Sep 30 2011 |
Tokyo Electron Limited |
Focusing ring |
D709537, |
Sep 30 2011 |
Tokyo Electron Limited |
Focusing ring |
D709538, |
Sep 30 2011 |
Tokyo Electron Limited |
Focusing ring |
D709539, |
Sep 30 2011 |
Tokyo Electron Limited |
Focusing ring |
D716742, |
Sep 13 2013 |
ASM IP Holding B.V. |
Substrate supporter for semiconductor deposition apparatus |
D724553, |
Sep 13 2013 |
ASM IP Holding B.V. |
Substrate supporter for semiconductor deposition apparatus |
D734377, |
Mar 28 2013 |
HIRATA CORPORATION |
Top cover of a load lock chamber |
TW130502, |
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|
TW132339, |
|
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|
TW132340, |
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|
TW138369, |
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TW140827, |
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TW140828, |
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TW140829, |
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TW140830, |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a