Patent
   D794585
Priority
Oct 06 2015
Filed
Apr 05 2016
Issued
Aug 15 2017
Expiry
Aug 15 2032
Assg.orig
Entity
unknown
8
22
n/a
The ornamental design for a retainer ring for substrate, as shown and described.

FIG. 1 is a top perspective view of a retainer ring for substrate showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a front view thereof;

FIG. 6 is a rear view thereof;

FIG. 7 is a right side view thereof;

FIG. 8 is a left side view thereof;

FIG. 9 is an enlarged cross-section view thereof, taken along the line 9-9 of part 9 of FIG. 3;

FIG. 10 is an enlarged cross-section view thereof, taken along the line 10-10 of part 10 of FIG. 3;

FIG. 11 is an enlarged cross-section view thereof, taken along the line 11-11 of part 11 of FIG. 3;

FIG. 12 is an enlarged perspective view thereof, observed from an inside of the retainer ring and taken along the line 12,13-12,13 of FIG. 4; and,

FIG. 13 is an enlarged perspective view thereof, observed from an outside of the retainer ring and taken along the line 12,13-12,13 of FIG. 4.

The broken lines depict environmental subject matter only and form no part of the claimed design.

Yasuda, Hozumi, Fukushima, Makoto, Nabeya, Osamu, Namiki, Keisuke, Togashi, Shingo, Yamaki, Satoru

Patent Priority Assignee Title
D836573, Jan 31 2017 HITACHI HIGH-TECH CORPORATION Ring for a plasma processing apparatus
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Patent Priority Assignee Title
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Apr 04 2016NABEYA, OSAMUEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0382560089 pdf
Apr 04 2016YASUDA, HOZUMIEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0382560089 pdf
Apr 04 2016FUKUSHIMA, MAKOTOEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0382560089 pdf
Apr 04 2016TOGASHI, SHINGOEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0382560089 pdf
Apr 05 2016Ebara Corporation(assignment on the face of the patent)
Apr 07 2016NAMIKI, KEISUKEEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0382560089 pdf
Apr 07 2016YAMAKI, SATORUEbara CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0382560089 pdf
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