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Patent
D971167
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Priority
Aug 28 2019
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Filed
Apr 10 2021
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Issued
Nov 29 2022
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Expiry
Nov 29 2037
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Assg.orig
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Entity
unknown
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0
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46
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n/a
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The ornamental design for a lower shield for a substrate processing chamber, as shown and described.
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FIG. 1 is a top isometric view of a lower shield for a substrate processing chamber, according to the novel design.
FIG. 2 is a top plan view thereof.
FIG. 3 is a bottom plan view thereof.
FIG. 4 is a front elevation view thereof.
FIG. 5 is a back elevation view thereof.
FIG. 6 is a right side elevation view thereof.
FIG. 7 is a left side elevation view thereof; and,
FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2.
The broken lines show portions of a lower shield for a substrate processing chamber that form no part of the claimed design.
Zhang, Kang, Wada, Yuichi, Jupudi, Ananthkrishna, Ow, Yueh Sheng, Wei, Junqi, Boh, Kelvin, Babu, Sarath
Patent |
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Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Aug 30 2019 | WADA, YUICHI | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 055900 | /0123 |
pdf |
Sep 25 2019 | BABU, SARATH | APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 055900 | /0345 |
pdf |
Sep 25 2019 | KANG, ZHANG | APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 055900 | /0345 |
pdf |
Sep 26 2019 | JUPUDI, ANANTHKRISHNA | APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 055900 | /0345 |
pdf |
Sep 26 2019 | WEI, JUNQI | APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 055900 | /0345 |
pdf |
Sep 26 2019 | BOH, KELVIN | APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 055900 | /0345 |
pdf |
Oct 04 2019 | OW, YUEH SHENG | APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE LTD | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 055900 | /0345 |
pdf |
Jun 12 2020 | APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE LTD | Applied Materials, Inc | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 060745 | /0409 |
pdf |
Apr 10 2021 | | Applied Materials, Inc. | (assignment on the face of the patent) | | / |
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Maintenance Fee Events |
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