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Patent
D916038
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Priority
Mar 19 2019
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Filed
Sep 18 2019
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Issued
Apr 13 2021
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Expiry
Apr 13 2036
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Assg.orig
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Entity
unknown
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5
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11
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n/a
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The ornamental design for a grounded electrode for a plasma processing apparatus, as shown and described.
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FIG. 1 is a front, top and right side perspective view of a grounded electrode for a plasma processing apparatus according to the design;
FIG. 2 is a rear, bottom and left side perspective view thereof;
FIG. 3 is a front elevational view thereof;
FIG. 4 is a rear elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a top plan view thereof;
FIG. 8 is a bottom plan view thereof;
FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 7; and,
FIG. 10 is an enlarged view of the portion shown in BOX 10 in FIG. 9.
The broken lines show the boundary of enlarged portions and form no part of the claimed design.
Watanabe, Taku
Patent |
Priority |
Assignee |
Title |
6265094, |
Nov 12 1998 |
DURACELL U S OPERATIONS, INC |
Anode can for a metal-air cell |
D494551, |
Dec 12 2002 |
Tokyo Electron Limited |
Exhaust ring for manufacturing semiconductors |
D556704, |
Aug 25 2005 |
HITACHI HIGH-TECH CORPORATION |
Grounded electrode for a plasma processing apparatus |
D699200, |
Sep 30 2011 |
Tokyo Electron Limited |
Electrode member for a plasma processing apparatus |
D703160, |
Jan 27 2011 |
HITACHI HIGH-TECH CORPORATION |
Grounded electrode for a plasma processing apparatus |
D770992, |
Jun 12 2015 |
HITACHI HIGH-TECH CORPORATION |
Electrode cover for a plasma processing apparatus |
D812578, |
Feb 26 2016 |
HITACHI HIGH-TECH CORPORATION |
Upper chamber for a plasma processing apparatus |
D830435, |
Dec 28 2015 |
NTN Corporation |
Inner ring for tapered roller bearing |
D870314, |
Aug 31 2017 |
HITACHI HIGH-TECH CORPORATION |
Electrode cover for a plasma processing apparatus |
D871609, |
Aug 31 2017 |
HITACHI HIGH-TECH CORPORATION |
Electrode plate peripheral ring for a plasma processing apparatus |
D891382, |
Feb 08 2019 |
Applied Materials, Inc |
Process shield for a substrate processing chamber |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a