Patent
   D891636
Priority
Oct 25 2018
Filed
Apr 24 2019
Issued
Jul 28 2020
Expiry
Jul 28 2035
Assg.orig
Entity
unknown
8
13
n/a
The ornamental design for a ring for a plasma processing apparatus, as shown and described.

FIG. 1 is a front, bottom and right side perspective view of a ring for a plasma processing apparatus according to the design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a rear elevational view thereof;

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 2; and,

FIG. 9 is an enlarged view of the portion shown in BOX 9 in FIG. 8.

The box labelled as 9 in FIG. 8 is shown in broken lines and forms no part of the claimed design.

Mori, Masahito, Yokogawa, Kenetsu, Iwase, Taku, Arase, Takao, Isozaki, Masakazu

Patent Priority Assignee Title
D943539, Mar 19 2020 Applied Materials, Inc Confinement plate for a substrate processing chamber
D954986, Oct 18 2019 HITACHI HIGH-TECH CORPORATION Electrode cover for a plasma processing device
D958401, May 27 2020 HITACHI HIGH-TECH CORPORATION Ion shield plate for plasma processing device
D986190, Mar 19 2020 Applied Materials, Inc. Confinement plate for a substrate processing chamber
ER348,
ER3481,
ER7016,
ER7701,
Patent Priority Assignee Title
10170283, Feb 25 2014 COORSTEK GK Focus ring for plasma processing apparatus
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D802790, Jun 12 2015 HITACHI HIGH-TECH CORPORATION Cover ring for a plasma processing apparatus
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D836573, Jan 31 2017 HITACHI HIGH-TECH CORPORATION Ring for a plasma processing apparatus
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Apr 24 2019HITACHI HIGH-TECH CORPORATION(assignment on the face of the patent)
May 27 2019ISOZAKI, MASAKAZUHitachi High-Technologies CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0493270779 pdf
May 27 2019MORI, MASAHITOHitachi High-Technologies CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0493270779 pdf
May 27 2019YOKOGAWA, KENETSUHitachi High-Technologies CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0493270779 pdf
May 27 2019ARASE, TAKAOHitachi High-Technologies CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0493270779 pdf
May 27 2019IWASE, TAKUHitachi High-Technologies CorporationASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0493270779 pdf
Feb 12 2020Hitachi High-Technologies CorporationHITACHI HIGH-TECH CORPORATIONCHANGE OF NAME SEE DOCUMENT FOR DETAILS 0523980249 pdf
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