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Patent
D891636
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Priority
Oct 25 2018
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Filed
Apr 24 2019
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Issued
Jul 28 2020
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Expiry
Jul 28 2035
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Assg.orig
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Entity
unknown
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8
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13
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n/a
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The ornamental design for a ring for a plasma processing apparatus, as shown and described.
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FIG. 1 is a front, bottom and right side perspective view of a ring for a plasma processing apparatus according to the design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a rear elevational view thereof;
FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 2; and,
FIG. 9 is an enlarged view of the portion shown in BOX 9 in FIG. 8.
The box labelled as 9 in FIG. 8 is shown in broken lines and forms no part of the claimed design.
Mori, Masahito, Yokogawa, Kenetsu, Iwase, Taku, Arase, Takao, Isozaki, Masakazu
Patent |
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Title |
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ER3481, |
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ER7016, |
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ER7701, |
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Patent |
Priority |
Assignee |
Title |
10170283, |
Feb 25 2014 |
COORSTEK GK |
Focus ring for plasma processing apparatus |
8703249, |
Apr 17 2002 |
Lam Research Corporation |
Techniques for reducing arcing-related damage in a clamping ring of a plasma processing system |
9123661, |
Aug 07 2013 |
Lam Research Corporation |
Silicon containing confinement ring for plasma processing apparatus and method of forming thereof |
9165812, |
Jan 31 2014 |
Applied Materials, Inc. |
Cooled tape frame lift and low contact shadow ring for plasma heat isolation |
D694790, |
Sep 20 2011 |
Tokyo Electron Limited |
Baffle plate for manufacturing semiconductor |
D694791, |
Sep 20 2011 |
Tokyo Electron Limited |
Baffle plate for manufacturing semiconductor |
D697038, |
Sep 20 2011 |
Tokyo Electron Limited |
Baffle plate |
D802790, |
Jun 12 2015 |
HITACHI HIGH-TECH CORPORATION |
Cover ring for a plasma processing apparatus |
D810705, |
Apr 01 2016 |
VEECO INSTRUMENTS, INC |
Self-centering wafer carrier for chemical vapor deposition |
D836573, |
Jan 31 2017 |
HITACHI HIGH-TECH CORPORATION |
Ring for a plasma processing apparatus |
D840365, |
Jan 31 2017 |
HITACHI HIGH-TECH CORPORATION |
Cover ring for a plasma processing apparatus |
D871608, |
Jul 31 2017 |
HITACHI HIGH-TECH CORPORATION |
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D871609, |
Aug 31 2017 |
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Electrode plate peripheral ring for a plasma processing apparatus |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a